YSB55w.pdf - 第91页
19 18 4 5 13 16 15 14 11 13 9 13 12 2 1 17 14 16 10 16 17 7 3 9 6 8 19 18 4 5 13 16 15 14 11 13 9 13 12 2 1 17 14 16 10 16 17 7 3 9 6 8 V alve Panel W afer Shuttle ST KL Y -1608 29-5 NO Parts_No. Parts_Name Q_ty Remarks …
19
6
13
3
4
12
11
9
15
12
2
11
7
14
18
16
3
9
13
12
17
4
13
16
8
8
10
5
12
18
10
12
13
12
12
17
11
7
11
14
2
1
15
7
14
6
7
5
14
12
19
6
13
3
4
12
11
9
15
12
2
11
7
14
18
16
3
9
13
12
17
4
13
16
8
8
10
5
12
18
10
12
13
12
12
17
11
7
11
14
2
1
15
7
14
6
7
5
14
12
Frame / Guide
Wafer Shuttle ST
KLY-1608
29-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S10-00
FRAME,SHUTTLE
1
2
KLY-M7S12-00
BRKT.,PULLEY
2
3
KLY-M7S15-00
IDLE PULLEY ASSY.
2
4
KLY-M7S1E-00
BRKT.,ADJUST 1
2
5
KLY-M7S1R-00
GUIDE
2
6
KLY-M7S2H-00
COVER,BELT
2
7
KLY-M7S2J-00
BRKT.,COVER
4
8
KLY-M7S73-00
CLAMPING SCREW
2
9
KLY-M7S11-00
IDLE PULLEY 2GT-40
2
10
KLY-M7S13-00
SHAFT,IDLER
2
11
90933-03J685
BEARING
4
12
91312-03006
BOLT HEX,SOCKET HEAD
50
13
92902-03200
WASHER,PLAIN
8
14
90112-02J003
BOLT HEX,SOCKET HEAD
8
15
91312-03008
BOLT HEX,SOCKET HEAD
6
16
91312-03030
BOLT HEX,SOCKET HEAD
4
17
99480-03008
PIN,PARALLEL
2
18
99480-04014
PIN,PARALLEL
2
19
KLY-M7S02-00
FRAME,SHUTTLE ASSY.
1
19
18
4
5
13
16
15
14
11
13
9
13
12
2
1
17
14
16
10
16
17
7
3
9
6
8
19
18
4
5
13
16
15
14
11
13
9
13
12
2
1
17
14
16
10
16
17
7
3
9
6
8
Valve Panel
Wafer Shuttle ST
KLY-1608
29-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S45-00
BRKT.,VALVE
2
2
KLY-M7S38-00
BRKT.,CABLE FIX
4
3
KLY-M7S47-00
BRKT.,VALVE 2
2
4
KLY-M7SVA-00
SHUTTLE VALVE A
1
5
KLY-M7SVB-00
SHUTTLE VALVE B
1
6
KLY-M654E-A0
SENS,S-A1 FLOW ASSY
1
7
KLY-M654E-B0
SENS,S-A2 FLOW ASSY
1
8
$KM-10
MUFFLER
1
9
KGS-M7742-00
LABEL,NOZZLE
2
10
KLY-M654E-C0
SENS,S-B1 FLOW ASSY
1
11
KLY-M654E-D0
SENS,S-B2 FLOW ASSY
1
12
KGS-M5184-00
SEAL,EARTH 1
2
13
91312-03006
BOLT HEX,SOCKET HEAD
20
14
91312-03008
BOLT HEX,SOCKET HEAD
8
15
97602-04306
SCREW PAN HEAD W/WASHER
4
16
91312-04008
BOLT HEX,SOCKET HEAD
8
17
92902-03200
WASHER,PLAIN
8
18
KLY-M7SA4-00
VALVE PANEL A ASSY
1
19
KLY-M7SB4-00
VALVE PANEL B ASSY
1
15
13
9
5
8
14
6
15
8
6
13
3
14
11
12
7
2
4
1
2
7
10
10
7
1
2
12
2
11
7
15
13
9
5
8
14
6
15
8
6
13
3
14
11
12
7
2
4
1
2
7
10
10
7
1
2
12
2
11
7
Shank
Wafer Shuttle ST
KLY-1608
29-6
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S24-00
SHANK 12U1
32
2
KLY-M7SC2-00
SPRING PLUNGER
64
3
KLY-M7T24-00
SHANK,12U
2
4
KLY-M7T24-10
SHANK,12C
2
5
KLY-M7T24-20
SHANK,METAL
2
6
KLY-M7T26-00
PLATE,SHANK
4
7
95307-03700
NUT HEXAGON
64
8
90990-08J029
SCREW, PAN HEAD
8
9
90990-19J004
NEEDLE PIN
2
10
KLY-M7SC1-00
SHANK 12U1 ASSY
32
Conic rubber tip
11
KLY-M7SC1-10
SHANK 12C ASSY
32
Column rubber tip
12
KLY-M7S24-10
SHANK 12C
32
13
KLY-M7TC1-00
SHANK 12U ASSY.
2
14
KLY-M7TC1-10
SHANK 12C ASSY.
2
15
KLY-M7TC1-20
SHANK METAL ASSY.
2