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Accessories Positioners (Manipul ators) ■ ACCESSORI ES HP130S Sub ‐ micron  accuracy  positioner Model HP130S  /  R  (  right  hand  model) HP130S  /  L  (  left  hand  model) Travel  range  (  X,Y,Z  )…

Accessories

Positioners (Manipulators)

■ ACCESSORIES

HP120 High‐accuracypositioner

Model

HP120

Travelrange(X,Y,Z)

12/12/12mm

Screwresolution (X,Y,Z) 0.254mm/rev.

Featureresolution

2μm

Mounting

On/Offswitchingmagnetbase(standard)

Dimensions

W52×D107×H91mm

Weight

approx.690grams

Correspondence

Probestation

‐ HMP‐400/600

‐ HMP‐800/1200

‐ HMP‐FPDseries

‐ HSP‐100/150

‐ HSP‐200/300

‐ HSP‐FPDseries

Precisionleadscrewfeedhigh‐accuracypositioner.

Stablecontacton10μmorlargercircuitpattern orPADwithoutbacklash.

◆ Physicaldimensions(unit:mm)

HP130A High‐accuracypositioner

Fine‐pitchmicrometerfeedhigh‐accuracypositioner.

Stablecontactoninternaldevices ofseveralmicrometersandsmallPAD.

Model

HP130A/R(righthandmodel)

HP130A/L(lefthandmodel)

Travelrange(X,Y,Z)

13/13/13mm

Screwresolution (X,Y,Z) 0.25mm/rev.

Featureresolution

1μm

Correspondence

Probestation

‐ HMP‐800/1200

‐ HMP‐FPDseries

‐ HSP‐100/150

‐ HSP‐200/300

‐ HSP‐FPDseries

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

Dimensions

[‐M]W71×D159×H124mm

[‐V]W66×D159×H124mm

Weight

[‐M]approx.1230grams

[‐V]approx.1190grams

◆ Physicaldimensions(unit:mm)

Accessories

Positioners (Manipulators)

■ ACCESSORIES

HP130S Sub‐micronaccuracypositioner

Model

HP130S/R(righthandmodel)

HP130S/L(lefthandmodel)

Travelrange(X,Y,Z)

13/13/13mm(Standard)

6.5/6.5/6.5mm(HRoption)

Screwresolution (X,Y,Z)

0.25mm/rev.(Standard)

0.1mm/rev.(HRoption)

Featureresolution

＜0.5μm

Correspondence

Probestation

‐ HMP‐800/1200

‐ HMP‐FPDseries

‐ HSP‐100/150

‐ HSP‐200/300

‐ HSP‐FPDseries

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

Dimensions

[‐M]W71×D159×H124mm

[‐V]W66×D159×H124mm

Weight

[‐M]approx.3200grams

[‐V]approx.3160grams

Steelultrahigh‐accuracypositioner.

Contactonsubmicroninternaldevices ispossiblewithexcellentrigidityand

feedaccuracy.

HP130S/L・R‐M On/Offswitchingmagnetbasemodel

HP130S/L・R‐VVacuumbasemodel

◆ Physicaldimensions(unit:mm)

HP130S/R‐M

On/Offswitchingmagnetbasemodel

HP130S/L‐V

Vacuumbasemodel

Accessories

Positioners (Manipulators)

■ ACCESSORIES

HP130-SC Positionerforshieldchamber

Positionerspeciallydesignedforsystemswithshieldchamber.

Model

HP130‐SC/R(righthandmodel)

HP130‐SC/L(lefthandmodel)

Travelrange(X,Y,Z)

13/13/13mm

Screwresolution (X,Y,Z) 0.25mm/rev.

Featureresolution

5μm

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

Correspondence

Probestation

‐ HMP‐810SC/1210SC

‐ HSP‐200SC/300SC

HAP300 Programmablepositioner

Model

HAP300/R(righthandmodel)

HAP300/L(lefthandmodel)

Travelrange(X,Y,Z)

30/30/10mm

Screwresolution (X,Y,Z) 0.25mm/rev.

Programmable resolution

0.1μm

X‐Y‐Z repeatability

±1.5μm

X‐Y‐Zaccuracy

±10μm(uncompensatedover10mm)

±5μm(withcompensation)

X‐Y‐Zmaximumspeed

5mm/sec

Typicalcycletime

0.5sec(X‐Y500μm,Z30μm)

Mounting

[‐M]On/Offswitchingmagnetbase

[‐V]Vacuumbase

[‐B]Mechanicboltdown

Dimensions

W157×D264×H183mm

Weight

approx.6100grams

Correspondence

Probestation

‐ HSP‐100/150

‐ HSP‐200/300

‐ HSP‐FPDseries

Steppingmotordrive‐typepositioner.WithHiSOL's semi‐automatic

probercontrolsoftware,itenablesfullyprogrammablehands‐offprobe

placement.ItsupportsI‐V/C‐VandRFapplications.

Accessories

◆ Physicaldimensions(unit:mm)