prober-english.pdf.pdf - 第14页

Magnetic Stimulation Probe System ■ SPECIA LTY PROBE SYSTEM Semi ‐ automatic  Vertical  magn etic  field  prober (  ± 1500  Oe , ‐ 60 ゜ C  to  +200 ゜ C  ) We  offer  design  and  manufacturing  of  probe …

6inch

8inch

Model HSP-V150 / HSP-V200

On‐waferCharacteristicsEvaluationofMEMSDevicesatHigh / LowTemperatures

inanUltraHighVacuumEnvironment

■ VACUUM PROBE SYSTEM

・

Model HSP-V150 is for 6" wafers.

・

Model HSP-V200 is for 8" wafers.

Thisprobersupportson‐wafermeasurementsathigh/lowtemperatures(‐60°Cto+300°C)onMEMSdevicesthatmust

operateinavacuumenvironmentsuchasRFMEMSdevicesorcrystaloscillatorMEMSdevices.

Thecostofpackagingwhichisaveryexpensiveprocesscanbereducedby

implementingthissystem.

MEMSdevicecharacteristicssuchastheequivalenceconstant,transmissioncharacteristicssimulation,orSparameter

canbeautomaticallyacquiredonthewaferbycombiningtheproberwiththeimpedanceanalyzer,RFnetworkanalyzeror

othertester.

WaferSize

X‐Ytravel

X‐Yrepeatability

X‐Yaccuracy

Ztravel

Unitdimension（W×D×H）*

Weight*

Zrepeatability*

HSP‐V150 HSP‐V200

～φ150mm ～φ200 mm

X：160mm，Y：160mm X：310mm，Y：310mm

2500×1800×1900mm

2700×2000×1900mm

1300kg 1600kg

＜±2μm

＜±5μm

20mm

＜±1μm

θ travel

θ repeatability

±7.5°

0.002°

*Itemswithasteriskvarydependingonsystemconfiguration.

Ultimatevacuum 1x10E‐3Pa（1ｘ 10E‐5Paoptional）

Atthestageofresearchanddevelopment

oforganicsemiconductordevicesuchas

OFET，OTFT，OEL，andOLED,itis

necessarytoperformevaluationunder

high‐purityinertgastoavoidcharacteristic

degradationcausedbymoistureoroxygen

intheatmosphere.

Oncethissystemisimplemented,organic

semiconductordevicescanbe

measuredat

ahighorlowtemperature(‐60°Cto+300°C)

inthehighly‐pureinertgas(N2orAr)

environmentachievedbyvacuumingand

gasdisplacement.

Thissystemsupportsultralowsignal

measurementsandmeetsdemandforhigh‐

accuracyI‐V/C‐Vmeasurementsinvarious

organic

semiconductordevices.

MEMS

Organicsemiconductor

Vacuumprobesystem

Magnetic Stimulation Probe System

■ SPECIALTY PROBE SYSTEM

Semi‐automaticVerticalmagneticfieldprober

(± 1500Oe ,‐60゜Cto+200゜C)

Weofferdesignandmanufacturingofprobesystemstoapplymagneticfieldsforevaluatingalltypesof spintronics devices

(MRsensor,MRAM,Fram,FeRam)andHalldevices.

‐ Highlyadvancednonmagneticstructure

‐ Excellentmagneticfieldhysteresischaracteristics

‐ Supportssuperlowresidualfieldelectromagnets.

‐ Supportsin‐planemagneticfieldsandverticalmagneticfields.

‐ Provision

ofmagnetic fieldapplicationandmeasurementapplicationsoftware

‐ Provisionoftraceablemagneticfieldcalibrationtoolandcorrecti onsoftware

‐ Temperaturecharacteristicevaluationinrangefrom‐65°Cto+200°C

‐ Lowresistancemeasurements,RFmeasurements(upto67GHz)

‐ SupportsmanualproberandSemi‐automaticprober

Elemental technologies

PatenttechnologyofToeiScientificIndustrialCo.,Ltd.isusedforourprobesystemmountedwithverticalmagneticfieldelectromagnets

(JapanPatentApplicationLaid‐OpenDisclosureNumber2010‐212453)

ManualIn‐plane magneticfieldprober

(‐3000Oe to+3000Oe)

Specialty Probesystem

Probe systems for Optoelectronics

Weofferdesignandmanufacturingofsystemsthatmeasureopticalandelectricalcharacteristicsofthevariousoptoelectronics

(light‐emittingandlight‐receiving ) devicesonwafers.

Semi‐AutomaticProbeSystemwithBuilt‐in

MicroscopicPhotometricTube ForVCSEL,PD

/APDevaluation(fordiameterof2inches)

ManualOpticalFiberDirectConnectionTypeProber

ForVCSELevaluation(fordiameterof3inches)

Applications

‐ OpticalandelectricalcharacteristicsevaluationofVCSEL,LED orotherlight‐emittingdevices onwaferlevel

‐ Opticalandelectricalcharacteristicsevaluationofphotodiode, avalanchephotodiodeorotherlight‐receiving

devicesonwaferlevel

■ SPECIALTY PROBE SYSTEM

‐ I‐L‐V

‐ C ‐V

‐ PulsedI‐V

‐ Wavelength

‐ NFP

‐ FFP

‐ Modulationfrequency

‐ RIN

‐ Darkcurren t

‐ I‐V

‐ C ‐V

‐ Conversionefficiency

‐Wavelength‐conversionefficiency

‐ Cut‐offfrequency

‐ Modulationfrequency

‐ Transientresponse

VCSEL・LD・LEDcharacteristic

PD・APDcharacteristic

Manual 4 point resistivity prober

ThismanualmeasuringsystemistomeasureSiwafers,solarcell,sheetresistancesuchasLCD,andresistivitybyusing

four‐point probemethod.Weprovidemanualfour‐pointproberandKeithley’ssourcemetermodel2401asastandard

measuringsystem. ByusingaccessorymeasuringsoftwareforKeithley2401,automaticcalculationofsheet

resistance

andresistivitybecomepossible.

4‐pointprobe

Specialty Probesystem

Variouslightsource SingleMonochromator

Integratingsphere

PMT