YSB55w.pdf - 第86页
7 3 6 8 3 4 1 2 9 12 8 10 8 12 11 8 9 5 5 10 12 10 7 3 6 8 3 4 1 2 9 12 8 10 8 12 11 8 9 5 5 10 12 10 V alve Panel Assy W afer T raverser KL Y -1608 28-4 NO Parts_No. Parts_Name Q_ty Remarks Compati Revision_No._date 1 K…
3
25
39
20
14
31
35
4
37
1
5
6
21
13
34
10
28
24
38
23
15
24
8
36
30
2
29
16
27
17
18
23
32
33
6
15
19
26
18
11
25
12
7
14
27
25
26
22
9
3
25
39
20
14
31
35
4
37
1
5
6
21
13
34
10
28
24
38
23
15
24
8
36
30
2
29
16
27
17
18
23
32
33
6
15
19
26
18
11
25
12
7
14
27
25
26
22
9
LTZA / B-sub
Wafer Traverser
KLY-1608
28-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7T14-00
HOLDER,BRG LTZ
2
2
KLY-M7T1G-00
BALL SCREW
2
3
KLH-M7C2A-00
BEARING
4
4
KLH-M7C2G-00
PLATE,BEARING
2
5
KLH-M7C2N-00
LOCK NUT,SCREW
2
6
KLH-M7C2P-00
SPACER
4
7
KLY-M7T10-00
FLAME,LTZ
2
8
KLY-M7T12-00
HOLDER,MOTOR LTZ
2
9
KLY-M7T18-00
STOPPER,LTZ UP
2
10
KLY-M7T1A-00
GUIDE,LTZ
2
11
KLY-M7T1B-00
GUIDE,LTZ
2
12
KLY-M653S-00
SENS,LTZA HIGH ASSY
1
13
KLY-M653S-10
SENS,LTZB HIGH ASSY
1
14
KHY-M711A-00
PIN,POST
4
15
KLC-M951R-00
STOPPER
4
16
KLY-M7T11-00
PLATE,LTZ
2
17
KLY-M7T17-00
DOG,LTZ
2
18
90990-02J004
SCREW, SET
4
19
91312-03012
BOLT HEX,SOCKET HEAD
8
20
99009-06800
CIRCLIP
2
21
90990-19J027
NEEDLE PIN
8
22
90990-33J002
BOLT, STOPPER
2
23
90990-41J180
COLLAR
4
24
91312-03006
BOLT HEX,SOCKET HEAD
20
25
91312-03010
BOLT HEX,SOCKET HEAD
8
26
91312-04010
BOLT HEX,SOCKET HEAD
4
27
92902-04600
WASHER,PLAIN
4
28
99480-03008
PIN,PARALLEL
6
29
90947-15JA00
BALL STEEL
2
30
90990-19J006
NEEDLE PIN
4
31
99480-03008
PIN,PARALLEL
4
32
99480-03012
PIN,PARALLEL
2
33
91312-03008
BOLT HEX,SOCKET HEAD
4
34
KLY-M7TA4-00
FLAME,LTZA ASSY.
1
35
KLY-M7TA5-00
PLATE,LTZA ASSY.
1
36
KLY-M7T1K-00
BALL SCREW ASSY.
1
37
KLY-M7TB4-00
FLAME,LTZB ASSY
1
38
KLY-M7TB5-00
PLATE,LTZB ASSY.
1
parts same as 35
39
KLY-M7T1K-00
BALL SCREW ASSY.
1
7
3
6
8
3
4
1
2
9
12
8
10
8
12
11
8
9
5
5
10
12
10
7
3
6
8
3
4
1
2
9
12
8
10
8
12
11
8
9
5
5
10
12
10
Valve Panel Assy
Wafer Traverser
KLY-1608
28-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7TA3-00
VALVE PANEL ASSY.
1
2
KLY-M7T31-00
BRKT.,VALVE
2
3
KLY-M7T32-00
COVER,VALVE
2
4
KLY-M7TVA-00
VALVE,ASSY.
1
5
KGS-M5184-10
SEAL,EARTH 1
4
6
KLY-M7TB3-00
VALVE PANEL ASSY.
1
7
KLY-M7TVB-00
VALVE,ASSY.
1
8
91312-03006
BOLT,HEX.SOCKET HEAD
8
9
91312-03012
BOLT,HEX.SOCKET HEAD
4
10
97602-04306
SCREW,PAN HEAD W/W
6
11
91312-04010
BOLT,HEX.SOCKET HEAD
4
12
$CTAM1
ANCHOR MOUNT
6
4
1
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
7
25
5
29
23
9
24
4
1
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
7
25
5
29
23
9
24
Front Block
Wafer Shuttle ST
KLY-1608
29-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7SA1-00
SHUTTLE ST. A1 ASSY.
1
2
KLY-M7SB1-00
SHUTTLE ST. B1 ASSY.
1
3
KLY-M7SCL-00
SHUTTLE BLOCK ASSY.
1
4
KLY-M7SCR-00
SHUTTLE BLOCK ASSY.
1
parts same as 3
5
KLY-M7S70-00
BRKT.,TRANS.
2
6
KLY-M7S27-00
BRKT.,BELT 1
2
7
KLY-M7S29-00
BRKT.,BELT FIX
2
8
KLY-M7S38-00
BRKT.,CABLE FIX
2
9
KLY-M7S39-00
BRKT.,CABLE FIX
3
10
KLY-M7S51-00
COVER,SHUTTLE 1
2
11
KLY-M7S20-00
BLOCK,SHUTTLE
2
12
KLY-M7S21-00
ROD,NOZZLE
16
13
KLY-M7S23-00
SPRING
16
14
KLY-M7S25-00
ARM,DRIVE
2
15
KLY-M7S26-00
PLATE,SHUTTLE
2
16
KLY-M7S2C-00
POST,MARK
2
17
KLY-M7S2D-00
MECH STOPPER
2
18
KLF-M96HM-00
PIN,MARK
2
19
$TSH4-M3M
JOINT
16
20
90990-18J002
PIN,PARALLEL
4
21
90990-19J006
NEEDLE PIN
16
22
90112-2AJ005
BOLT, HEX.SOCKET HEAD
10
23
91312-03004
BOLT HEX,SOCKET HEAD
16
24
91312-03006
BOLT HEX,SOCKET HEAD
16
25
91312-03012
BOLT HEX,SOCKET HEAD
28
26
91312-03025
BOLT HEX,SOCKET HEAD
2
27
91312-04006
BOLT HEX,SOCKET HEAD
4
28
92A08-03003
SCREW,SET
2
29
KLY-M7SA2-00
SHUTTLE ST. A2 ASSY.
1
cf. next page
30
KLY-M7SB2-00
SHUTTLE ST. B2 ASSY.
1
cf. next page