YSB55w.pdf - 第54页

14 22 13 16 18 2 22 17 6 8 20 7 11 18 22 17 10 19 9 20 20 20 12 15 21 1 5 4 3 16 14 22 13 16 18 2 22 17 6 8 20 7 11 18 22 17 10 19 9 20 20 20 12 15 21 1 5 4 3 16 LZ Unit W afer Elevation KL Y -1608 21-2 NO Parts_No. Part…

100%1 / 92
32
29
30
9
25
28
31
33
10
11
23
27
28
20
26
19
1
21
22
31
27
21
24
5
6
29
17
16
23
18
7
12
14
13
21
15
32
29
30
9
25
28
31
33
10
11
23
27
28
20
26
19
1
21
22
31
27
21
24
5
6
29
17
16
23
18
7
12
14
13
21
15
EL / Foot
Wafer Elevation
KLY-1608
21-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M173C-00
PLATE, BTN
1
2
KLY-M173M-00
PLATE 3, SENSOR
1
3
KLY-M173N-00
PLATE, MIRROR
1
4
KLY-M173P-00
MIRROR
1
5
KLY-M654D-01
SENS,RING OUT ASSY
1
6
KLY-M17B7-01
BRACKET, EL PARTS
1
7
KLY-M17B8-00
COVER, EL PARTS
1
8
KLY-M17KE-00
BRKT., HNS.
1
9
KLY-M17KR-00
PLATE, SWITCH
1
10
KLY-M173Y-00
LEVEL ADJUSTER
4
11
KLL-M11AA-00
CASTER
4
12
KLF-M537G-30
CONTACTOR,1
1
13
KLF-M537G-40
CONTACTOR,1
1
14
KV5-M6442-00
RELAY SOCKET
1
15
KV5-M6522-10
RELAY,G2R-1-SND
1
16
KV9-M444A-00
RESISTOR 1
3
17
95302-04700
NUT HEXAGON
2
18
90990-11J003
SCREW, PAN HEAD W/W
18
19
90990-11J004
SCREW, PAN HEAD W/W
7
20
91312-03012
BOLT HEX,SOCKET HEAD
2
21
91312-04005
BOLT HEX,SOCKET HEAD
6
22
91312-04006
BOLT HEX,SOCKET HEAD
4
23
91312-04008
BOLT HEX,SOCKET HEAD
4
24
91312-04025
BOLT HEX,SOCKET HEAD
2
25
91312-04035
BOLT HEX,SOCKET HEAD
3
26
91312-05008
BOLT HEX,SOCKET HEAD
2
27
91312-08016
BOLT HEX,SOCKET HEAD
4
28
92902-03200
WASHER,PLAIN
5
29
92902-04200
WASHER,PLAIN
6
30
92902-05200
WASHER,PLAIN
2
31
92902-08200
WASHER,PLAIN
4
32
91312-06008
BOLT HEX,SOCKET HEAD
16
33
KLG-M5126-C0
SAFETY SWITCH ASSY
1
14
22
13
16
18
2
22
17
20
11
18
22
17
10
19
20
20
20
12
15
21
1
4
3
16
14
22
13
16
18
2
22
17
20
11
18
22
17
10
19
20
20
20
12
15
21
1
4
3
16
LZ Unit
Wafer Elevation
KLY-1608
21-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M172P-00
PLATE 1, CABLE
1
2
KLY-M172R-00
PLATE 2, CABLE
1
3
KLY-M17BA-00
DUCT, CABLE
1
4
KLY-M17BC-00
TAPE 1, DUCT
1
5
KLY-M17BD-00
TAPE 2, DUCT
1
6
KLY-M17S1-00
PLATE 1, MOTOR
1
7
KLY-M17S2-00
PLATE 2, MOTOR
1
8
KLY-M17S4-00
BELT
1
9
KLY-M17S5-00
PLATE 1, FOOT
1
10
KLY-M17S6-00
PLATE 2, FOOT
1
11
KLY-M17S7-00
PLATE 1, SIDE
1
12
KLY-M17S8-00
PLATE 2, SIDE
1
13
KH2-M1728-10
PULLEY 1
1
14
90K65-437413
AC SERVO MOTOR
1
15
92A08-05305
SCREW SET
1
16
98702-03006
SCREW,FLAT HEAD
4
17
91312-04006
BOLT HEX,SOCKET HEAD
4
18
91312-05008
BOLT HEX,SOCKET HEAD
8
19
91312-05010
BOLT HEX,SOCKET HEAD
4
20
91312-05012
BOLT HEX,SOCKET HEAD
18
21
97002-05030
BOLT HEXAGON
2
22
92902-05200
WASHER,PLAIN
12
29
11
30
25
14
6
29
31
19
20
24
29
15
12
17
11
19
25
20
6
22
25
18
19
13
22
14
6
3
25
30
13
29
21
26
28
12
16
10
23
27
24
24
24
29
11
30
25
14
6
29
31
19
20
24
29
15
12
17
11
19
25
20
6
22
25
18
19
13
22
14
6
3
25
30
13
29
21
26
28
12
16
10
23
27
24
24
24
LZ Axis Assy
Wafer Elevetion
KLY-M1608
21-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1722-00
PLATE 1
1
2
KLY-M1725-00
PLATE, RACK
1
3
KLY-M1726-00
BLOCK, BALL SCREW
1
4
KLY-M1727-00
BLOCK 1, BEARING
1
5
KLY-M1728-00
BLOCK 2, BEARING
1
6
KLY-M17S9-00
PLATE, STOPPER
4
7
KLY-M9A00-00
BALL SCREW LZ
1
8
KJY-M170A-00
PULLEY 2
1
9
KKL-M1741-00
BEARING
1
10
KV4-M9108-00
PLATE SCREW BRG
1
11
90K80-S15LW0
LM BLOCK
2
12
90K80-S15RW0
LM BLOCK
2
13
90990-33J001
BOLT, STOPPER
2
14
90990-33J010
BOLT, STOPPER
2
15
90933-01J000
BEARING
1
16
99009-10400
CIRCLIP
1
17
90185-00J000
NUT, U
1
18
92A08-05308
SCREW SET
2
19
99480-06012
PIN,PARALLEL
3
20
99480-06014
PIN,PARALLEL
4
21
91312-04010
BOLT HEX,SOCKET HEAD
4
22
91312-04016
BOLT HEX,SOCKET HEAD
24
23
91312-04018
BOLT HEX,SOCKET HEAD
4
24
91312-04020
BOLT HEX,SOCKET HEAD
16
25
91312-05012
BOLT HEX,SOCKET HEAD
8
26
91312-05045
BOLT HEX,SOCKET HEAD
2
27
91312-05050
BOLT HEX,SOCKET HEAD
4
28
91312-06020
BOLT HEX,SOCKET HEAD
4
29
95302-08700
NUT HEXAGON
4
30
90K71-3U0690
LM GUIDE
2
31
KLY-M1721-00
LZ AXIS ASSY.
1