prober-english.pdf.pdf - 第27页

27 Accessories Accessories ■ ACCESSORI ES Probes and Probe Arms Tungsten  Carbide (  TC  ) Highly  rigid  and  abrasion ‐ resist ant  probe  material.  To  utilize  the  characteris tic,  it  can be  used…

Accessories

■ ACCESSORIES

Probes and Probe Arms

Model

Maximumvoltage

（DC±）

Frequencyband

（3dB）

Temperature

range

Note

HP40 500VDC～ 30kHz ‐65℃～+300℃

noncoaxial

Support

disposableprobe

●

HP40S 500VDC～ 30kHz ‐65℃～+250℃

noncoaxial，softcontact

●

HCP40 Coax500V，Triax1.2kVDC～ 10MHz 4k～+300℃

Ultralowcurrentmeasurement(fA level)

●

HCP40LP Coax500V，Triax1.2kVDC～ 10MHz 4k～+300℃

Ultralowcurrentmeasurement(fA level)，lowprofile

●

A74CJ 500VDC～ 100MHz 10k～+200℃

UltralowsignalI‐V・C‐Vmeasurement，1tip/kelvin

△

A74KS 500VDC～ 10MHz 4k～+300℃

1tip/Kelvin，I‐V・C‐Vmeasurement，supportdisposableprobes

●

A73TK 500VDC～ 100MHz 10k～+200℃

Truekelvin，ultralowsignalI‐V・C‐V，LCR

－

HCP40‐HV Coax10kV，Triax3kVDC～ 10MHz 4k～+300℃

Highvoltage，sup portdisposableprobes

●

HCP‐SHC 200VDC～ 30kHz 50k～+300℃

SupportsmaximumcurrentofDC20A，200Apulse

－

HCP40‐NM 500VDC～ 10MHz 4k～+300℃

Non‐magnetic，proberforapplyingmagneticfields

●

A73‐UL 500VDC～ 300MHz 10k～+200℃

1/f noise,RTN,TLP

－

Typicalspecifications

Note *1Frequencybandandmaximumvoltagevariesdependingonatypeof cableconnectedtoaprobe.

*2Onlyspecialcoaxialsemirigidprobeatthetipisreplaceable.

Replaceable ProbeTips （Disposableprobes）

HiSOL’sprobetiplineup

Tungsten (W)

Excelsinelectricalcharacteristics,elasticmodulus,mechanicalstrength,andalsocosteffective.Tungsteniswidelyusedprobematerial.

Differentfromotherprobematerials,itcandoshapemachiningatthetipwithetching.Itcandoextra‐finetipprocessingthatmachinecannot

do.Also,therearevarietiesoftipshapes.

Especiallycompatiblewithaluminumpad.

TungstenwithAuplating

Goldplatedonthesurfaceoftungstenprobe.Specialmethodis usedforhigheradhesivestrengthwithtungsten.

Lowcontactresistanceagainstgoldpadandcopperpad.Excelsinohmicfeatures. Non‐magneticsinceNicoatisnotusedinunderlayer

25mm(standard )・ 0.5mm

0.6/1.2/ 2.4/5/7/12/25

Straightor45°bend

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightor45°bend

Paliney®7

Palladium basednoblemetalalloydevelopedforprobes. (Pd 35 / Ag 30 / Pt 10 / Au 10 / Cu 14 / Zn1 %)

Contactresistanceissmallandalsostable.Verylittlesurfaceoxidationinatmosphereandhightemperature.Suitableforapplyinghighcurrentand

continuoustest applicationunderhightemperature.Needtobecautiouswhenhandlingthinnerprobessincetheygetbendeasiercompareto

tungstenprobes. (Tipradiusofmorethan20μmisrecommended. )

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25/50/100

Straightor45°bend

BerylliumCopper （Be‐Cu）

Probematerialiscopperalloythatexcelsinelectriccharacterandelasticmodulus. (Cu98/Be2%)

Smallercontactresistancecomparetotungsten,andstable.Suitableforcontactingtogoldpadandcopperpad.Damagetopadsbyscrubbing

canbereduced.Notrecommendedforcontinuoustestunderhigh

temperature.

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightor45°bend

Paliney® 7isatrademarkofDeringer‐Ney

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Accessories

■ ACCESSORIES

Probes and Probe Arms

TungstenCarbide (TC)

Highlyrigidandabrasion‐resistantprobematerial.Toutilizethecharacteristic,itcan beusedforscribe,

exfoliationofoxidelayer,cuttingmetal pattern,andtouchdownsensorbesideselectricalmeasurement.Shankcannotbebent.

WhiskerProbe

Probewithminuscule tipradiustocontactinternalcircuit.Ultrathintungstenwireissplicedatthetipofφ0.5mm nickelshank.

Elasticity oftungstenwirehasappropriatespringpressure.Itreducesdamagetocircuitduringprobing.

φ0.5mm shankcanbebentorcutfreely.Wirediameterisavailablein 127μm,76μm,and25μm.

