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CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(EJ) NU EJCECTOR TABLE ASSY.
01-E38496
CS-01-E38496
22
FROM: 01-E38496_C_2015.02.03
C1
C
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
9
10
11
12
14
15
16
17
18
19
21
22
23
24
25
26
27
28
32
1
2
3
4
5
6
7
8
13
29
30
31
NOTE:For the part table,please refer to page 10-8.
20
10-9
(EJ83) NU DIE EJECTOR
Section 11
Part NoDescriptionRevPage
01-E35501(WT) 8312SD WAFER TABLEC11-1
01-E10928(WT) WAFER TABLE X-BASEH11-3
01-E38490(WT) WAFER TABLE Y-BASEB11-4
01-E38491(WT) WAFER EXPANDERA11-5
01-E11105(WT) TOP PLATE UP/DN SCREW (DRIVING)B11-6
01-E11106(WT) TOP PLATE UP/DN SCREW (DRIVEN)D11-7
01-E11110(WT) ROTATING RING & PULLEY ASSYD11-8
01-E11112(WT) INNER RING ASSYC11-9
01-E11113(WT) EXPANDER TOP PLATE ASSYE11-10
01-E11116(WT) ROTATING RING ENCODER IDLERB11-11
01-E41542(WL) WAFER LOAD ASSY. (NONE CONTACT SNR)A11-12
01-E41543(WL) LOADER Y ARM ASSYB11-13
01-E41544(WL) LOADER CLAMP (NON CONTACT SNR)C11-14