YSB55w.pdf - 第76页
17 34 29 4 1 22 32 23 27 31 3 30 24 20 1 21 32 19 2 18 5 26 33 6 7 28 25 15 12 10 13 8 14 9 16 11 17 34 29 4 1 22 32 23 27 31 3 30 24 20 1 21 32 19 2 18 5 26 33 6 7 28 25 15 12 10 13 8 14 9 16 11 Ejector Head W afer Ejec…
19
34
18
34
17
31
28
8
12
21
28
12
32
11
21
30
32
30
35
4
27
15
9
27
27
36
23
27
10
7
29
7
5
26
14
22
26
3
25
2
16
6
20
24
1
13
33
26
19
34
18
34
17
31
28
8
12
21
28
12
32
11
21
30
32
30
35
4
27
15
9
27
27
36
23
27
10
7
29
7
5
26
14
22
26
3
25
2
16
6
20
24
1
13
33
26
Upper
Wafer Ejecyor
KLG-1608
25-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
$CTAM1
ANCHOR MOUNT
4
2
KJX-M921W-00
HOLDER, BRG
1
3
KLH-M3439-00
SPHERICAL BEARING
1
4
KLY-M9705-00
PLATE 1
1
5
KLY-M9706-00
PLATE 2
1
6
KLY-M9707-00
PLATE 3
1
7
KLY-M9708-00
RIB
2
8
KLY-M9709-00
PLATE,STOPPER
1
9
KLY-M9711-00
BLOCK,STOPPER
1
10
KLY-M9712-00
HOLDER,CYLINDER
1
11
KLY-M9715-00
SHOCK ABSORBER 1
1
12
KLY-M9717-00
STOPPER,BOTTOM
2
13
KLY-M9718-00
LOCK NUT
2
14
KLY-M9719-00
SCREW,ADJUST
2
15
KLY-M9721-00
DOG
1
16
KLY-M9723-00
BRACKET,DUCT 2
1
17
KLY-M9724-00
DUCT,CABLE
1
18
KLY-M972A-00
TAPE 1,DUCT
1
19
KLY-M972B-00
TAPE 2,DUCT
1
20
90990-01J008
BOLT HEX,SOCKET HEAD
1
21
90990-28J171
WASHER,PLAIN
2
22
90990-41J149
COLLAR
1
23
91312-03008
BOLT HEX,SOCKET HEAD
2
24
91312-03020
BOLT HEX,SOCKET HEAD
2
25
91312-04008
BOLT HEX,SOCKET HEAD
4
26
91312-04012
BOLT HEX,SOCKET HEAD
6
27
91312-04020
BOLT HEX,SOCKET HEAD
16
28
91312-04025
BOLT HEX,SOCKET HEAD
4
29
91312-05014
BOLT HEX,SOCKET HEAD
2
30
91312-05016
BOLT HEX,SOCKET HEAD
2
31
91312-05030
BOLT HEX,SOCKET HEAD
4
32
92902-05600
WASHER,PLAIN
2
33
97602-04306
SCREW PAN HEAD W/WASHER
4
34
98702-03005
SCREW,FLAT HEAD
8
35
99480-05010
PIN,PARALLEL
4
36
90990-46J017
BOLT,THIN HEAD
2
17
34
29
4
1
22
32
23
27
31
3
30
24
20
1
21
32
19
2
18
5
26
33
6
7
28
25
15
12
10
13
8
14
9
16
11
17
34
29
4
1
22
32
23
27
31
3
30
24
20
1
21
32
19
2
18
5
26
33
6
7
28
25
15
12
10
13
8
14
9
16
11
Ejector Head
Wafer Ejector
KLG-1608
25-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
$NK-2N
NYLON CLIP
2
2
$SL6-01
JOINT
1
3
KGP-M9759-00
CAP,SPRING
1
4
KJY-M92MA-00
CAM,FOLLOWER
1
5
KJY-M9772-00
PIN
1
6
KJY-M9775-00
O-RING
1
7
KJY-M9776-00
SPACER
1
8
KJY-M97A0-00
EJECTOR,HOUSING
1
Small IC
9
KJY-M97A0-10
EJECTOR,HOUSING
1
Medium / Large IC
10
KJY-M97A0-30
EJECTOR,HOUSING
1
Matrix(odd)
11
KJY-M97A0-40
EJECTOR,HOUSING
1
Matrix(even)
12
KW6-M97B0-00
PIN03 ASSY.
1
Small Chip
13
KW6-M97B0-10
PIN07 ASSY.
