YSB55w.pdf - 第61页
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Shuttle
Wafer Con.
KLY-1608
22-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1764-00
GUIDE 1
1
2
KLY-M1765-00
GUIDE 2
2
3
KLY-M1767-00
GUIDE 4
2
4
KLY-M176T-00
STAY,MOTOR 2
1
5
KLY-M176U-00
PLATE,MOTOR 2
1
6
KLY-M176V-00
BELT
1
7
KLY-M176W-00
PULLEY ASSY.
1
8
KLY-M176X-00
SHAFT,PULLEY
1
9
KLY-M176Y-00
PULLEY ASSY.
1
10
KLY-M1771-00
HOLDER,PULLEY
1
11
KLY-M177H-00
PULLEY ASSY.
2
12
KLY-M177V-00
PULLEY2,TIMING
2
13
KLY-M177W-00
SHAFT 1,PULLEY
2
14
KLY-M177X-00
COLLAR
2
15
KLY-M177A-00
DAMPER
2
16
KLY-M1779-00
DOG
1
17
KLY-M17X0-00
LM GUIDE,LH AXIS
1
18
KC0-M1751-00
PULLEY 1
1
19
90933-01J200
BEARING
4
20
90990-28J051
WASHER,PLAIN
2
21
90990-41J028
COLLAR
1
22
90990-41J038
COLLAR
1
23
90990-41J132
COLLAR
4
24
90990-41J180
COLLAR
12
25
90990-01J011
BOLT HEX,SOCKET HEAD
2
26
90K81-200004
CAP C4
7
27
90K2F-0M2837
AC SERVO MOTOR
1
28
$NK-3N
NYLON CLIP
2
29
91312-04008
BOLT HEX,SOCKET HEAD
4
30
91312-05035
BOLT HEX,SOCKET HEAD
1
31
91312-05030
BOLT HEX,SOCKET HEAD
1
32
91312-03008
BOLT HEX,SOCKET HEAD
12
33
91312-03010
BOLT HEX,SOCKET HEAD
4
34
91312-04005
BOLT HEX,SOCKET HEAD
2
35
91312-04010
BOLT HEX,SOCKET HEAD
2
36
91312-04012
BOLT HEX,SOCKET HEAD
11
37
92902-03600
WASHER,PLAIN
12
38
92902-04200
WASHER,PLAIN
4
39
92A08-04003
SCREW,SET
2
40
90990-11J003
SCREW, PAN HEAD W/W
2
41
90933-03J696
BEARING
4
42
92902-04600
WASHER,PLAIN
2
4
23
45
40
3
40
34
40
19
45
45
19
14
5
1
38
43
35
22
41
42
9
18
13
37
37
33
41
31
11
16
6
28
13
33
7
34
27
37
31
37
26
45
34
32
25
8
15
43
25
22
2
12
30
41
36
33
21
32
35
38
38
17
43
25
39
29
40
1
10
25
41
2
44
42
24
20
4
23
45
40
3
40
34
40
19
45
45
19
14
5
1
38
43
35
22
41
42
9
18
13
37
37
33
41
31
11
16
6
28
13
33
7
34
27
37
31
37
26
45
34
32
25
8
15
43
25
22
2
12
30
41
36
33
21
32
35
38
38
17
43
25
39
29
40
1
10
25
41
2
44
42
24
20
Tramsport
Wafer Con.
KLY-1608
22-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1769-00
STAY,BELT
2
2
KLY-M176A-00
BELT, CONVEYOR
2
3
KLY-M176E-00
SENSOR ASSY.
1
4
KLY-M176F-00
SENSOR ASSY.
1
5
KLY-M176H-00
SENSOR ASSY.
1
6
KLY-M17BP-00
PLATE,SENSOR
1
7
KLY-M176G-00
PLATE,SENSOR
2
8
KLY-M176L-00
PLATE,BRG 1
1
9
KLY-M176M-00
PLATE,BRG 2
1
10
KLY-M176N-00
PLATE,MOTOR 2
1
11
KLY-M176P-00
SHAFT,DRIVE 1
1
12
KLY-M176R-00
SHAFT,DRIVE 2
1
13
KLY-M176S-00
PULLEY,DRIVE
2
14
KLY-M1799-00
GUIDE,DUCT
1
15
KLY-M17AC-00
COVER,MOTOR
1
16
KLY-M17AJ-00
COVER,PULLEY
1
17
KLY-M17B1-00
COVER
1
18
KLY-M17B2-00
COLLAR
1
19
KC7-M4854-00
SQUARE NUT,M5
2
20
KG7-M9113-01
PULLEY 3
1
21
KH2-M9105-11
PULLEY,MOTOR:P30-3GT
1
22
KH2-M9121-00
BEARING
2
23
KLF-M9107-00
COUPLING
1
24
KV1-M910A-00
BELT(246-3GT-9)
1
25
KV1-M9140-A0
PULLEY,CONV. ASSY.
