YSB55w.pdf - 第78页
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Height Ajust
Wafer Ejector
KLG-1608
25-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KJY-M652J-00
SENSOR V.AMP AB ASSY
1
2
KLF-M748B-01
COUPLING
1
3
KLH-M7C2A-00
BEARING
1
4
KLH-M7C2G-00
PLATE,BEARING
1
5
KLH-M7C2N-00
LOCK NUT,SCREW
1
6
KLY-M7102-00
BALL SCREW
1
7
KLY-M7105-00
HOLDER,BEARING
1
8
KLY-M7106-00
DAMPER LP
2
9
KLY-M7107-00
GUIDE
1
10
KLY-M7108-00
SPRING RETURN
1
11
KLY-M710A-00
COLLAR
2
12
KLY-M710B-00
HOLDER,MOTOR
1
13
KLY-M7111-00
PIN,POST
2
14
KLY-M9730-00
PLATE,LU
1
15
KLY-M9731-00
HOLDER,NUT LU
1
16
KLY-M9732-00
ARM LU
1
17
KLY-M9733-00
STOPPER
1
18
KLY-M9735-00
BRACKET,SENSOR
1
19
$ATSH6-01
JOINT
1
20
$KM-11
MUFFLER
1
21
$TL10-01
JOINT
1
22
$TL6-M5M
JOINT
1
23
$ULA10
JOINT
1
24
KLY-M9726-00
VALVE
1
25
KLY-M9736-00
INLINE FILTER
1
26
90933-02J624
BEARING
1
27
90990-02J004
SERWE,SET
2
28
90990-41J107
COLLAR
2
29
90K2G-0M1031
AC SERVO MOTOR
1
30
91312-03008
BOLT HEX,SOCKET HEAD
2
31
91312-03010
BOLT HEX,SOCKET HEAD
14
32
91312-03012
BOLT HEX,SOCKET HEAD
2
33
91312-03014
BOLT HEX,SOCKET HEAD
8
34
91312-03018
BOLT HEX,SOCKET HEAD
4
35
91312-03020
BOLT HEX,SOCKET HEAD
2
36
91312-04010
BOLT HEX,SOCKET HEAD
2
37
91312-04012
BOLT HEX,SOCKET HEAD
2
38
91312-04016
BOLT HEX,SOCKET HEAD
3
39
91312-04018
BOLT HEX,SOCKET HEAD
4
41
92902-03600
WASHER,PLAIN
4
42
92902-04200
WASHER,PLAIN
3
43
92902-04600
WASHER,PLAIN
2
44
99009-04400
CIRCLIP
1
45
99480-03008
PIN,PARALLEL
4
46
99480-04008
PIN,PARALLEL
1
47
99480-04012
PIN,PARALLEL
2
21
3
7
14
14
19
9
14
15
2
5
14
4
20
16
11
6
1
23
16
18
22
15
17
8
22
24
23
24
13
12
13
22
23
15
10
24
21
3
7
14
14
19
9
14
15
2
5
14
4
20
16
11
6
1
23
16
18
22
15
17
8
22
24
23
24
13
12
13
22
23
15
10
24
Wafer Cam Assy
Wafer Camera
KLY-1608
26-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7212-00
DIFFUSER,COAX
1
2
KLY-M7213-00
AR SHEET
1
3
KLY-M721A-00
BRKT.,LIGHT COAX
1
4
KLY-M721B-00
COVER,LIGHT
1
5
KLY-M721C-00
COVER,CAMERA
1
6
KGT-M71ST-50
STICKER,HEAD
2
7
KLY-M72L1-00
W.LIGHT SUB ASSY.
