prober-english.pdf.pdf - 第19页

Failure  Analysis,  Fail  Die  Marking Mounting  a  laser  cutter Fragile  In ‐ Circuit  probing Emission  analysis ・ OBIRCH  /  TIV A All  of  our  probe  sys tems  can  be  mounted  with  laser  m…

■ APPLICATIONS

High‐PowerDeviceMeasurement

Safety

HighVoltageMeasurement(～ 10kV)，High CurrentMeasurement ( ～ 200Apulse )

Inhigh‐powerdeviceevaluationwheredangeroushighvoltageandhigh currentarerequired,safetymeasuresagainsthumanhaveto

betakeninanticipationofvariouscases.Ourprobesystemfor high‐powerdevicemeasurementisequippedwithinterlocksystemthat

isstandard.Eachinterlocksystemwillpreventfromelectricshock,aburn,

andoxygenshortage

Interlockthatinterruptsappliedhighvoltagewithsafetylight curtain.

Interlockthatpreventsoxygenshortagewith

openairoxygenmonitor.

(Appliedtoasystemwithgaspurgefunction. )

HighVoltageProbing

High CurrentProbing

Weofferprobeaccessoriesthatsupportmaximum10kV200Apulseaswellaschucksthatsupportmaximum 5kV40Apulse.

Itsupportsdevicecharacterizationinthetemperaturerangefrom‐60゜Cto+300゜Cinordertosupportoperationtestinwidetemperature

rangefordevicessuchasin‐vehicledevices.

ChucksforPowerDevices

Highvoltageprobeunit

(±3kV，‐60゜Cto+300゜C)

Insulationliquidimmersiontray

topreventelectricdischarge

High currentprobeunit

(Maximum200Apulse，‐60゜Cto+300゜C)

+300゜CHighTemperatureTest, AntioxidantEnvironment

WhenevaluatingGaN orSiC highpowerdevice,hightemperaturetestat+300゜Cisrequired.Ourproductwithshieldchambermakesit

possibletodonon‐oxidation probingwithalowresidualoxygenconcentrationoflessthan100ppmbypurgingnitrogengasintothe

chamber.

Weofferchuckunitsspeciallydesignedforhighpower

devices.

・ Roomtemperaturechuckandhightemperaturechuck

(RT ~+200゜C/+300゜C),

high/lowtemperaturechuck (‐40゜C/‐60゜C~+200゜C/+300゜C)

・ 5kV 40Apulse

・ Thinwaferhandling

Feed‐throughConnectorsandMeasurementCables

Weoffermeasurementcablesandfeed‐throughconnectorsthatconnectvarioushighpowerdevicetesterswithourprobesystem.

・ Kelvin connection

・ TAIKO processwafer

Keysighttechnologies

B1505A HV‐TRIAX

TFF/KeithleyInstruments

2600‐PCT/4200‐PCT

HV‐TRIAX

SHV connector & cable

(~10kV)

IWATSU

CS‐3000/5000

Itsupportsclosedloopcontrolbyusingoxygenmeterinsideof

achamberandmass flowcontroller(MFC ).

Applications

FailureAnalysis,FailDieMarking

Mountingalasercutter

FragileIn‐Circuitprobing

Emissionanalysis・OBIRCH/TIV A

Allofourprobesystemscanbemountedwithlasermicro cutter. Ourprobesystemwithlasermicro cuttersupportapplications

suchaspointmarkingofFIB orSEM beforeobservation,exfoliationofprotectionlayer, cutmetalcircuitpattern etc., .

Laserwavelengthcanbechosenfrom1064/532/355/266nm(Multiplewavelengthis

possible )

Pointmarking

Exfoliationofprotectionlayer

Patterncutting

TFT panelcut

Weofferoptionsandaccessoriestosupportprobingtofinepatternofsubmicronorderthatisrequiredforfailureanalysisand

testingflatpaneldisplay. Bycombiningwithmetallurgicalmicroscope,positionerwithsubmicronpositioningprecision,whisker

probeforcircuitprobing,andactivevibrationisolatingtable, itcanperformstableprobingtoa

submicronholewhoseprotective

filmisexfoliatedwithalasercutterwithoutadamagetothecircuit.

Activevibration

isolatingUnit

Activevibrationisolating Controller

metallurgical microscope

Submicronprecision

positioner

Whiskerprobe(left)

forIn‐circuitprobi ng

*Standardprobeontherig ht

Activevibrationisolatingtable

Fail diemarking(Inker )

Weofferprobestationsthatcanbemountedonemission

microscopeandOBIRCH system.

Itcanmarkdefectivediewiththeminimumdotsizerangingfrom

minimum125μmφ tomaximum2150μmφ.

Itcanbemountedonoursemi‐autoprobersHSP‐100/150/200/300.

■ APPLICATIONS

Applications

Inkerhead

InkCartridge

Model

HP50/R(righthandmodel)

HP50/L(lefthandmodel)

Travelrange(X,Y,Z)

5/5/5mm

Screwresolution (X,Y,Z) 0.5mm/rev.

Featureresolution

10μm

Mounting

On/Offswitchingmagnetbase(standard)

Dimensions

W36×D85×H56mm

Weight

approx.200grams

Positioners (Manipulators)

HP50 Compactpositioner

Compactleadscrewfeedpositioner.

Thespecialguidemechanismallowsforstablecontacton50μmorlargerPAD.

Correspondence

Probestation

‐ HMP‐400/600

‐ HMP‐800/1200

‐ HMP‐FPDseries

HP65 Compacthigh‐accuracypositioner

Compactmicrometerfeedtypehigh‐accuracypositioner.

Easilyaccesses10μmorlargercircuitpattern orPADwithoutbacklash.

Model

HP65

Travelrange(X,Y,Z)

6.5/6.5/6.5mm