prober-english.pdf.pdf - 第16页

■ APPLICATIO NS Ultra  Low  Signal  I ‐ V  /  C ‐ V  Measurement High ‐ frequency  /  RF  measurement The  following  plot  is  a  res ult  of  measuring  the  cu rrent  valu e  while  impressing  t…

Probe systems for Optoelectronics

Weofferdesignandmanufacturingofsystemsthatmeasureopticalandelectricalcharacteristicsofthevariousoptoelectronics

(light‐emittingandlight‐receiving ) devicesonwafers.

Semi‐AutomaticProbeSystemwithBuilt‐in

MicroscopicPhotometricTube ForVCSEL,PD

/APDevaluation(fordiameterof2inches)

ManualOpticalFiberDirectConnectionTypeProber

ForVCSELevaluation(fordiameterof3inches)

Applications

‐ OpticalandelectricalcharacteristicsevaluationofVCSEL,LED orotherlight‐emittingdevices onwaferlevel

‐ Opticalandelectricalcharacteristicsevaluationofphotodiode, avalanchephotodiodeorotherlight‐receiving

devicesonwaferlevel

■ SPECIALTY PROBE SYSTEM

‐ I‐L‐V

‐ C ‐V

‐ PulsedI‐V

‐ Wavelength

‐ NFP

‐ FFP

‐ Modulationfrequency

‐ RIN

‐ Darkcurren t

‐ I‐V

‐ C ‐V

‐ Conversionefficiency

‐Wavelength‐conversionefficiency

‐ Cut‐offfrequency

‐ Modulationfrequency

‐ Transientresponse

VCSEL・LD・LEDcharacteristic

PD・APDcharacteristic

Manual 4 point resistivity prober

ThismanualmeasuringsystemistomeasureSiwafers,solarcell,sheetresistancesuchasLCD,andresistivitybyusing

four‐point probemethod.Weprovidemanualfour‐pointproberandKeithley’ssourcemetermodel2401asastandard

measuringsystem. ByusingaccessorymeasuringsoftwareforKeithley2401,automaticcalculationofsheet

resistance

andresistivitybecomepossible.

4‐pointprobe

Specialty Probesystem

Variouslightsource SingleMonochromator

Integratingsphere

PMT

■ APPLICATIONS

UltraLowSignalI‐V/C‐VMeasurement

High‐frequency/RFmeasurement

Thefollowingplotisaresultofmeasuringthecurrentvaluewhileimpressingthesweepvoltagetotheprobeandthechuckthat are

intheopenstate.Theresultshowsthenoiseandleakcurrentoftheprobeislessthan±10fA.With300mm‐thermalchuck,it

showsthe

noiseandleakcurrentislessthan±20fAinallthetemperatureranges ：‐60゜Cto+300゜C.Itprovesthatourprobe

systemcorrespondstoultralowsignalmeasurementapplicationthatrequiresmeasurementprecisionof1pAorless.

Theplotontherightismeasureddataofreversevoltageand

capacitancemeasurementofdiodedevice.

BycorrectingOPEN/SHORT/LOAD, itenablestodostable

C‐Vmeasurementof“fF” level.

C300‐60ULHigh/Lowtemperaturechuck

(‐60゜C～+300゜C)

Voltagesweeprange：‐10V～ +10V

ModelA74CJ1tip‐KelvinCoaxialProbe

Voltagesweeprange： ‐200V～ +200V

Note)Theabovemeasurementvalueisactualmeasurementvalueinourmeasurementenvironmentandnotguaranteedvalue

＜±3fA

OurprobestationcancovermeasuringfrequencybandofDCto67GHz duetoitshighrigidityandstablemechanism.

SystemintegrationwithVector networkanalyzer(VNA),RF probe,RF cable,calibrationsubstrateetc.,willsupporthighfrequency /

RFmeasurementwhichishighresolutionandexcelsinrepeatability.

Itsupportsfrom2‐porttomulti‐port

measurement,temperaturerangefrom10kto+250゜C,andcharacterizationunderultra‐high

vacuum(10e‐6Pa)environment.

UltralowcurrentI‐Vmeasurement

UltralowcapacitanceC‐Vmeasurement

Applications

‐65゜C～+200゜C：＜±10fA

+300゜C：＜±20fA

■ APPLICATIONS

Wafer‐LevelReliabilityTest

NoiseCharacterization

OrganicSemiconductorDeviceEvaluation

Atthestageofresearchanddevelopment oforganicsemiconductordevicesuchasOFET，OTFT，OEL，andOLED,itisnecessary

toperformevaluationunderhigh‐purityinertgastoavoidcharacteristicdegradationcausedbymoistureoroxygeninthe

atmosphere.Weoffersmall‐footprintmanualproberandsemi‐autoproberthat

arespeciallydesignedfortheusageinsideofa

glovebox.Theyaresuitableforoperationbyglovedhand.

Manualproberforglovebox

Semi‐automatic proberforglovebox

+300゜CHightemperaturemulti‐siteprobecard

Anoxygenmeterinsideofachamberandamass flow

controller (MFC)enable probingwithalowresidual

oxygenconcentrationoflessthan100ppm

Weofferprobesystemsthatsupportwafer‐levelreliabilitytestsuchasEM,TDDB,HCI,NBTI,BT,etc.,.

Ourprobesystemsupport

varioustasksrequiredinwafer‐levelreliabilitytestsuchashightemperatureupto+300゜C,long‐term

testingoverweeks,stablecontactunderhightemperatureenvironment,mountingmulti‐siteprobecard,anti‐oxidation

environmentbynitrogengaspurge,etc.,.

Ourprobesystemwithshieldchamber (HMP‐810SC/1210SC，HSP‐200SC/300SC)hasoptionsettingofultralowfloornoise(‐UL).

Bychoosingthis“–UL” option,itcansupporton‐wafernoisecharacterizationsuchas1/fnoise,randomtelegraph noise,(RTN),and

RFnoiseinthewidetemperaturerangefrom‐65゜Cto+200゜C.

Applications