m220_383_02_process_manual工艺手册.pdf.pdf - 第60页

PROCESS DESCRIPTION P ROCESS M ANU AL 4.3-7 74 Alarm limit setting for Gas O2 [2] at 10 % ( ± 50 SCCM) Variable C ommand: No 75 Branch on gas/pressure O2 [2] to step O2 PURGE. Sonalert alarm Yes 76 13 DEPOSITION 77 Messa…

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PROCESS DESCRIPTION
P
ROCESS MANUAL
4.3-6
37 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
38 Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
OFF,VACFAIL[4] = ON,,,TEMP SCR[7] = OFF,EXCESS[8] = OFF
39 Branch on wait alarm to step BACKFILL 1. Sonalert alarm Yes
40 06 EVAC 3
41 Message EVACUATE 3 [10]. Sonalert alarm No
42 Time: 000:05:00 (hr:min:sec) Variable Command: No
43 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
44 Abort recipe 01
45 07 PURGE
46 Message PURGE [12]. Sonalert alarm No
47 Time: 000:05:00 (hr:min:sec) Variable Command: No
48 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
49 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
50 08 EVACUATE
51 Message EVACUATE 3 [10]. Sonalert alarm No
52 Time: 000:05:00 (hr:min:sec) Variable Command: No
53 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = ON
Variable Command: No
54 09 LEAKCHECK
55 Message LEAKCHECK [11]. Sonalert alarm No
56 Time: 000:02:00 (hr:min:sec) Variable Command: No
57 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF
Variable Command: No
58 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No
59 Branch on gas/pressure PRESSURE [8] to step PURGE. Sonalert alarm Yes
60 10 EVACUATE
61 Message EVACUATE 3 [10]. Sonalert alarm No
62 Time: 000:00:30 (hr:min:sec) Variable Command: No
63 Normal recipe 01 Zone1 425.0 °C Slope 0.00 °C/min Zone2 425.0 °C Slope 0.00
°C/min Zone3 425.0 °C Slope 0.00 °C/min , profile table A
64 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = ON
Variable Command: No
65 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
66 11 SET O2
67 Message PURGE [12]. Sonalert alarm No
68 Time: 000:01:00 (hr:min:sec) Variable Command: No
69 Gas [O2 [2]] at [150] [SCCM] Variable Command: Yes
70 12 SET PRESSURE
71 Message PURGE [12]. Sonalert alarm No
72 Time: 000:02:00 (hr:min:sec) Variable Command: No
73 Gas [PRESSURE [8]] at [250] [MTOR] Variable Command: Yes
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.3-7
74 Alarm limit setting for Gas O2 [2] at 10 % ( ± 50 SCCM) Variable Command: No
75 Branch on gas/pressure O2 [2] to step O2 PURGE. Sonalert alarm Yes
76 13 DEPOSITION
77 Message DEPOSITION [13]. Sonalert alarm No
78 Time: [000:30:00] (hr:min:sec) Variable Command: Yes
79 Gas [SIH4 [3]] at [50.0] [SCCM] Variable Command: Yes
80 Alarm limit setting for Gas SIH4 [3] at 10 % ( ± 10.0 SCCM) Variable Command:
No
81 Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 100 MTOR) Variable
Command: No
82 Branch on gas/pressure O2 [2] to step O2 PURGE. Sonalert alarm Yes
83 Branch on gas/pressure SIH4 [3] to step O2 PURGE. Sonalert alarm Yes
84 Branch on gas/pressure PRESSURE [8] to step O2 PURGE. Sonalert alarm Yes
85 14 O2 PURGE
86 Message PURGE [12]. Sonalert alarm No
87 Time: 000:02:00 (hr:min:sec) Variable Command: No
88 Gas N2 [1] at 0.00 [SLM] Variable Command: No
89 Gas SIH4 [3] at 0.0 [SCCM] Variable Command: No
90 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
91 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
92 Alarm limit setting for Gas SIH4 [3] at 0 % ( ± 0.0 SCCM) Variable Command: No
93 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
94 15 EVACUATE
95 Message EVACUATE 3 [10]. Sonalert alarm No
96 Time: 000:05:00 (hr:min:sec) Variable Command: No
97 Gas O2 [2] at 0 [SCCM] Variable Command: No
98 Alarm limit setting for Gas O2 [2] at 0 % ( ± 0 SCCM) Variable Command: No
99 16 PURGE
100 Message PURGE [12]. Sonalert alarm No
101 Time: 000:05:00 (hr:min:sec) Variable Command: No
102 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
103 17 EVACUATE
104 Message EVACUATE 3 [10]. Sonalert alarm No
105 Time: 000:05:00 (hr:min:sec) Variable Command: No
106 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
107 18 READY
108 Message STANDBY [1]. Sonalert alarm No
109 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = ON
Variable Command: No
110 Wait for operator
111 19 BACKFILL 1
112 Message BACKFILL [14]. Sonalert alarm No
113 Time: 000:01:00 (hr:min:sec) Variable Command: No
114 Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
115 Gas N2 [1] at 0.00 [SLM] Variable Command: No
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.3-8
116 Gas O2 [2] at 0 [SCCM] Variable Command: No
117 Gas SIH4 [3] at 0.0 [SCCM] Variable Command: No
118 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
119 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = OFF
Variable Command: No
120 Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
ON,VACFAIL[4] = OFF,,,TEMP SCR[7] = ON,EXCESS[8] = ON
121 Abort recipe 08
122 20 BACKFILL 2
123 Message BACKFILL [14]. Sonalert alarm No
124 Time: 000:10:00 (hr:min:sec) Variable Command: No
125 Gas N2 [1] at 10.00 [SLM] Variable Command: No
126 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF
Variable Command: No
127 END
4.3.8
Troubleshooting an LTO process
Problem: Cause: Solution:
Wafers are thick at the door side
and thin at the pump side.
• Temperature ramp is not
correct.
• Injector design is not optimal
• Insufficient N
2
carrier gas
• Increase temperature ramp
(door side temperature lower
then pump side temperature).
• Use different injector design
• Increase N
2
carrier gas
Wafers are thick at the pump side
and thin at the door side.
• Temperature ramp is not
correct.
• Injector design is not optimal
• Too much N
2
carrier gas
• Reduce temperature ramp
(door side temperature higher
then pump side temperature).
• Use different injector design
• Reduce N
2
carrier gas
Wafers are thick at the top and
thin at the bottom.
• Wafers are not aligned
parallel.
• Place wafers parallel and flat
side at the top
Wafers are thick at the edges and
thin at the center.
• Wafers are placed too close
together
• Cage design is not optimal
• Place wafers further apart
• Use different cage design
No consistency in uniformity.
• Dirty quartz ware or wafers.
• No constant pressure control.
• Draft along the furnace.
• Clean tube, quartz ware and
paddle.
• Use clean wafers.
• Check pressure control.
• Close possible draft holes.
Layer is too thin cross load.
• Deposition time is too short. • Increase deposition time in
recipe.
Layer is too thick cross load
• Deposition time is too long. • Decrease deposition time in
recipe.