YSB55w.pdf - 第56页
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LZ Axis Assy
Wafer Elevetion
KLY-M1608
21-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1722-00
PLATE 1
1
2
KLY-M1725-00
PLATE, RACK
1
3
KLY-M1726-00
BLOCK, BALL SCREW
1
4
KLY-M1727-00
BLOCK 1, BEARING
1
5
KLY-M1728-00
BLOCK 2, BEARING
1
6
KLY-M17S9-00
PLATE, STOPPER
4
7
KLY-M9A00-00
BALL SCREW LZ
1
8
KJY-M170A-00
PULLEY 2
1
9
KKL-M1741-00
BEARING
1
10
KV4-M9108-00
PLATE SCREW BRG
1
11
90K80-S15LW0
LM BLOCK
2
12
90K80-S15RW0
LM BLOCK
2
13
90990-33J001
BOLT, STOPPER
2
14
90990-33J010
BOLT, STOPPER
2
15
90933-01J000
BEARING
1
16
99009-10400
CIRCLIP
1
17
90185-00J000
NUT, U
1
18
92A08-05308
SCREW SET
2
19
99480-06012
PIN,PARALLEL
3
20
99480-06014
PIN,PARALLEL
4
21
91312-04010
BOLT HEX,SOCKET HEAD
4
22
91312-04016
BOLT HEX,SOCKET HEAD
24
23
91312-04018
BOLT HEX,SOCKET HEAD
4
24
91312-04020
BOLT HEX,SOCKET HEAD
16
25
91312-05012
BOLT HEX,SOCKET HEAD
8
26
91312-05045
BOLT HEX,SOCKET HEAD
2
27
91312-05050
BOLT HEX,SOCKET HEAD
4
28
91312-06020
BOLT HEX,SOCKET HEAD
4
29
95302-08700
NUT HEXAGON
4
30
90K71-3U0690
LM GUIDE
2
31
KLY-M1721-00
LZ AXIS ASSY.
1
47
45
46
52
32
33
35
35
11
5
12
7
6
24
1
39
40
24
19
17
41
14
16
24
28
26
19
34
21
30
23
13
18
34
3
29
51
10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
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20
26
18
18
41
35
27
35
27
9
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22
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24
19
17
41
14
16
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26
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21
30
23
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18
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10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
45
20
26
18
18
41
35
27
35
27
9
36
22
27
27
48
43
44
47
42
47
38
47
45
Rack Assy
Wafer Elevation
KLY-1608
21-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M172A-00
PLATE1, RACK
1
2
KLY-M172D-00
PLATE, TOP
1
3
KLY-M172G-00
RAIL 3
2
4
KLY-M172H-00
BRACKET, SENSOR
1
5
KLY-M172J-00
RACK LOCK ASSY.
1
6
KLY-M1731-00
PLATE 1, RAIL
2
7
KLY-M1734-00
RAIL 8
1
8
KLY-M1735-00
RAIL 9
2
9
KLY-M173R-00
RAIL 12
2
10
KLY-M173S-00
PLATE 3, RAIL
2
11
KLY-M173T-00
BLOCK, STOPPER
1
12
KLY-M17SC-00
PLATE 3, RACK
1
13
KLY-M17SD-00
PLATE 4, RACK
1
14
KLY-M17SE-00
PLATE 5, RACK
1
15
KLY-M17SF-00
PLATE 6, RACK
1
16
KLY-M17W6-00
PLATE, COVER
1
17
KLY-M654B-00
SENS,CST DET ASSY
1
18
KLC-M910N-00
SPACER
8
19
$NK-3N
NYLON CLIP
5
20
90990-31J023
BOLT, SHOULDER
2
21
90990-28J141
WASHER,PLAIN
8
22
90990-41J138
COLLAR
12
23
90990-41J166
COLLAR
2
24
90990-11J001
SCREW, PAN HEAD W/W
5
25
98902-03010
SCREW BINDING HEAD
2
26
92012-04006
BOLT, BOTTON HEAD
8
27
91312-04005
BOLT HEX,SOCKET HEAD
16
28
91312-04006
BOLT HEX,SOCKET HEAD
6
29
91312-04008
BOLT HEX,SOCKET HEAD
8
30
91312-04010
BOLT HEX,SOCKET HEAD
8
31
91312-04020
BOLT HEX,SOCKET HEAD
2
32
91312-05008
BOLT HEX,SOCKET HEAD
10
33
91312-05010
BOLT HEX,SOCKET HEAD
6
34
92902-04200
WASHER,PLAIN
12
35
92902-05200
WASHER,PLAIN
22
36
KLY-M17A1-00
PLATE, SET
1
37
KLY-M172U-00
PLATE 2, FRAME
2
38
KLY-M172Y-00
RAIL 7
1
39
KLY-M1735-00
RAIL 9
2
40
KLY-M1736-00
PLATE, ANGLE
2
41
KLY-M173R-00
RAIL 12
2
42
KLY-M173S-00
PLATE 3, RAIL
1
43
KLC-M910N-00
SPACER
4
44
90990-28J141
WASHER,PLAIN
6
45
90990-41J138
COLLAR
7
46
91312-04005
BOLT HEX,SOCKET HEAD
4
47
91312-04006
BOLT HEX,SOCKET HEAD
11
48
91312-04008
BOLT HEX,SOCKET HEAD
4
49
92012-04006
BOLT, BOTTON HEAD
4
50
92902-04200
WASHER,PLAIN
4
51
KLY-M1729-00
RACK ASSY.
1
52
91312-05014
BOLT HEX,SOCKET HEAD
6
12
16
3
20
4
16
22
2
14
22
11
21
19
22
5
13
19
9
7
10
15
1
6
19
22
16
14
23
17
18
11
16
8
12
16
3
20
4
16
22
2
14
22
11
21
19
22
5
13
19
9
7
10
15
1
6
19
22
16
14
23
17
18
11
16
8
Cover Assy
Wafer Elevation
KLY-1608
21-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M17K1-00
COVER, FRONT
1
2
KLY-M17K2-00
COVER, RIGHT
1
3
KLY-M17K3-00
COVER, LEFT
1
4
KLY-M17K4-01
COVER, REAR
1
5
KLY-M17K9-01
PLATE, RACK
2
6
KLY-M17LF-01
PLATE 2, RACK
1
7
KLY-M17LG-01
COVER 2, REAR
1
8
KLY-M17LJ-00
COVER 2, RIGHT
1
9
KLY-M17LP-00
COVER, DRAIN
1
10
KLY-M17LS-00
COVER 3, REAR
1
11
KLY-M173L-00
STAY 2, CONNECT
2
12
KH2-M1130-00
CATCH,MAGNET
2
13
KV7-M1396-00
WASHER
4
14
90990-11J003
SCREW, PAN HEAD W/W
8
15
90990-11J004
SCREW, PAN HEAD W/W
4
16
90990-46J010
BOLT, THIN HEAD
37
17
90990-28J082
WASHER,PLAIN
8
18
90990-28J127
WASHER,PLAIN
8
19
92902-05200
WASHER,PLAIN
6
20
98702-03006
SCREW,FLAT HEAD
4
21
91312-04008
BOLT HEX,SOCKET HEAD
3
22
91312-05010
BOLT HEX,SOCKET HEAD
14
23
91312-06012
BOLT HEX,SOCKET HEAD
8