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Accessories ■ ACCESSORI ES Accessories 28 Various Wafer Chuc ks Chuck ‐ Ambient Standard  Chucks  （ Coaxial ） Model Wafer  size HC20 2  inch HC40 4  inch HC60 6  inch HC80 8  inch HC120 12  inch Triaxial  Chuck…

Accessories

■ ACCESSORIES

Probes and Probe Arms

TungstenCarbide (TC)

Highlyrigidandabrasion‐resistantprobematerial.Toutilizethecharacteristic,itcan beusedforscribe,

exfoliationofoxidelayer,cuttingmetal pattern,andtouchdownsensorbesideselectricalmeasurement.Shankcannotbebent.

WhiskerProbe

Probewithminuscule tipradiustocontactinternalcircuit.Ultrathintungstenwireissplicedatthetipofφ0.5mm nickelshank.

Elasticity oftungstenwirehasappropriatespringpressure.Itreducesdamagetocircuitduringprobing.

φ0.5mm shankcanbebentorcutfreely.Wirediameterisavailablein 127μm,76μm,and25μm.

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightonly

Overalllength・shankdiameter(mm) 34mm・ 0.5mm

Wirediameter・Tipradius(μm)

Diameter127μm： 0.35/0.75/1

Diameter 76μm： 0.1/0.35/0.5

Diameter 25μm： 0.25/0.5/0.75

Shape Straightonly (Shankcanbebentorcut )

Wirelength(mm) 5mm

ReplaceableCoaxialProbeTipforA74CJ

ReplaceablesemirigidcoaxialprobespeciallyforA74CJ.Exceptabout2.5mmoftipswhichtheneedlepointisexposed,

ithas50Ω coaxialgeometryandexcelsinhighfrequencyproperty.Materialofthetipistungsten (W).Variousradiusisavailable.

Probeconductordia.・shielddia. 0.2mm・ 0.86mm

Tipradius(μm) 0.5/1.5/5/10/12.5/15/20/25/35/50

Shape Lowprofile double‐bend

Probe Card・Probe Card Adaptor

Standard probecardadaptor

for4.5” probecard

Probecardadaptorfor

circularprobecard

Probecardadaptorfor

Shieldchamber(SC)

Adaptorforlargediameter

WLR probecard

VariousProbeCardAdaptor

ProbeCardfor+300゜CHighTemperature

Wecustomizeprobecardadaptoraccordingtoyourrequiredspecification.

WeofferprobecardsmanufacturedbyCeladonSystems inUSA.Theysupportlownoiseandlowleakmeasurementinthe

temperature rangeof‐65゜C～ +350゜C.

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Accessories

■ ACCESSORIES

Accessories

Various Wafer Chucks

Chuck‐ Ambient

StandardChucks（Coaxial）

Model Wafersize

HC20 2inch

HC40 4inch

HC60 6inch

HC80 8inch

HC120 12inch

TriaxialChucks

Model Wafersize

HTC20 2inch

HTC40 4inch

HTC60 6inch

HTC80 8inch

HTC120 12inch

GeneralPurpose Hotchuck・Calefaction/EndothermicChuck

Highperformancehotchuckandthermalchucksystem.Highperformancehot

chuck andthermalchucksystemwithadvancedtemperaturecontroltechniqueand

lownoise / lowleakage technology.

Becauseoftheirfeaturesofhigh‐speedtemperaturerise / fall,superiorchucktop

planarityandtemperature uniformity,theycansupporthighprecisiontemperature

characteristicstestorwaferlevelreliability

test.

High‐PerformanceHotchuck,Thermalchuck

Model

HA40

HA60

HA80

HA40H

HA60H

HA80H

Wafersize

4inch

6inch

8inch

4inch

6inch

8inch

TemperatureRange

R.T.～ +200゜C

R.T.～ +300゜C

Heatingmethod

Heater

Coolingmethod

N/A

Compressedair

HA40

HA60

HA80

4inch

6inch

8inch

‐10゜C～ +85゜C Peltierelement Peltierelement

HotChuck

Calefaction/EndothermicChuck

Weofferoptimalchuckforyourrequiredmeasurementapplication fromourabundantlineup.

Wealsooffersquarechucksforglasssubstrate,chuckforpressuresensor,chuckforhighfrequency,chuckforpower

device,chuckforprintcircuitboardetc.,. Pleasecontactusfordetails.

RTchuckforwafer.Standard(Coaxial)modelandtriaxialmodelareavailable.

