YSB55w.pdf - 第72页
12 31 27 42 6 22 5 38 39 19 34 4 32 33 6 1 25 9 33 2 32 21 30 38 14 34 41 32 7 13 24 32 29 29 32 20 3 11 22 10 29 42 32 27 40 35 16 28 15 37 36 32 26 18 33 39 8 17 23 43 27 12 31 27 42 6 22 5 38 39 19 34 4 32 33 6 1 25 9…
2
3
28
17
18
21
7
10
21
25
21
7
1
39
28
37
28
22
28
16
5
15
23
30
35
33
23
31
19
8
38
21
24
36
34
29
20
32
33
12
14
11
29
27
13
4
26
36
9
29
28
8
6
13
2
3
28
17
18
21
7
10
21
25
21
7
1
39
28
37
28
22
28
16
5
15
23
30
35
33
23
31
19
8
38
21
24
36
34
29
20
32
33
12
14
11
29
27
13
4
26
36
9
29
28
8
6
13
LA Table Assy
Wafer Table
KLY-1608
24-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M9201-00
PLATE 1,BASE
1
2
KLY-M92A0-00
IDLER A ASSY.
4
3
KLY-M92B0-00
IDLER B ASSY.
8
4
KLY-M92C0-00
IDLER C ASSY.
1
5
KLY-M92F0-00
TENSIONER ASSY.
1
6
KLY-M92G0-00
RING BASE 1 ASSY.
1
7
KLY-M9208-00
PLATE,BEARING
4
8
KLY-M921A-00
PLATE 1,SUPPORT
2
9
KLY-M9224-00
BEARING
1
10
KLY-M9227-00
DOG,R
1
11
KLY-M9251-00
STOPPER
2
12
KHY-M9154-00
SPACER
2
13
KLY-M92A1-00
COLLAR,IDLER
12
14
KGK-M9145-00
PULLEY,TENSIONER
4
15
KLY-M92C1-00
PULLY C,IDLER
1
16
KLY-M92C2-00
COLLAR C,IDLER
1
17
KLY-M92F1-00
COLLAR,TENSIONER
1
18
KLY-M92F2-00
WASHER,PLAIN
1
19
KLY-M9232-00
NUT,BLOCK
1
20
90563-14J060
SPACER
2
21
90933-02J626
BEARING
8
22
90990-01J016
BOLT HEX,SOCKET HEAD
8
23
90990-01J049
BOLT HEX,SOCKET HEAD
16
24
90990-11J003
SCREW, PAN HEAD W/W
2
25
90990-28J032
WASHER,PLAIN
8
26
90990-28J083
WASHER,PLAIN
8
27
90933-02J608
BEARING
4
28
90990-25J024
BEARING
24
29
90990-28J118
WASHER,PLAIN
13
30
91312-04005
BOLT HEX,SOCKET HEAD
2
31
91312-04008
BOLT HEX,SOCKET HEAD
8
32
91312-04016
BOLT HEX,SOCKET HEAD
2
33
91312-05020
BOLT HEX,SOCKET HEAD
8
34
91312-06022
BOLT HEX,SOCKET HEAD
8
35
92902-04600
WASHER,PLAIN
2
36
91312-05030
BOLT HEX,SOCKET HEAD
12
37
91312-05040
BOLT HEX,SOCKET HEAD
1
38
97002-05020
BOLT,HEXAGON
1
39
$CTAM1
ANCHOR MOUNT
2
12
31
27
42
6
22
5
38
39
19
34
4
32
33
6
1
25
9
33
2
32
21
30
38
14
34
41
32
7
13
24
32
29
29
32
20
3
11
22
10
29
42
32
27
40
35
16
28
15
37
36
32
26
18
33
39
8
17
23
43
27
12
31
27
42
6
22
5
38
39
19
34
4
32
33
6
1
25
9
33
2
32
21
30
38
14
34
41
32
7
13
24
32
29
29
32
20
3
11
22
10
29
42
32
27
40
35
16
28
15
37
36
32
26
18
33
39
8
17
23
43
27
Wafar Table Assy
Wafer Table
KLY-1608
24-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M9214-00
SHAFT
4
2
KLY-M9216-00
GEAR,RING
2
3
KLY-M9218-00
BELT,DRIVE
1
4
KLY-M9234-00
STAY,SENSOR
1
5
KLY-M9235-00
