prober-english.pdf.pdf - 第25页

25 Accessories Accessories ■ ACCESSORI ES Probe & probe arm DC  Probe Kelvin  probe Specialty  probe HP40 Standard  probe HP40S Suspension  probe HCP40 High ‐ performance  probe  HCP40LP Low  profile High ‐ p…

Accessories

Positioners (Manipulators)

■ ACCESSORIES

HP130-SC Positionerforshieldchamber

Positionerspeciallydesignedforsystemswithshieldchamber.

Model

HP130‐SC/R(righthandmodel)

HP130‐SC/L(lefthandmodel)

Travelrange(X,Y,Z)

13/13/13mm

Screwresolution (X,Y,Z) 0.25mm/rev.

Featureresolution

5μm

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

Correspondence

Probestation

‐ HMP‐810SC/1210SC

‐ HSP‐200SC/300SC

HAP300 Programmablepositioner

Model

HAP300/R(righthandmodel)

HAP300/L(lefthandmodel)

Travelrange(X,Y,Z)

30/30/10mm

Screwresolution (X,Y,Z) 0.25mm/rev.

Programmable resolution

0.1μm

X‐Y‐Z repeatability

±1.5μm

X‐Y‐Zaccuracy

±10μm(uncompensatedover10mm)

±5μm(withcompensation)

X‐Y‐Zmaximumspeed

5mm/sec

Typicalcycletime

0.5sec(X‐Y500μm,Z30μm)

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

[‐B]Mechanicboltdown

Dimensions

W157×D264×H183mm

Weight

approx.6100grams

Correspondence

Probestation

‐ HSP‐100/150

‐ HSP‐200/300

‐ HSP‐FPDseries

Steppingmotordrive‐typepositioner.WithHiSOL's semi‐automatic

probercontrolsoftware,itenablesfullyprogrammablehands‐offprobe

placement.ItsupportsI‐V/C‐VandRFapplications.

Accessories

◆ Physicaldimensions(unit:mm)

Accessories

■ ACCESSORIES

Probe & probe arm

DCProbe

Kelvinprobe

Specialtyprobe

HP40

Standardprobe

HP40S

Suspensionprobe

HCP40

High‐performanceprobe

HCP40LP

Lowprofile

High‐performanceprobe

A74CJ

1tip/Kelvinprobe

A74‐KS

1tip/Kelvinprobe

A73‐TK

TrueKelvinprobe

Coaxial・ Triaxialprobe

RFprobe・ Activeprobe ProbeforHigh‐powerdevices

HCP40‐HV

High‐voltageprobe

HCP‐SHC

High‐currentprobe

GGBPicoprobe

(Activeprobe)

VariousRFprobe

HCP40U

Freeangleprobe

(Universalprobe)

HCP40NM

Non‐magneticprobe

A73‐UL

High‐performanceprobe

forNoisemeasurement

Weofferoptimalprobeforyourrequiredmeasurementapplication fromourabundantlineup.

Wealsooffercustomizedprobesaccordingtoyourrequiredspecification.

Accessories

■ ACCESSORIES

Probes and Probe Arms

Model

Maximumvoltage

（DC±）

Frequencyband

（3dB）

Temperature

range

Note

HP40 500VDC～ 30kHz ‐65℃～+300℃

noncoaxial

Support

disposableprobe

●

HP40S 500VDC～ 30kHz ‐65℃～+250℃

noncoaxial，softcontact

●

HCP40 Coax500V，Triax1.2kVDC～ 10MHz 4k～+300℃

Ultralowcurrentmeasurement(fA level)

●

HCP40LP Coax500V，Triax1.2kVDC～ 10MHz 4k～+300℃

Ultralowcurrentmeasurement(fA level)，lowprofile

●

A74CJ 500VDC～ 100MHz 10k～+200℃

UltralowsignalI‐V・C‐Vmeasurement，1tip/kelvin

△

A74KS 500VDC～ 10MHz 4k～+300℃

1tip/Kelvin，I‐V・C‐Vmeasurement，supportdisposableprobes

●

A73TK 500VDC～ 100MHz 10k～+200℃

Truekelvin，ultralowsignalI‐V・C‐V，LCR

－

HCP40‐HV Coax10kV，Triax3kVDC～ 10MHz 4k～+300℃

Highvoltage，sup portdisposableprobes

●

HCP‐SHC 200VDC～ 30kHz 50k～+300℃

SupportsmaximumcurrentofDC20A，200Apulse

－

HCP40‐NM 500VDC～ 10MHz 4k～+300℃

Non‐magnetic，proberforapplyingmagneticfields

●

A73‐UL 500VDC～ 300MHz 10k～+200℃

1/f noise,RTN,TLP

－

Typicalspecifications

Note *1Frequencybandandmaximumvoltagevariesdependingonatypeof cableconnectedtoaprobe.

*2Onlyspecialcoaxialsemirigidprobeatthetipisreplaceable.

Replaceable ProbeTips （Disposableprobes）

HiSOL’sprobetiplineup

Tungsten (W)

Excelsinelectricalcharacteristics,elasticmodulus,mechanicalstrength,andalsocosteffective.Tungsteniswidelyusedprobematerial.

Differentfromotherprobematerials,itcandoshapemachiningatthetipwithetching.Itcandoextra‐finetipprocessingthatmachinecannot

do.Also,therearevarietiesoftipshapes.

Especiallycompatiblewithaluminumpad.

TungstenwithAuplating

Goldplatedonthesurfaceoftungstenprobe.Specialmethodis usedforhigheradhesivestrengthwithtungsten.

Lowcontactresistanceagainstgoldpadandcopperpad.Excelsinohmicfeatures. Non‐magneticsinceNicoatisnotusedinunderlayer

25mm(standard )・ 0.5mm

0.6/1.2/ 2.4/5/7/12/25

Straightor45°bend

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightor45°bend

Paliney®7

Palladium basednoblemetalalloydevelopedforprobes. (Pd 35 / Ag 30 / Pt 10 / Au 10 / Cu 14 / Zn1 %)

Contactresistanceissmallandalsostable.Verylittlesurfaceoxidationinatmosphereandhightemperature.Suitableforapplyinghighcurrentand

continuoustest applicationunderhightemperature.Needtobecautiouswhenhandlingthinnerprobessincetheygetbendeasiercompareto

tungstenprobes. (Tipradiusofmorethan20μmisrecommended. )

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25/50/100

Straightor45°bend

BerylliumCopper （Be‐Cu）

Probematerialiscopperalloythatexcelsinelectriccharacterandelasticmodulus. (Cu98/Be2%)

Smallercontactresistancecomparetotungsten,andstable.Suitableforcontactingtogoldpadandcopperpad.Damagetopadsbyscrubbing

canbereduced.Notrecommendedforcontinuoustestunderhigh

temperature.

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightor45°bend

Paliney® 7isatrademarkofDeringer‐Ney

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape