MN-E00372EDW-XX_B(1).pdf - 第157页

Section 11 Part No Description Rev Page 01-E35501 (WT) 8312SD WAFER TABLE C 11-1 01-E10928 (WT) WAFER TABLE X-BASE H 11-3 01-E38490 (WT) WAFER TABLE Y-BASE B 11-4 01-E38491 (WT) WAFER EXPANDER A 11-5 01-E11105 (WT) TOP P…

Section 11

Part NoDescriptionRevPage

01-E35501(WT) 8312SD WAFER TABLEC11-1

01-E10928(WT) WAFER TABLE X-BASEH11-3

01-E38490(WT) WAFER TABLE Y-BASEB11-4

01-E38491(WT) WAFER EXPANDERA11-5

01-E11105(WT) TOP PLATE UP/DN SCREW (DRIVING)B11-6

01-E11106(WT) TOP PLATE UP/DN SCREW (DRIVEN)D11-7

01-E11110(WT) ROTATING RING & PULLEY ASSYD11-8

01-E11112(WT) INNER RING ASSYC11-9

01-E11113(WT) EXPANDER TOP PLATE ASSYE11-10

01-E11116(WT) ROTATING RING ENCODER IDLERB11-11

01-E41542(WL) WAFER LOAD ASSY. (NONE CONTACT SNR)A11-12

01-E41543(WL) LOADER Y ARM ASSYB11-13

01-E41544(WL) LOADER CLAMP (NON CONTACT SNR)C11-14