00196845-02_AI_Vakuumpumpe_SXDX4_X-Serie-S_de_en.pdf - 第123页

Appendix Vacuum Pump Circuit Diagram Connection Unit Vacuum Pump Vakuumpumpe 123 5.4 5 . 4 V a c u u m P u m p C ir c u it D ia g r a m C o n n e c t io n U n it Vacuum Pump Circuit Diagram Connection Unit