m220_383_02_process_manual工艺手册.pdf.pdf - 第69页
OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.5 Stop a running process recipe Stopping a running process recipe may be required to tem porarily stop the proc ess recipe. When activated, the ‘Stop‘ command will stop the time…
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
5.4.2
TSC-2
1) select the desired tube from the
pull-down menu or from the
‘Overview’ screen.
2)
select ‘Operations’ to access
the operations screen.
3) press ‘Start’ to start the selected
process recipe from ‘Step 0’
4) press ‘Continue’ to start a
process recipe that has been
stopped or is waiting for an
‘Operator‘ instruction.
5) press ‘Yes’ to confirm the
question ‘Do you want to start?’
5.4-2
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
5.5 Stop a running process recipe
Stopping a running process recipe may be required to temporarily stop the process recipe.
When activated, the ‘Stop‘ command will stop the timer while all given commands are maintained.
5.5.1
Touchscreen
1) return to the Main Menu by
pressing ‘ESC’ until the following
screen appears:
2) press ‘4’ to access ‘Tube Control’
3) press ‘2’ to access ‘Start/Stop
Process Recipe’
5.5-1
4) press ‘Stop’ to stop the selected
process recipe
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
5.5.2
TSC-2
1) select the desired tube from the
pull-down menu or from the
‘Overview’ screen.
2)
select ‘Operations’ to access
the operations screen.
3) Press ‘Pause’ to stop the selected
process recipe from the current
step.
5.5-2