Generalpurpose hotchuck andCalefaction/EndothermicChucks.

Standard(Coaxial) typeandtriaxialtype available. Inadditiontothefollowing

chucks,wecustomize chuckaccordingtoyour applications.

Standardchucksize

φ 155mm(6inch)，φ205mm(8inch)，φ305mm(12inch)

TemperatureRange Heatingmethod

R.T.～ +200℃ Heater

Coolingmethod

Compressedair

+20℃～+200℃ Heater

R.T.～ +300℃ Heater

Compressedair

+20℃～+300℃ Heater Compressedair

‐40℃～+200℃ Heater Refrigerator&compressedair

‐60℃～+200℃ Heater

‐40℃～+300℃ Heater

Refrigerator&compressedair

‐60℃～+300℃ Heater Refrigerator&compressedair

‐40℃～+200℃ Heater Fluorinatedliquidcirculation

‐65℃～+200℃ Heater

‐40℃～+300℃ Heater

Fluorinatedliquidcirculation

‐65℃～+300℃ Heater Fluorinatedliquidcirculation

+30℃～+400℃ Heater Compressedair

Model

‐A

‐AC

‐AH

‐ACH

‐C

‐CL

‐CH

‐CLH

‐M

‐ML

‐MH

‐MLH

‐HH

Specifications

Ultralownoise,lowleakage,andshortsettling model”‐UL” seriesisalsoavailable.

Model Wafersize TemperatureRange Heatingmethod Coolingmethod

Accessories

■ ACCESSORIES

Accessories

Microscopes, Optics, Cameras & Monitors

Shield Dark Boxes ( for open type manual probers )

Weofferbestsuitedobse rvationopticalsystemssuchasstereomicroscope,high‐powermetallurgicalmicroscopeunit,

camera,displayetc.accordingtoyourapplication.

Shield darkboxforopentypemanualproberthatisrequiredforultra lowcurrentmeasurementbelowpA* level.

Hatchback door‐typeanddoubleswing door‐typeareavailable.Innerwallsofallthemodels

arepaintedblackand

shadingLevelbelow0.01Lxisguaranteed.Theyalsosupportopening / shuttingofadoorandlinkageoftheinterlock

functionofatester.

HEB5565

HDBB6070

HDBB8080H

HDBA6070H

*Duringtriaxialconnection

Bench‐topmodel

Model

HEB5565

Doortype

Hatchback

Dimensions（WxDxHmm）

560×670×670

CorrespondenceProbestation

HMP‐200/400

HEB6070 Hatchback

600×720×720 HMP‐400/600

HDBA6070 Hatchback

610×720×780 HMP‐400/600

HEBB6070 Doubleswing 600×700×1020 HMP‐400/600

HDBA8080 Hatchback

810×820×850 HMP‐800

HEBB8080 Doubleswing 810×820×1020 HMP‐800

HDBA9595 Hatchback

950×950×850 HMP‐1200

HEBB9595 Doubleswing 950×960×1020 HMP‐1200

Standalonemodel(Withoutvibrationisolationtable )

HDBA6070H Hatchback

610×720×1510 HMP‐400/600

HEBB6070H Doubleswing 600×700×1750 HMP‐400/600

HDBA8080H Hatchback

810×820×1580 HMP‐800

HEBB8080H Doubleswing 810×820×1750 HMP‐800

HDBA9595H Hatchback

950×950×1580 HMP‐1200

HEBB9595H Doubleswing 950×960×1750 HMP‐1200

Modelwithairsuspensiontype micro‐vibration isolator

HSA850S Hatchback

850×850×1690 HMP‐800

HSB850S Doubleswing 860×870×1850 HMP‐800

HSA1000S Hatchback

1050×1050×1690 HMP‐1200

HSB1000S Doubleswing 1000×1000×1850 HMP‐1200

Options

・ Add‐oncableductenlargementwithshadingtube

・ Add‐onconnectorpanel

・ Testerinterlocklinkedwithdoorswitch

・ Sidedesk

*1Counterbalance,foldinghatchback

*2Gasdampersupporthatchback

*3Dimensionswhenadoorisclosed.Protuberancesarenotincluded.

・ Shelfboard insideofabox

・ Quakeproof fixingbracket

・ Loaddispersionboard,etc.

Model Doortype Dimensions（WxDxHmm）

CorrespondenceProbestation

Model Doortype Dimensions（WxDxHmm）

CorrespondenceProbestation