1
8
KLY-M7221-00
STAY,LIGHT
1
9
KLY-M7222-00
COVER,LIGHT 1
1
10
KLY-M7223-00
COVER,LIGHT 2
1
11
KLY-M7224-00
COVER,LIGHT 3
1
12
KLY-M7227-00
DIFFUSER,MAIN 1
1
13
KLY-M7228-00
DIFFUSER,MAIN 2
2
14
KLY-M725S-20
W.LIGHT BOARD SET
1
15
90112-2AJ005
BOLT,HEX.SOCKET HEAD
10
16
91312-04006
BOLT,HEX.SOCKET HEAD
8
17
91312-04010
BOLT,HEX.SOCKET HEAD
10
18
91312-04012
BOLT,HEX.SOCKET HEAD
6
19
91312-06016
BOLT,HEX.SOCKET HEAD
4
20
92012-03006
BOLT, BUTTON HEAD
4
21
99480-05010
PIN,PARALLEL
2
22
90563-0AJ040
SPACER,BOLT
6
23
90990-41J174
COLLAR
6
24
91312-03005
BOLT HEX,SOCKET HEAD
6
30
28
22
33
7
29
9
8
29
29
29
6
18
33
42
10
23
38
40
36
16
30
34
13
39
24
41
14
15
19
26
12
30
15
32
19
37
1
11
32
31
30
4
3
37
17
30
20
21
30
25
35
5
2
27
30
30
28
22
33
7
29
9
8
29
29
29
6
18
33
42
10
23
38
40
36
16
30
34
13
39
24
41
14
15
19
26
12
30
15
32
19
37
1
11
32
31
30
4
3
37
17
30
20
21
30
25
35
5
2
27
30
LFP Axis
Flip Head Section
KLG-1608
27-1
B
A
B
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KHY-M711A-00
PIN,POST
1
2
KLF-M748B-01
COUPLING
1
3
KLH-M7C2A-00
BEARING
1
4
KLH-M7C2G-00
PLATE,BEARING
1
5
KLH-M7C2N-00
LOCK NUT,SCREW
1
6
KLT-M653L-00
SENS, LERA SAFE ASSY
1
A
7
KLT-M653L-10
SENS, FLRB SAFE ASSY
1
B
8
KLT-M653M-00
SENS, LERA UPPER ASSY
1
A
9
KLT-M653M-10
SENS, LFPB UPPER ASSY
1
B
10
KLY-M7101-00
PLATE,HEAD
1
11
KLY-M7102-00
BALL SCREW
1
12
KLY-M7103-00
HOLDER,NUT A LP
1
13
KLY-M7104-00
ARM LP
1
14
KLY-M7105-00
HOLDER,BEARING
1
15
KLY-M7106-00
DAMPER LP
2
16
KLY-M7107-00
GUIDE
1
17
KLY-M7108-00
SPRING RETURN
1
18
KLY-M7109-00
BRACKET,SENSOR
1
A
19
KLY-M710A-00
COLLAR
2
20
KLY-M710B-00
HOLDER,MOTOR
1
21
KLY-M7111-00
PIN,POST
1
22
KLY-M7119-00
BRACKET,SENSOR
1
B
23
90563-03J100
SPACER
1
24
90933-02J624
BEARING
1
25
90990-02J004
SCREW, SET
2
26
90990-41J107
COLLAR
2
27
90K2G-0R2838
AC SERVO MOTOR
1
A
28
90K2G-0R2839
AC SERVO MOTOR
1
B
29
91312-03006
BOLT HEX,SOCKET HEAD
8
30
91312-03012
BOLT HEX,SOCKET HEAD
24
31
91312-03018
BOLT HEX,SOCKET HEAD
4
32
91312-03020
BOLT HEX,SOCKET HEAD
2
33
91312-04010
BOLT HEX,SOCKET HEAD
4
34
91312-04012
BOLT HEX,SOCKET HEAD
2
35
91312-04020
BOLT HEX,SOCKET HEAD
4
36
91312-05025
BOLT HEX,SOCKET HEAD
4
37
92902-03600
WASHER,PLAIN
4
38
92902-05600
WASHER,PLAIN
4
39
99009-04400
CIRCLIP
1
40
99480-03008
PIN,PARALLEL
4
41
99480-04008
PIN,PARALLEL
1
42
99480-04012
PIN,PARALLEL
2