prober-english.pdf.pdf - 第20页

Model HP50/R  (  right  hand  model) HP50/L  (  left  hand  model) Travel  range  (  X,Y,Z  ) 5  /  5  /  5  mm Screw  resolution (  X,Y,Z  ) 0.5mm  /  rev. Feature  resolution 10 μ m Mounting On/O…

FailureAnalysis,FailDieMarking

Mountingalasercutter

FragileIn‐Circuitprobing

Emissionanalysis・OBIRCH/TIV A

Allofourprobesystemscanbemountedwithlasermicro cutter. Ourprobesystemwithlasermicro cuttersupportapplications

suchaspointmarkingofFIB orSEM beforeobservation,exfoliationofprotectionlayer, cutmetalcircuitpattern etc., .

Laserwavelengthcanbechosenfrom1064/532/355/266nm(Multiplewavelengthis

possible )

Pointmarking

Exfoliationofprotectionlayer

Patterncutting

TFT panelcut

Weofferoptionsandaccessoriestosupportprobingtofinepatternofsubmicronorderthatisrequiredforfailureanalysisand

testingflatpaneldisplay. Bycombiningwithmetallurgicalmicroscope,positionerwithsubmicronpositioningprecision,whisker

probeforcircuitprobing,andactivevibrationisolatingtable, itcanperformstableprobingtoa

submicronholewhoseprotective

filmisexfoliatedwithalasercutterwithoutadamagetothecircuit.

Activevibration

isolatingUnit

Activevibrationisolating Controller

metallurgical microscope

Submicronprecision

positioner

Whiskerprobe(left)

forIn‐circuitprobi ng

*Standardprobeontherig ht

Activevibrationisolatingtable

Fail diemarking(Inker )

Weofferprobestationsthatcanbemountedonemission

microscopeandOBIRCH system.

Itcanmarkdefectivediewiththeminimumdotsizerangingfrom

minimum125μmφ tomaximum2150μmφ.

Itcanbemountedonoursemi‐autoprobersHSP‐100/150/200/300.

■ APPLICATIONS

Applications

Inkerhead

InkCartridge

Model

HP50/R(righthandmodel)

HP50/L(lefthandmodel)

Travelrange(X,Y,Z)

5/5/5mm

Screwresolution (X,Y,Z) 0.5mm/rev.

Featureresolution

10μm

Mounting

On/Offswitchingmagnetbase(standard)

Dimensions

W36×D85×H56mm

Weight

approx.200grams

Positioners (Manipulators)

HP50 Compactpositioner

Compactleadscrewfeedpositioner.

Thespecialguidemechanismallowsforstablecontacton50μmorlargerPAD.

Correspondence

Probestation

‐ HMP‐400/600

‐ HMP‐800/1200

‐ HMP‐FPDseries

HP65 Compacthigh‐accuracypositioner

Compactmicrometerfeedtypehigh‐accuracypositioner.

Easilyaccesses10μmorlargercircuitpattern orPADwithoutbacklash.

Model

HP65

Travelrange(X,Y,Z)

6.5/6.5/6.5mm

Screwresolution (X,Y,Z) 0.5mm/rev.

Featureresolution

3μm

Mounting

On/Offswitchingmagnetbase(standard)

Dimensions

W38×D93×H68mm

Weight

approx.320grams

Correspondence

Probestation

‐ HMP‐400/600

‐ HMP‐800/1200

‐ HMP‐FPDseries

◆ Physicaldimensions(unit:mm)

Accessories

■ ACCESSORIES

Accessories

■ ACCESSORIES

Accessories

Positioners (Manipulators)

HP80 Compactpositioner

General‐purposepositionerdesignedforlowcost. (HP80/L・R‐M)

Stablecontacton70μmorlargerPADwithminimalbacklash.

Model

HP80/R(righthandmodel)

HP80/L(lefthandmodel)

Travelrange(X,Y,Z)

12/8/12mm

Screwresolution (X,Y,Z) 0.635mm/rev.

Featureresolution

15μm

Mounting

[‐M]Rubbermagnetbase

[‐E]On/Offswitchingmagnetbase

Dimensions

[‐M]W46×D74×H55mm

[‐E]W41×D83×H69mm

Weight

[‐M]approx.160grams

[‐E] approx.240grams

Correspondence

Probestation

‐ HMP‐400/600

‐ HMP‐800/1200

‐ HMP‐FPDseries

HP80/L‐M

Rubbermagnetbasemodel

HP80/R‐E

On/Offswitchingmagnetbasemodel

HP80/L・R‐M Rubbermagnetbasemodel

HP80/L・R‐EOn/Offswitchingmagnetbasemodel

◆ Physicaldimensions(unit:mm)

Accessories