00198565- 01_Operation_Manual_DEK_Micron_EN.pdf - 第7页

Safety - GENERAL 7 www.dek.com 1 Safety 1.1 GENERAL CAUTION Any persons working on the machine must be familiar with the safety instructions in the user manual and observe this at all times. The following safety instruct…

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Table of Contents
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Safety - GENERAL
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1 Safety
1.1 GENERAL
CAUTION
Any persons working on the machine must be familiar with the safety instructions in the user manual and observe
this at all times. The following safety instructions are only an excerpt from the chapter "Operational Safety" in the
machine user manual. For further detailed safety information please refer to the User Manual that was supplied
with your machine. Please pay attention to the safety instructions as delivered by our instructor.
1.2 HAZARDOUS MATERIALS
Hazardous materials, as defined by NFPA 497 (National Fire Protection Association), are not recommended by ASM for
use on this machine. If one or more hazardous materials are used, decontamination must be carried out in accordance
with SEMI S12 or equivalent local regulations.
Safety - HAZARDOUS AREAS
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1.3 HAZARDOUS AREAS
1.4 WARNINGS PROHIBITIONS AND CAUTIONS
The warning, prohibition and caution notices below are fitted to the machine and shown in the relevant procedures within
this manual.