prober-english.pdf.pdf - 第6页

4 inch 6 inch ■ SEMI-AUTOMATIC PROBER ・ Model HSP -100 is for 4" wafers. ・ Model HSP -150 is for 6" wafers. Semi ‐ Automatic  Probe  System  for  Small ‐ Diameter  Wafers This  is  a  semi ‐ automatic …

8inch 12inch

■ MANUAL PROBER

Model HMP-810SC / HMP-1210SC

・

Model HMP-800SC is for 8" wafers.

・

Model HMP-1200SC is for 12" wafers.

ManualProberforHigh/LowTemperatureTests

Thisisamanualprobesystemfornext‐generationsemiconductordevicesdesignedforlownoiseandlowleakage.

Inthissystem,ashieldedchamberstructurecontainstheprobeandchuckinatotallyEMIshieldedenvironment.

Thesystemsupportsmeasurementssuchasultralowsignalmeasurementinthethresholdregions,1/f

noisemeasurement,

Sparameteracquisition,andhigh‐speedI‐Vmeasurementinatemperaturecontrolrangefrom‐60°Cto+300°C

(or+400°Cwhenusingthespecialoption).

Thisprobesystemcanoptionallysupporthigh‐currentandhigh‐voltagepowerdeviceapplications.

*TheHMP‐610SCfor6” wafersisalso

available.

Applications

‐ Temperaturecharacteristicstestsinrangefrom+25°Cto+300°C

orfrom‐60°Cto+300°C

‐ UltralowsignalI‐Vmeasurements(fAlevel)

‐ VariousC‐Vmeasurements

(quasi‐staticC‐V,HF‐CV,andRF‐CV)[subpFlevel]

‐ 1/fnoiseevaluation

‐ RTN(random telegraphnoise)evaluation

‐ High‐frequencynoiseevaluation(upto800MHz)

‐ RFmeasurements(upto67GHz)/Sparameteracquisition

‐ Ultrahigh‐speedI‐Vmeasurements

Extended applications

‐ Probecardsupport(cansupportMultisiteWLR)

‐ Light‐receiving/emittingcharacteristicsevaluationapplications

foroptoelectronics(suchasLED,LD,VCSEL,andPD)

‐ Commongatepad contactsofflat‐paneldisplaydevices

‐ High‐powerdevicemeasurements

(200Apulse,±3kVtriaxial,±10kVcoaxial)*8” model

‐ Waferlevelreliabilitytests

(suchasEM,TDDB,HCI,

NBTI,andBT)

WaferSize

X‐Ycoarsetravel

X‐Yfinetravel

θ travel

PlatenZaxisaction

Unitdimension（W×D×H）*

Weight*

PlatenZaxisadjustment

HMP‐810SC HMP‐1210SC

～φ200mm ～φ300mm

X：205mm，Y：205mm X：310mm，Y：310mm

1020×1000×1550mm

1150×1100×1550mm

750kg 1000kg

±7.5°

0/0.3mm

0～13mm

X：205mm，Y：205mm X：310mm，Y：310mm

*Itemswithasteriskvarydependingonsystemconfiguration.

ManualProber

4inch 6inch

■ SEMI-AUTOMATIC PROBER

・

Model HSP-100 is for 4" wafers.

・

Model HSP-150 is for 6" wafers.

Semi‐AutomaticProbeSystemforSmall‐DiameterWafers

Thisisasemi‐automaticprobesystemthatsupports4” or6” smalldiameterwafers.

Equippedwithahigh‐accuracyX‐Y‐Z‐θ quadraxial closedloopstagehavingexcellentpositioningaccuracyandrepeatability,

thisprobesystemensuresreliableprobecontact.

Thisprobesystemcanincorporateahotchuckthatsupportsatemperaturerangefrom

+20°Cto+300°C.

Thisprobesystemcanoptionallysupporthigh‐currentandhigh‐voltagepowerdeviceapplications.

Applications

Extended applications

‐ Temperaturecharacteristicstestsinrangefrom+20°Cto+300°C

‐ UltralowsignalI‐Vmeasurements(fAlevel)

‐ VariousC‐Vmeasurements(quasi‐staticC‐V,HF‐CV,andRF‐CV)

‐ RFmeasurements(upto67GHz)

‐ Ultrahigh‐speedI‐Vmeasurements

‐ Probecardsupport(cansupportMultisiteWLR)

‐ Built‐inlasercutter

(Pointmarking,Exfoliationofprotectionlayer,Metallayercutting)

‐ Activevibrationisolatorandultrahigh‐accuracyprobingthrough

imageprocessingpatternrecognition(accuracy:± 1umorfiner)

‐ Light‐receiving/emittingcharacteristicsevaluationapplicationsfor

optoelectronics(suchasLED,LD,VCSEL,

andPD)

‐ Commongatepad contactsofflat‐paneldisplaydevices

‐ High‐powerdevicemeasurements

(200Apulse,±3kVtriaxial,±10kVcoaxial)

‐ Waferlevelreliabilitytests(suchasEM,TDDB,HCI,NBTI,and BT)

WaferSize

X‐Ytravel

X‐Yrepeatability

X‐Yaccuracy

Ztravel

Unitdimension（W×D×H）*

Weight*

Zrepeatability

HSP‐100 HSP‐150

～φ100mm ～φ150mm

X：105mm，Y：200mm X：160mm，Y：250mm

1200×900×1550mm

1250×900×1550mm

650kg 700kg

＜±2μm

＜±5μm

20mm

＜±1μm

θ travel

θ repeatability

±7.5°

0.002°

*Itemswithasteriskvarydependingonsystemconfiguration.

Model HSP-100 / HSP-150

Semi‐AutomaticProber

■ SEMI-AUTOMATIC PROBER

・

Model HSP-200 is for 8" wafers.

・

Model HSP-300 is for 12" wafers.

8inch 12inch

StandardSemi‐AutomaticProberModel

Thisisastandardsemi‐automaticprobesystemthatsupports8” or12” wafers.

Equippedwithahigh‐accuracyX‐Y‐Z‐θ quadraxial closedloopstagehavingexcellentpositioningaccuracyandrepeatability,

thisprobesystemensuresreliableprobecontact.

Thisprobesystemcanincorporateahotchuckthatsupportsatemperaturerangefrom+20°

Cto+300°C.

Thisprobesystemcanoptionallysupporthigh‐currentandhigh‐voltagepowerdeviceapplications.

Applications

Extended applications

‐ Temperaturecharacteristicstestsinrangefrom+20°Cto+300°C

‐ UltralowsignalI‐Vmeasurements(fAlevel)

‐ VariousC‐Vmeasurements(quasi‐staticC‐V,HF‐CV,andRF‐CV)

‐ RFmeasurements(upto67GHz)

‐ Ultrahigh‐speedI‐Vmeasurements

‐ Probecardsupport(cansupportMultisiteWLR)

‐ Built‐inlasercutter

(Pointmarking,Exfoliationofprotectionlayer,Metallayercutting )

‐ Activevibrationisolatorandultrahigh‐accuracyprobingthrough

imageprocessingpatternrecognition(accuracy:± 1umorfiner)

‐ Light‐receiving/emittingcharacteristicsevaluationapplicationsfor

optoelectronics(suchasLED,LD,VCSEL,

andPD)

‐ Commongatepad contactsofflat‐paneldisplaydevices

‐ High‐powerdevicemeasurements

(200Apulse,±3kVtriaxial,±10kVcoaxial)

‐ Waferlevelreliabilitytests(suchasEM,TDDB,HCI,NBTI,and BT)

WaferSize

X‐Ytravel

X‐Yrepeatability

X‐Yaccuracy

Ztravel

Unitdimension（W×D×H）*

Weight*

Zrepeatability

HSP‐200 HSP‐300

～φ200mm ～φ300mm

X：205mm，Y：300mm X：310mm，Y：450mm

1300×1000×1550mm

1400×1050×1600mm

750kg 950kg

＜±2μm

＜±5μm

20mm

＜±1μm

θ travel

θ repeatability

±7.5°

0.002°

*Itemswithasteriskvarydependingonsystemconfiguration.

Model HSP-200 / HSP-300

Semi‐AutomaticProber