25mm(standard )・ 0.5mm

5/7/10/12.5/20/25

Straightonly

Overalllength・shankdiameter(mm) 34mm・ 0.5mm

Wirediameter・Tipradius(μm)

Diameter127μm： 0.35/0.75/1

Diameter 76μm： 0.1/0.35/0.5

Diameter 25μm： 0.25/0.5/0.75

Shape Straightonly (Shankcanbebentorcut )

Wirelength(mm) 5mm

ReplaceableCoaxialProbeTipforA74CJ

ReplaceablesemirigidcoaxialprobespeciallyforA74CJ.Exceptabout2.5mmoftipswhichtheneedlepointisexposed,

ithas50Ω coaxialgeometryandexcelsinhighfrequencyproperty.Materialofthetipistungsten (W).Variousradiusisavailable.

Probeconductordia.・shielddia. 0.2mm・ 0.86mm

Tipradius(μm) 0.5/1.5/5/10/12.5/15/20/25/35/50

Shape Lowprofile double‐bend

Probe Card・Probe Card Adaptor

Standard probecardadaptor

for4.5” probecard

Probecardadaptorfor

circularprobecard

Probecardadaptorfor

Shieldchamber(SC)

Adaptorforlargediameter

WLR probecard

VariousProbeCardAdaptor

ProbeCardfor+300゜CHighTemperature

Wecustomizeprobecardadaptoraccordingtoyourrequiredspecification.

WeofferprobecardsmanufacturedbyCeladonSystems inUSA.Theysupportlownoiseandlowleakmeasurementinthe

temperature rangeof‐65゜C～ +350゜C.

Overalllength・shankdiameter (mm)

Tipradius(μm)

Shape

Accessories

■ ACCESSORIES

Accessories

Various Wafer Chucks

Chuck‐ Ambient

StandardChucks（Coaxial）

Model Wafersize

HC20 2inch

HC40 4inch

HC60 6inch

HC80 8inch

HC120 12inch

TriaxialChucks

Model Wafersize

HTC20 2inch

HTC40 4inch

HTC60 6inch

HTC80 8inch

HTC120 12inch

GeneralPurpose Hotchuck・Calefaction/EndothermicChuck

Highperformancehotchuckandthermalchucksystem.Highperformancehot

chuck andthermalchucksystemwithadvancedtemperaturecontroltechniqueand

lownoise / lowleakage technology.

Becauseoftheirfeaturesofhigh‐speedtemperaturerise / fall,superiorchucktop

planarityandtemperature uniformity,theycansupporthighprecisiontemperature

characteristicstestorwaferlevelreliability

test.

High‐PerformanceHotchuck,Thermalchuck

Model

HA40

HA60

HA80

HA40H

HA60H

HA80H

Wafersize

4inch

6inch

8inch

4inch

6inch

8inch

TemperatureRange

R.T.～ +200゜C

R.T.～ +300゜C

Heatingmethod

Heater

Coolingmethod

N/A

Compressedair

HA40

HA60

HA80

4inch

6inch

8inch

‐10゜C～ +85゜C Peltierelement Peltierelement

HotChuck

Calefaction/EndothermicChuck

Weofferoptimalchuckforyourrequiredmeasurementapplication fromourabundantlineup.

Wealsooffersquarechucksforglasssubstrate,chuckforpressuresensor,chuckforhighfrequency,chuckforpower

device,chuckforprintcircuitboardetc.,. Pleasecontactusfordetails.

RTchuckforwafer.Standard(Coaxial)modelandtriaxialmodelareavailable.

Generalpurpose hotchuck andCalefaction/EndothermicChucks.

Standard(Coaxial) typeandtriaxialtype available. Inadditiontothefollowing

chucks,wecustomize chuckaccordingtoyour applications.

Standardchucksize

φ 155mm(6inch)，φ205mm(8inch)，φ305mm(12inch)

TemperatureRange Heatingmethod

R.T.～ +200℃ Heater

Coolingmethod

Compressedair

+20℃～+200℃ Heater

R.T.～ +300℃ Heater

Compressedair

+20℃～+300℃ Heater Compressedair

‐40℃～+200℃ Heater Refrigerator&compressedair

‐60℃～+200℃ Heater

‐40℃～+300℃ Heater

Refrigerator&compressedair

‐60℃～+300℃ Heater Refrigerator&compressedair

‐40℃～+200℃ Heater Fluorinatedliquidcirculation

‐65℃～+200℃ Heater

‐40℃～+300℃ Heater

Fluorinatedliquidcirculation

‐65℃～+300℃ Heater Fluorinatedliquidcirculation

+30℃～+400℃ Heater Compressedair

Model

‐A

‐AC

‐AH

‐ACH

‐C

‐CL

‐CH

‐CLH

‐M

‐ML

‐MH

‐MLH

‐HH

Specifications

Ultralownoise,lowleakage,andshortsettling model”‐UL” seriesisalsoavailable.

Model Wafersize TemperatureRange Heatingmethod Coolingmethod