10
26
KLY-M653W-00
SENS,RING POS1 ASSY
1
27
KLY-M653W-10
SENS,RING POS3 ASSY
1
28
KLY-M653W-20
SENS,RING POS2 ASSY
1
29
90K2G-0M2836
AC SERVO MOTOR
1
30
$CTAM1
ANCHOR MOUNT
1
31
$NK-3N
NYLON CLIP
2
32
90990-01J011
BOLT HEX,SOCKET HEAD
4
33
90990-11J003
SCREW, PAN HEAD W/W
3
34
90990-01J049
BOLT HEX,SOCKET HEAD
6
35
90990-28J070
WASHER,PLAIN
2
36
90990-28J110
WASHER,PLAIN
1
37
92A08-03005
SCREW,SET
4
38
92A08-04006
SCREW,SET
4
39
91312-03008
BOLT HEX,SOCKET HEAD
4
40
91312-04005
BOLT HEX,SOCKET HEAD
10
41
91312-04006
BOLT HEX,SOCKET HEAD
8
42
91312-04008
BOLT HEX,SOCKET HEAD
4
43
91312-04010
BOLT HEX,SOCKET HEAD
4
44
92902-04200
WASHER,PLAIN
2
45
92902-05600
WASHER,PLAIN
10
6
13
42
39
38
43
21
9
5
24
31
40
44
7
3
34
4
17
15
34
41
43
38
19
36
28
27
23
20
17
33
26
35
18
34
14
10
11
45
12
32
30
16
35
1
29
32
22
37
25
8
35
13
2
45
6
13
42
39
38
43
21
9
5
24
31
40
44
7
3
34
4
17
15
34
41
43
38
19
36
28
27
23
20
17
33
26
35
18
34
14
10
11
45
12
32
30
16
35
1
29
32
22
37
25
8
35
13
2
45
Base / Mainte
Wafer Con.
KLY-1608
22-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1761-00
PLATE,BASE
1
2
KLY-M176C-00
PLATE,STAND 1
1
3
KLY-M176D-00
PLATE,STAND 2
1
4
KLY-M177B-00
BLOCK,CLAMP 1
1
5
KLY-M177C-00
BLOCK,CLAMP 2
1
6
KLY-M177D-00
CLAMPER
1
7
KLY-M177E-00
CASE
1
8
KLY-M177F-00
PLATE,HNS
1
9
KLY-M177L-00
BRACKET,SENSOR
1
10
KLY-M177M-00
COVER 3
1
11
KLY-M177N-00
COVER 4
1
12
KLY-M177Y-00
COVER 5
1
13
KLY-M179V-00
RAIL,SLIDE
2
14
KLY-M17AE-00
COVER 2
1
15
KLY-M17AN-00
BLOCK,CLAMP BASE
1
16
KLY-M17B3-00
PANEL,CONNECT
1
17
KLY-M17B6-00
PLATE,RAIL
2
18
KLY-M17AB-00
PLATE,VALVE
1
19
KLY-M17BF-00
BRACKET,SPEED CONT.
1
20
KLV-M8505-00
VALVE
1
21
KLW-M916A-00
SPEED CONTROLLER
1
22
KLY-M2606-00
PLATE,CABLE Y
1
23
KLY-M2615-00
SHEET,RUBBER
1
24
KLY-M654A-00
SENS,CONV FIX ASSY
1
25
KLY-M66NC-00
HNS, LH1-FLEX
1
26
$KM-10
MUFFLER
1
27
$SL6-01
JOINT
1
28
$ULA4M
JOINT
4
29
$CTAM1
ANCHOR MOUNT
5
30
$NK-3N
NYLON CLIP
1
31
90166-02J204
SCREW, PAN HEAD
2
32
90990-11J003
SCREW, PAN HEAD W/W
6
33
91312-03045
BOLT HEX,SOCKET HEAD
2
34
91312-04005
BOLT HEX,SOCKET HEAD
17
35
91312-04006
BOLT HEX,SOCKET HEAD
8
36
91312-04025
BOLT HEX,SOCKET HEAD
2
37
91312-03006
BOLT HEX,SOCKET HEAD
4
38
91312-04008
BOLT HEX,SOCKET HEAD
8
39
91312-05008
BOLT HEX,SOCKET HEAD
2
40
91312-05020
BOLT HEX,SOCKET HEAD
2
41
91312-05035
BOLT HEX,SOCKET HEAD
2
42
92902-04200
WASHER,PLAIN
2
43
92902-05200
WASHER,PLAIN
4
44
92902-05600
WASHER,PLAIN
2
45
92012-04006
BOLT, BOTTON HEAD
2