m220_383_02_process_manual工艺手册.pdf.pdf - 第71页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.6 Abort a running process recipe A manual ‘Abort‘ instruction may be required if the oper ator foresees a danger ous situation or a continuous looped process recipe needs to be …

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.5.2

TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

select ‘Operations’ to access

the operations screen.

3) Press ‘Pause’ to stop the selected

process recipe from the current

step.

5.5-2

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.6 Abort a running process recipe

A manual ‘Abort‘ instruction may be required if the operator foresees a dangerous situation

or a continuous looped process recipe needs to be reset to Step 0 to allow selection of

another process recipe.

5.6.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the following

screen appears:

2) press ‘4’ to access ‘Tube Control’

3) press ‘3’ to access ‘Abort Process

Recipe’

4) press ‘Yes’ to confirm the

question ‘Are you sure you want

to abort?’

5) press ‘Yes’ again to activate the

abort command

5.6-1

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.6.2

TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

2) select ‘Operations’ to access the

operations screen.

3) Press ‘Abort’ to abort the

selected process recipe.

4) Press ‘Yes’ to confirm the

question ‘Sure to abort?’

5.6-2