PLATE,SENSOR
1
6
KLY-M9237-00
STAY A
2
7
KLY-M9244-00
DOG
1
8
KLY-M924A-00
BRACKET,SENSOR
1
9
KLY-M924B-00
COVER,SENSOR
1
10
KLY-M9259-00
STAY,CABLE C
1
11
KLY-M9261-00
DUCT,HNS A
1
12
KLY-M9262-00
COVER,HNS A
1
13
KLY-M9263-00
BLOCK
1
14
KLY-M9264-00
BRACKET,CONNECTOR
1
15
KLY-M926A-00
COVER,GEAR
1
16
KLY-M92E1-00
RING,EXPAND A
1
17
KLY-M2229-00
BRACKET,CABLE C
1
18
KLY-M222A-00
BRACKET,CABLE E
1
19
KLY-M653B-00
SENS,RING ENT ASSY
1
20
KLY-M653C-00
SENS,RING CENT ASSY
1
21
KJY-M3B1C-A0
CLAMP,HNS
6
22
90166-02J204
SCREW, PAN HEAD
6
23
90169-02J206
SCREW, BINDING HEAD
2
24
90563-04J200
SPACER
4
25
90990-01J038
BOLT HEX,SOCKET HEAD
3
26
90990-01J059
BOLT HEX,SOCKET HEAD
4
27
90990-11J003
SCREW, PAN HEAD W/W
10
28
90990-28J078
WASHER,PLAIN
2
29
91312-03006
BOLT HEX,SOCKET HEAD
5
30
91312-03008
BOLT HEX,SOCKET HEAD
2
31
91312-04006
BOLT HEX,SOCKET HEAD
4
32
91312-04008
BOLT HEX,SOCKET HEAD
18
33
91312-04010
BOLT HEX,SOCKET HEAD
9
34
91312-04014
BOLT HEX,SOCKET HEAD
6
35
91312-05016
BOLT HEX,SOCKET HEAD
2
36
91312-06020
BOLT HEX,SOCKET HEAD
2
37
91312-06025
BOLT HEX,SOCKET HEAD
2
38
92902-04200
WASHER,PLAIN
4
39
92902-04600
WASHER,PLAIN
6
40
92902-05200
WASHER,PLAIN
2
41
98502-03005
SCREW PAN HEAD
6
42
$CTAM1
ANCHOR MOUNT
8
43
$NK-3N
NYLON CLIP
2
5
22
3
10
9
6
25
15
7
19
4
16
27
21
12
13
26
25
21
24
17
21
11
22
26
20
20
8
21
2
20
20
27
18
14
23
1
23
5
22
3
10
9
6
25
15
7
19
4
16
27
21
12
13
26
25
21
24
17
21
11
22
26
20
20
8
21
2
20
20
27
18
14
23
1
23
LA / LE Drive
Wafer Table
KLY-1608
24-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92R0-00
LA DRIVE ASSY.
1
2
KLY-M92S0-00
LE DRIVE ASSY.
1
3
KLY-M92T0-00
LA SENSOR ASSY.
1
4
KLY-M92U0-00
LE SENSOR ASSY.
1
5
KLY-M92V0-00
CABLE BRACKET ASSY.
1
6
KLY-M9228-00
PLATE,MOTOR LA
1
7
KLY-M9229-00
GEAR,MOTOR
1
8
KLY-M9221-00
PULLEY,MOTOR
1
9
KLY-M9222-00
PLATE,MOTOR LE
1
10
KLY-M9252-00
BLOCK
1
11
KKX-M925D-00
SCREW,ADJUST
2
12
KLY-M9233-00
BRACKET,SENSOR
1
13
KLY-M653A-00
SEN,LA ORG ASSY
1
14
KLY-M9254-00
PLATE,NUT M3
1
15
KLY-M653E-00
SEN,LE ORG ASSY
1
16
KLY-M2211-00
BRACKET,CABLE A
1
17
KLY-M9245-00
BRACKET,SENSOR
1
18
90KA1-107H72
AC SERVO MOTOR
1
19
90KA1-107K61
AC SERVO MOTOR
1
20
90990-02J008
SCREW, SET
4
21
90990-11J003
SCREW, PAN HEAD W/W
23
22
91312-04008
BOLT HEX,SOCKET HEAD
4
23
91312-05012
BOLT HEX,SOCKET HEAD
8
24
91312-05008
BOLT HEX,SOCKET HEAD
2
25
98502-03008
SCREW PAN HEAD
4
26
$NK-3N
NYLON CLIP
2
27
$CTAM1
ANCHOR MOUNT
21