1
Medium Chip
14
KW6-M97B0-20
PIN ASSY3
1
Large Chip
15
KJY-M97B0-30
PIN ASSY.4
1
Matrix(odd)
16
KJY-M97B0-40
PIN ASSY.5
1
Matrix(even)
17
KLY-M9734-00
HOLDER,HOUSING
1
18
KLY-M9740-00
HOUSING BASE
1
19
KLY-M9741-00
SPLINE ASSY
1
20
KLY-M9742-00
PLATE,SPLINE
1
21
KLY-M9743-00
PAD
1
22
KLY-M9744-00
HOLDER,CAM
1
23
KW6-M975A-00
SPRING.1
1
24
KLY-M653K-00
SEN, EJEC VAC ASSY
1
25
90152-03J03
SCREW SET
2
26
90990-18J003
PIN,PARALLEL
1
27
90990-19J015
NEEDLE PIN
1
28
91312-04035
BOLT HEX,SOCKET HEAD
4
29
91312-05045
BOLT HEX,SOCKET HEAD
2
30
92012-03006
BOLT BUTTON HEAD
4
31
95302-05600
NUT HEXAGON
1
32
97602-04308
SCREW PAN HEAD W/WASHER
2
33
99009-15500
CIRCLIP
1
34
99480-03008
PIN,PARALLEL
2
25
14
42
47
19
28
38
41
45
22
8
37
41
11
44
43
8
35
32
26
11
24
7
18
32
9
35
30
36
31
31
16
46
15
20
34
1
31
13
6
17
23
21
31
31
4
3
12
13
10
27
33
39
5
2
29
33
25
14
42
47
19
28
38
41
45
22
8
37
41
11
44
43
8
35
32
26
11
24
7
18
32
9
35
30
36
31
31
16
46
15
20
34
1
31
13
6
17
23
21
31
31
4
3
12
13
10
27
33
39
5
2
29
33
Height Ajust
Wafer Ejector
KLG-1608
25-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KJY-M652J-00
SENSOR V.AMP AB ASSY
1
2
KLF-M748B-01
COUPLING
1
3
KLH-M7C2A-00
BEARING
1
4
KLH-M7C2G-00
PLATE,BEARING
1
5
KLH-M7C2N-00
LOCK NUT,SCREW
1
6
KLY-M7102-00
BALL SCREW
1
7
KLY-M7105-00
HOLDER,BEARING
1
8
KLY-M7106-00
DAMPER LP
2
9
KLY-M7107-00
GUIDE
1
10
KLY-M7108-00
SPRING RETURN
1
11
KLY-M710A-00
COLLAR
2
12
KLY-M710B-00
HOLDER,MOTOR
1
13
KLY-M7111-00
PIN,POST
2
14
KLY-M9730-00
PLATE,LU
1
15
KLY-M9731-00
HOLDER,NUT LU
1
16
KLY-M9732-00
ARM LU
1
17
KLY-M9733-00
STOPPER
1
18
KLY-M9735-00
BRACKET,SENSOR
1
19
$ATSH6-01
JOINT
1
20
$KM-11
MUFFLER
1
21
$TL10-01
JOINT
1
22
$TL6-M5M
JOINT
1
23
$ULA10
JOINT
1
24
KLY-M9726-00
VALVE
1
25
KLY-M9736-00
INLINE FILTER
1
26
90933-02J624
BEARING
1
27
90990-02J004
SERWE,SET
2
28
90990-41J107
COLLAR
2
29
90K2G-0M1031
AC SERVO MOTOR
1
30
91312-03008
BOLT HEX,SOCKET HEAD
2
31
91312-03010
BOLT HEX,SOCKET HEAD
14
32
91312-03012
BOLT HEX,SOCKET HEAD
2
33
91312-03014
BOLT HEX,SOCKET HEAD
8
34
91312-03018
BOLT HEX,SOCKET HEAD
4
35
91312-03020
BOLT HEX,SOCKET HEAD
2
36
91312-04010
BOLT HEX,SOCKET HEAD
2
37
91312-04012
BOLT HEX,SOCKET HEAD
2
38
91312-04016
BOLT HEX,SOCKET HEAD
3
39
91312-04018
BOLT HEX,SOCKET HEAD
4
41
92902-03600
WASHER,PLAIN
4
42
92902-04200
WASHER,PLAIN
3
43
92902-04600
WASHER,PLAIN
2
44
99009-04400
CIRCLIP
1
45
99480-03008
PIN,PARALLEL
4
46
99480-04008
PIN,PARALLEL
1
47
99480-04012
PIN,PARALLEL
2