YSB55w.pdf - 第67页

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LX Axis
Wafer Moving Axis
KLY-1608
23-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M2201-00
PLATE 1,BASE X
1
2
KLY-M2202-00
PLATE,FOOT A
1
3
KLY-M2203-00
PLATE,FOOT B
1
4
KLY-M2206-00
BLOCK,STOPPER 15
4
5
KLY-M2207-00
PLATE 2,BASE X
1
6
KLY-M22X0-00
LM GUIDE,LX AXIS
2
7
KLY-M22B0-00
BALL SCREW ASSY
1
8
KLY-M2209-00
HOLDER,BEARING
1
9
KLY-M2215-00
PLATE,STOPPER
4
10
KLY-M2216-00
DAMPER
4
11
KLY-M2222-00
DOG
1
12
KLY-M2233-00
BRACKET,JOINT
4
13
KLY-M2609-00
COVER,Y SCREW
1
14
KLY-M2612-00
BRACKET,BS COVER A
1
15
KLY-M9223-00
HOLDER,NUT
1
16
KHY-M266C-00
BLOCK,JOINT
4
17
KHY-M266D-00
JOINT
4
18
KM0-M2220-00
COUPLING, X-AXIS
1
19
KV7-M2641-00
HOLDER,MOTOR Y
1
20
KW6-M711H-00
GREASE NIPPLES
4
21
KLY-M2205-00
BALL SCREW
1
22
KG2-M9173-00
LOCK NUT
1
23
KHY-M264L-00
SPACER,BRG.SET
1
24
KV7-M2604-00
SUPPORT UNIT
1
25
90990-26J022
BEARING
1
26
92A08-04305
SCREW SET
1
27
90K65-514G14
AC SERVO MOTOR
1
28
90990-41J023
COLLAR
8
29
$BF4U
JOINT
4
30
90K81-000003
GREASE NIPPLE
4
31
90K81-200004
CAP C4
22
32
91312-03006
BOLT HEX,SOCKET HEAD
2
33
91312-03012
BOLT HEX,SOCKET HEAD
16
34
91312-04008
BOLT HEX,SOCKET HEAD
4
35
91312-04014
BOLT HEX,SOCKET HEAD
34
36
91312-04018
BOLT HEX,SOCKET HEAD
16
37
91312-05010
BOLT HEX,SOCKET HEAD
2
38
91312-05014
BOLT HEX,SOCKET HEAD
12
39
91312-05016
BOLT HEX,SOCKET HEAD
16
40
91312-06020
BOLT HEX,SOCKET HEAD
8
41
91312-06025
BOLT HEX,SOCKET HEAD
20
42
91312-06030
BOLT HEX,SOCKET HEAD
6
43
91312-06035
BOLT HEX,SOCKET HEAD
4
44
91312-06040
BOLT HEX,SOCKET HEAD
4
45
99480-03008
PIN,PARALLEL
4
46
99480-05010
PIN,PARALLEL
1
24
5
2
35
22
27
24
28
33
23
20
19
1
13
25
14
5
39
35
2
22
24
11
5
24
24
30
12
24
5
16
5
10
34
15
16
29
38
8
3
30
16
12
12
30
21
30
21
26
36
12
16
13
27
34
34
31
37
32
18
10
17
34
21
24
5
2
35
22
27
24
28
33
23
20
19
1
13
25
14
5
39
35
2
22
24
11
5
24
24
30
12
24
5
16
5
10
34
15
16
29
38
8
3
30
16
12
12
30
21
30
21
26
36
12
16
13
27
34
34
31
37
32
18
10
17
34
21
LY Stage
Wafer Moving Axis
KLY-1608
23-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26F0-00
LX SENSOR ASSY.
1
2
KLY-M2606-00
PLATE,CABLE Y
4
3
KLY-M2611-00
PLATE,CABLE Y2
1
4
KLY-M2213-00
PLATE,CABLE
1
5
KLY-M2615-00
SHEET,RUBBER
7
6
KLY-M2224-00
PLATE,CABLE X2
1
7
KLY-M2228-00
BRACKET,CABLE F
1
8
KLY-M2232-00
KNOB
1
9
KLY-M22C0-00
HOSE 1 ASSY.
