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Section 2
Part NoDescriptionRevPage
01-E23739(WH)PROCESS PLATFORM ASSYF2-32
01-E18591(WH)WAFER COOLER ASSYC2-33
01-E23740(WH)AUX DISP AB ASSYB2-34
01-E23741(WH)DISP AB ASSYB2-35
01-E23742(WH)PREBOND AB ASSYB2-36
01-E23743(WH)BOND AB ASSYB2-37
01-E36691(WH)POSTBOND AB ASSYC2-38
01-E38498(WH)FRONT TRACK MODULEK2-39
01-E18608(WH)LOW ANGE SIDE LIGHT ASSYB2-40
01-E57122(WH) TILT FRONT TRACK ASSYD2-41
01-E62696(WH) ALIGNMENT CLAMP W/ 2 BSH ASSYC2-42
S01-E46664(WH) NO GLASS OUTPUT FIBRE SENSORA2-43
01-E44896(WH) WINDOW CLAMP(SNR VERSION)A2-44
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WHFC) WORKHOLDER
01-E35502
CS-01-E35502
21
FROM: 01-E35502_D_2015.06.10
D1
D
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E18273 (WH)LF ADJUST ASSY 1
2 01-E18561 (WH)INDEXER 1
3 01-E18610 (WH)PNEU ASSY 1
4 01-E20024 (WH)DISP WINDOW CLAMP 1
5 01-E20025 (WH)BOND WINDOW CLAMP 1
6 01-E23739 (WH)PROCESS PLATFORM ASSY 1
7 01-E38498 (WH)FRONT TRACK MODULE 1
8 01-E44896 (WH) WINDOW CLAMP(SNR VERSION) 1
9 20-00066 SOC HD CAP SCREW M4X12 ALLOY ST ZN PLT 16
Assembly View
1
2
3
6
7
9
4
5
8
NOTE:01-E20024,01-E20025 are included of 01-E44896 in the assembly.
Section 2(WHFC) WORKHOLDER
2-1