prober-english.pdf.pdf - 第17页

■ APPLICATIO NS Wafer ‐ Level  Reliability  Test Noise  Characterization Organic  Semiconductor  Device  Evaluation At  the  stage  of  resea rch  and  development of  organic  semiconductor  device  such…

■ APPLICATIONS

UltraLowSignalI‐V/C‐VMeasurement

High‐frequency/RFmeasurement

Thefollowingplotisaresultofmeasuringthecurrentvaluewhileimpressingthesweepvoltagetotheprobeandthechuckthat are

intheopenstate.Theresultshowsthenoiseandleakcurrentoftheprobeislessthan±10fA.With300mm‐thermalchuck,it

showsthe

noiseandleakcurrentislessthan±20fAinallthetemperatureranges ：‐60゜Cto+300゜C.Itprovesthatourprobe

systemcorrespondstoultralowsignalmeasurementapplicationthatrequiresmeasurementprecisionof1pAorless.

Theplotontherightismeasureddataofreversevoltageand

capacitancemeasurementofdiodedevice.

BycorrectingOPEN/SHORT/LOAD, itenablestodostable

C‐Vmeasurementof“fF” level.

C300‐60ULHigh/Lowtemperaturechuck

(‐60゜C～+300゜C)

Voltagesweeprange：‐10V～ +10V

ModelA74CJ1tip‐KelvinCoaxialProbe

Voltagesweeprange： ‐200V～ +200V

Note)Theabovemeasurementvalueisactualmeasurementvalueinourmeasurementenvironmentandnotguaranteedvalue

＜±3fA

OurprobestationcancovermeasuringfrequencybandofDCto67GHz duetoitshighrigidityandstablemechanism.

SystemintegrationwithVector networkanalyzer(VNA),RF probe,RF cable,calibrationsubstrateetc.,willsupporthighfrequency /

RFmeasurementwhichishighresolutionandexcelsinrepeatability.

Itsupportsfrom2‐porttomulti‐port

measurement,temperaturerangefrom10kto+250゜C,andcharacterizationunderultra‐high

vacuum(10e‐6Pa)environment.

UltralowcurrentI‐Vmeasurement

UltralowcapacitanceC‐Vmeasurement

Applications

‐65゜C～+200゜C：＜±10fA

+300゜C：＜±20fA

■ APPLICATIONS

Wafer‐LevelReliabilityTest

NoiseCharacterization

OrganicSemiconductorDeviceEvaluation

Atthestageofresearchanddevelopment oforganicsemiconductordevicesuchasOFET，OTFT，OEL，andOLED,itisnecessary

toperformevaluationunderhigh‐purityinertgastoavoidcharacteristicdegradationcausedbymoistureoroxygeninthe

atmosphere.Weoffersmall‐footprintmanualproberandsemi‐autoproberthat

arespeciallydesignedfortheusageinsideofa

glovebox.Theyaresuitableforoperationbyglovedhand.

Manualproberforglovebox

Semi‐automatic proberforglovebox

+300゜CHightemperaturemulti‐siteprobecard

Anoxygenmeterinsideofachamberandamass flow

controller (MFC)enable probingwithalowresidual

oxygenconcentrationoflessthan100ppm

Weofferprobesystemsthatsupportwafer‐levelreliabilitytestsuchasEM,TDDB,HCI,NBTI,BT,etc.,.

Ourprobesystemsupport

varioustasksrequiredinwafer‐levelreliabilitytestsuchashightemperatureupto+300゜C,long‐term

testingoverweeks,stablecontactunderhightemperatureenvironment,mountingmulti‐siteprobecard,anti‐oxidation

environmentbynitrogengaspurge,etc.,.

Ourprobesystemwithshieldchamber (HMP‐810SC/1210SC，HSP‐200SC/300SC)hasoptionsettingofultralowfloornoise(‐UL).

Bychoosingthis“–UL” option,itcansupporton‐wafernoisecharacterizationsuchas1/fnoise,randomtelegraph noise,(RTN),and

RFnoiseinthewidetemperaturerangefrom‐65゜Cto+200゜C.

Applications

■ APPLICATIONS

High‐PowerDeviceMeasurement

Safety

HighVoltageMeasurement(～ 10kV)，High CurrentMeasurement ( ～ 200Apulse )

Inhigh‐powerdeviceevaluationwheredangeroushighvoltageandhigh currentarerequired,safetymeasuresagainsthumanhaveto

betakeninanticipationofvariouscases.Ourprobesystemfor high‐powerdevicemeasurementisequippedwithinterlocksystemthat

isstandard.Eachinterlocksystemwillpreventfromelectricshock,aburn,

andoxygenshortage

Interlockthatinterruptsappliedhighvoltagewithsafetylight curtain.

Interlockthatpreventsoxygenshortagewith

openairoxygenmonitor.

(Appliedtoasystemwithgaspurgefunction. )

HighVoltageProbing

High CurrentProbing

Weofferprobeaccessoriesthatsupportmaximum10kV200Apulseaswellaschucksthatsupportmaximum 5kV40Apulse.

Itsupportsdevicecharacterizationinthetemperaturerangefrom‐60゜Cto+300゜Cinordertosupportoperationtestinwidetemperature

rangefordevicessuchasin‐vehicledevices.

ChucksforPowerDevices

Highvoltageprobeunit

(±3kV，‐60゜Cto+300゜C)

Insulationliquidimmersiontray

topreventelectricdischarge

High currentprobeunit

(Maximum200Apulse，‐60゜Cto+300゜C)

+300゜CHighTemperatureTest, AntioxidantEnvironment

WhenevaluatingGaN orSiC highpowerdevice,hightemperaturetestat+300゜Cisrequired.Ourproductwithshieldchambermakesit

possibletodonon‐oxidation probingwithalowresidualoxygenconcentrationoflessthan100ppmbypurgingnitrogengasintothe

chamber.

Weofferchuckunitsspeciallydesignedforhighpower

devices.

・ Roomtemperaturechuckandhightemperaturechuck

(RT ~+200゜C/+300゜C),

high/lowtemperaturechuck (‐40゜C/‐60゜C~+200゜C/+300゜C)

・ 5kV 40Apulse

・ Thinwaferhandling

Feed‐throughConnectorsandMeasurementCables

Weoffermeasurementcablesandfeed‐throughconnectorsthatconnectvarioushighpowerdevicetesterswithourprobesystem.

・ Kelvin connection

・ TAIKO processwafer

Keysighttechnologies

B1505A HV‐TRIAX

TFF/KeithleyInstruments

2600‐PCT/4200‐PCT

HV‐TRIAX

SHV connector & cable

(~10kV)

IWATSU

CS‐3000/5000

Itsupportsclosedloopcontrolbyusingoxygenmeterinsideof

achamberandmass flowcontroller(MFC ).

Applications