YSB55w.pdf - 第53页
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Exterior, E/L
Exterior,etc
KLG-1608
13-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
K44-M643E-00
END PLATE
10
2
KG2-M643A-00
PARTS, 3-1
8
3
KGK-M4590-01
I/O TF BOARD ASSY.
1
4
KH4-M6513-41
CIRCUIT PROTECTOR, 1P
1
5
KHA-M6514-20
CIRCUIT PROTECTOR,4
1
6
KHG-M6513-01
CIRCUIT PROTECTOR, 1P
1
7
KHN-M6513-11
CIRCUIT PROTECTOR,1P
7
8
KHN-M653E-00
BREAKER,1
1
9
KHN-M6561-00
POWER SUPPLY 1
1
10
KK3-M6521-00
RELAY,DOT
1
11
KKE-M6561-10
POWER SUPPLY 1
2
12
KLA-M4506-01
HEAD I/O UNIT ASSY
5
13
KLF-M6185-80
FAN MOTOR ASSY.
5
14
KLG-M5318-00
POWER,TRANSFORMER
1
15
KLG-M6513-00
CIRCUIT PROTECTOR,1P
1
16
KLG-M6513-10
CIRCUIT PROTECTOR,1P
1
17
KLG-M6513-20
CIRCUIT PROTECTOR,1P
3
18
KLW-M5802-T0
HEAD SERVO UNIT ASSY
7
-47,-48,-49 Compati
OK
H025746-2018/10/24
19
KM6-M6514-00
CIRCUIT PROTECTOR,4
1
20
KLG-M5328-00
POWER,TRANSFORMER
1
21
90563-03J100
SPACER BOLT
7
22
90990-28J003
WASHER,PLAIN
6
23
91312-06010
BOLT HEX,SOCKET HEAD
4
24
91312-06014
BOLT HEX,SOCKET HEAD
2
25
97602-03106
SCREW PAN HEAD W/WASHER
7
32
29
4
30
9
25
28
2
31
33
10
11
23
3
27
28
20
26
8
19
1
21
22
31
27
21
24
5
6
29
17
16
23
18
7
12
14
13
21
15
32
29
4
30
9
25
28
2
31
33
10
11
23
3
27
28
20
26
8
19
1
21
22
31
27
21
24
5
6
29
17
16
23
18
7
12
14
13
21
15
EL / Foot
Wafer Elevation
KLY-1608
21-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M173C-00
PLATE, BTN
1
2
KLY-M173M-00
PLATE 3, SENSOR
1
3
KLY-M173N-00
PLATE, MIRROR
1
4
KLY-M173P-00
MIRROR
1
5
KLY-M654D-01
SENS,RING OUT ASSY
1
6
KLY-M17B7-01
BRACKET, EL PARTS
1
7
KLY-M17B8-00
COVER, EL PARTS
1
8
KLY-M17KE-00
BRKT., HNS.
1
9
KLY-M17KR-00
PLATE, SWITCH
1
10
KLY-M173Y-00
LEVEL ADJUSTER
4
11
KLL-M11AA-00
CASTER
4
12
KLF-M537G-30
CONTACTOR,1
1
13
KLF-M537G-40
CONTACTOR,1
1
14
KV5-M6442-00
RELAY SOCKET
1
15
KV5-M6522-10
RELAY,G2R-1-SND
1
16
KV9-M444A-00
RESISTOR 1
3
17
95302-04700
NUT HEXAGON
2
18
90990-11J003
SCREW, PAN HEAD W/W
18
19
90990-11J004
SCREW, PAN HEAD W/W
7
20
91312-03012
BOLT HEX,SOCKET HEAD
2
21
91312-04005
BOLT HEX,SOCKET HEAD
6
22
91312-04006
BOLT HEX,SOCKET HEAD
4
23
91312-04008
BOLT HEX,SOCKET HEAD
4
24
91312-04025
BOLT HEX,SOCKET HEAD
2
25
91312-04035
BOLT HEX,SOCKET HEAD
3
26
91312-05008
BOLT HEX,SOCKET HEAD
2
27
91312-08016
BOLT HEX,SOCKET HEAD
4
28
92902-03200
WASHER,PLAIN
5
29
92902-04200
WASHER,PLAIN
6
30
92902-05200
WASHER,PLAIN
2
31
92902-08200
WASHER,PLAIN
4
32
91312-06008
BOLT HEX,SOCKET HEAD
16
33
KLG-M5126-C0
SAFETY SWITCH ASSY
1
14
22
13
16
18
2
22
17
6
8
20
7
11
18
22
17
10
19
9
20
20
20
12
15
21
1
5
4
3
16
14
22
13
16
18
2
22
17
6
8
20
7
11
18
22
17
10
19
9
20
20
20
12
15
21
1
5
4
3
16
LZ Unit
Wafer Elevation
KLY-1608
21-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M172P-00
PLATE 1, CABLE
1
2
KLY-M172R-00
PLATE 2, CABLE
1
3
KLY-M17BA-00
DUCT, CABLE
1
4
KLY-M17BC-00
TAPE 1, DUCT
1
5
KLY-M17BD-00
TAPE 2, DUCT
1
6
KLY-M17S1-00
PLATE 1, MOTOR
1
7
KLY-M17S2-00
PLATE 2, MOTOR
1
8
KLY-M17S4-00
BELT
1
9
KLY-M17S5-00
PLATE 1, FOOT
1
10
KLY-M17S6-00
PLATE 2, FOOT
1
11
KLY-M17S7-00
PLATE 1, SIDE
1
12
KLY-M17S8-00
PLATE 2, SIDE
1
13
KH2-M1728-10
PULLEY 1
1
14
90K65-437413
AC SERVO MOTOR
1
15
92A08-05305
SCREW SET
1
16
98702-03006
SCREW,FLAT HEAD
4
17
91312-04006
BOLT HEX,SOCKET HEAD
4
18
91312-05008
BOLT HEX,SOCKET HEAD
8
19
91312-05010
BOLT HEX,SOCKET HEAD
4
20
91312-05012
BOLT HEX,SOCKET HEAD
18
21
97002-05030
BOLT HEXAGON
2
22
92902-05200
WASHER,PLAIN
12