2
10
KLY-M22D0-00
HOSE 2 ASSY.
2
11
KLY-M2604-00
BRACKET,CABLE E
1
12
KLY-M2204-00
BLOCK,STOPPER
4
13
KLY-M2231-00
GUIDE,HOSE
2
14
KLY-M2234-00
BRACKET,CABLE B
1
15
KLF-M2256-00
GRIP
1
16
KLY-M26C0-00
LY STOPPER ASSY.
4
17
KLY-M2616-00
BRACKET,STOPPER
1
18
KLY-M2216-00
DAMPER
1
19
KLY-M9248-00
BRACKET,SENSOR
1
20
KLY-M653F-00
SEN,LX ORG ASSY
1
21
KLF-M266D-00
JOINT
8
22
90990-11J003
SCREW, PAN HEAD W/W
4
23
91312-03006
BOLT,HEX.SOCKET HEAD
4
24
91312-03008
BOLT,HEX.SOCKET HEAD
28
25
91312-04006
BOLT,HEX.SOCKET HEAD
2
26
91312-08040
BOLT,HEX.SOCKET HEAD
1
27
91312-03016
BOLT,HEX.SOCKET HEAD
8
28
91312-04012
BOLT,HEX.SOCKET HEAD
4
29
91312-04018
BOLT,HEX.SOCKET HEAD
3
30
91312-06025
BOLT,HEX.SOCKET HEAD
8
31
90990-41J023
COLLAR
2
32
91312-05010
BOLT,HEX.SOCKET HEAD
2
33
98502-03008
SCREW PAN HEAD
2
34
91312-06014
BOLT,HEX.SOCKET HEAD
16
35
$NK-3N
NYLON CLIP
4
36
$UB0425-C
URETHANE TUBE
1
37
$UB0425-C
URETHANE TUBE
1
38
91312-05010
BOLT,HEX.SOCKET HEAD
4
39
KLY-M2605-00
BRACKET,CABLE F
1
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
LY Stage Y
Wafer Moving Axis
KLY-1608
23-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26X0-00
GUIDE,LY
2
2
KLY-M22B0-00
BALL SCREW ASSY
1
3
KLY-M2205-00
BALL SCREW
1
4
KHY-M264L-00
SPACER,BRG.SET
1
5
KG2-M9173-00
LOCK NUT
1
6
KV7-M2604-00
SUPPORT UNIT
1
7
KLY-M26D0-00
LY SENSOR ASSY.
1
8
KLY-M2607-00
BRACKET,SENSOR
1
9
KLY-M653G-00
SEN,LY ORG ASSY
1
10
KLY-M2609-00
COVER,Y SCREW
1
11
KLY-M2612-00
BRACKET,BS COVER A
1
12
KLY-M2613-00
HOLDER,NUT LY
1
13
KLY-M2209-00
HOLDER,BEARING
1
14
KM0-M2220-00
COUPLING, X-AXIS
1
15
KV7-M2641-00
HOLDER,MOTOR Y
1
16
KLY-M2221-00
DOG
1
17
90K65-517315
AC SERVO MOTOR
1
18
90K81-200001
CAP C5
22
19
92A08-04305
SCREW SET
1
20
90990-26J022
BEARING (COMB.)
1
21
98502-03008
SCREW PAN HEAD
2
22
91312-03006
BOLT HEX,SOCKET HEAD
4
23
91312-04010
BOLT HEX,SOCKET HEAD
2
24
91312-04016
BOLT HEX,SOCKET HEAD
4
25
91312-05010
BOLT HEX,SOCKET HEAD
4
26
91312-05014
BOLT HEX,SOCKET HEAD
4
27
91312-05016
BOLT HEX,SOCKET HEAD
22
28
91312-06020
BOLT HEX,SOCKET HEAD
4
29
91312-06014
PIN,PARALLEL
3
30
91312-06025
BOLT HEX,SOCKET HEAD
2
31
91312-06030
BOLT HEX,SOCKET HEAD
4
32
99480-05010
PIN,PARALLEL
1