YSB55w.pdf - 第69页

13 13 4 15 14 16 1 3 10 12 2 5 20 7 14 17 19 3 12 10 11 18 9 8 6 20 11 13 13 4 15 14 16 1 3 10 12 2 5 20 7 14 17 19 3 12 10 11 18 9 8 6 20 11 Expand Assy W afer T able KL Y -1608 24-1 NO Parts_No. Parts_Name Q_ty Remarks…

100%1 / 92
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
LY Stage Y
Wafer Moving Axis
KLY-1608
23-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26X0-00
GUIDE,LY
2
2
KLY-M22B0-00
BALL SCREW ASSY
1
3
KLY-M2205-00
BALL SCREW
1
4
KHY-M264L-00
SPACER,BRG.SET
1
5
KG2-M9173-00
LOCK NUT
1
6
KV7-M2604-00
SUPPORT UNIT
1
7
KLY-M26D0-00
LY SENSOR ASSY.
1
8
KLY-M2607-00
BRACKET,SENSOR
1
9
KLY-M653G-00
SEN,LY ORG ASSY
1
10
KLY-M2609-00
COVER,Y SCREW
1
11
KLY-M2612-00
BRACKET,BS COVER A
1
12
KLY-M2613-00
HOLDER,NUT LY
1
13
KLY-M2209-00
HOLDER,BEARING
1
14
KM0-M2220-00
COUPLING, X-AXIS
1
15
KV7-M2641-00
HOLDER,MOTOR Y
1
16
KLY-M2221-00
DOG
1
17
90K65-517315
AC SERVO MOTOR
1
18
90K81-200001
CAP C5
22
19
92A08-04305
SCREW SET
1
20
90990-26J022
BEARING (COMB.)
1
21
98502-03008
SCREW PAN HEAD
2
22
91312-03006
BOLT HEX,SOCKET HEAD
4
23
91312-04010
BOLT HEX,SOCKET HEAD
2
24
91312-04016
BOLT HEX,SOCKET HEAD
4
25
91312-05010
BOLT HEX,SOCKET HEAD
4
26
91312-05014
BOLT HEX,SOCKET HEAD
4
27
91312-05016
BOLT HEX,SOCKET HEAD
22
28
91312-06020
BOLT HEX,SOCKET HEAD
4
29
91312-06014
PIN,PARALLEL
3
30
91312-06025
BOLT HEX,SOCKET HEAD
2
31
91312-06030
BOLT HEX,SOCKET HEAD
4
32
99480-05010
PIN,PARALLEL
1
13
13
15
14
16
10
12
5
20
14
17
19
3
12
10
11
18
9
8
20
11
13
13
15
14
16
10
12
5
20
14
17
19
3
12
10
11
18
9
8
20
11
Expand Assy
Wafer Table
KLY-1608
24-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92N0-00
EXPAND ASSY.
1
2
KLY-M92P0-00
EXPAND PLATE ASSY.
1
3
KLY-M9240-00
GUIDE A ASSY.
2
4
KLY-M9204-00
BASE 2,RING
1
5
KLY-M9219-00
GUIDE A
2
6
KLY-M9239-00
BRACKET,SENSOR
1
7
KLY-M9246-00
STAY,CABLE A
1
8
KLY-M9253-00
PLATE,NUT M2
1
9
KLY-M653D-00
SENS,RING SET ASSY
1
10
91312-05010
BOLT HEX,SOCKET HEAD
6
11
91312-05016
BOLT HEX,SOCKET HEAD
8
12
99480-04012
PIN,PARALLEL
2
13
99480-05018
PIN,PARALLEL
4
14
90933-02J623
BEARING
16
15
90990-28J133
WASHER,PLAIN
8
16
99480-03010
PIN,PARALLEL
8
17
90171-02J026
WASHER,PLAIN
2
18
90563-03J150
SPACER
2
19
90990-10J009
SCREW,BINDING HEAD
2
20
91312-03006
BOLT HEX,SOCKET HEAD
4
13
9
9
13
18
15
27
6
1
11
26
1
1
9
14
28
13
28
4
13
15
27
16
17
15
27
16
29
22
16
10
24
31
17
26
15
14
27
28
28
18
16
23
29
22
25
6
21
24
31
20
12
3
28
19
32
30
28
26
28
28
26
13
9
9
13
18
15
27
6
1
11
26
1
1
9
14
28
13
28
4
13
15
27
16
17
15
27
16
29
22
16
10
24
31
17
26
15
14
27
28
28
18
16
23
29
22
25
6
21
24
31
20
12
3
28
19
32
30
28
26
28
28
26
LE Table Assy
Wafer Table
KLY-1608
24-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92M0-00
LE BALL SCREW ASSY.
4
2
KLY-M9206-00
BALL SCREW
4
3
KLY-M9202-00
PLATE 2, BASE
1
4
KLY-M9207-00
PULLEY,BALL SCREW
4
5
KLY-M9209-00
HOLDER,BEARING
4
6
KLY-M9213-00
SHAFT
4
7
KLY-M9217-00
BELT,MAIN
1
8
KLY-M9231-00
SCREW,ADJUST
1
9
KLY-M9249-00
MECHA LOCK
4
10
KLY-M9220-00
GUIDE BL ASSY.
1
11
KLY-M9230-00
GUIDE BR ASSY.
1
12
KLY-M92D0-00
CAM FOLLOWER ASSY.
4
13
KHT-M7314-00
LOCK NUT
4
14
KJX-M9152-00
STOPPER,REAR
4
15
KJY-M92B1-20
BALL BUSH
4
16
KJY-M92B2-00
STOPPER,GUIDE
4
17
KLY-M922E-00
GUIDE B
2
18
KLY-M922H-00
RING,SHIM
6
19
KLY-M92D1-00
BLOCK,CAM FOLLOWER
4
20
KJY-M92E3-00
WASHER,CAM FOLLOWER
4
21
KJY-M92MA-00
CAM,FOLLOWER
4
22
90933-02J623
BEARING
6
23
90933-02J626
BEARING
4
24
90990-01J043
BOLT HEX,SOCKET HEAD
6
25
99009-06400
CIRCLIP
4
26
91312-03010
BOLT HEX,SOCKET HEAD
8
27
91312-04008
BOLT HEX,SOCKET HEAD
16
28
91312-04010
BOLT HEX,SOCKET HEAD
16
29
91312-04016
BOLT HEX,SOCKET HEAD
4
30
91312-05012
BOLT HEX,SOCKET HEAD
8
31
99480-05018
PIN,PARALLEL
4
32
95302-05600
NUT HEXAGON
4