QP132三级参考手册.pdf.pdf - 第132页
1 1.1.2 Nozzle E and F 1. Enter zero for MQ3ANEOX [PM1] Nozzle _ E Offset X,Y. 2 . Enter the value of MQ3ANDOX [PM1] Nozzle _ D Offset X,Y to MQ3ANFOX [PM1] Nozzle _ F Offset X,Y. 3. Enter the value of MQ3ACOAX [PM1] Cen…
36. Copy the renewed Proper data from floppy to F4G/FujiCam and add the
center offset value of XLS.
37. Check the 3σ value.
38. Transmit the Proper data to the machine and reboot.
39. Repeat procedures 2 ~ 38.
Note: If a particular nozzle has poor accuracy, other causes may need to be investigated.
40. Repeat the procedure until:
CP: more than 1.7
CPK: more than 1.4
AVE: less than ± 20 µm
3σ: less than 100
Note: If the accuracy does not satisfy these conditions, contact FUJI.
ZC Automatic measurement for rotation center
-200
-100
0
100
200
-200 -100 0 100 200
0¡
90¡
180¡
270¡
ZC Rotate center with offset
-200
-100
0
100
200
-200 -100 0 100 200
0¡
90¡
180¡
270¡
QP132T11002
Chapter 11 11.1 PAM
Edition 1.1 11-4 QP-132 Level 3 Tutorial
11.1.2 Nozzle E and F
1. Enter zero for MQ3ANEOX [PM1] Nozzle _ E Offset X,Y.
2. Enter the value of MQ3ANDOX [PM1] Nozzle _ D Offset X,Y to
MQ3ANFOX [PM1] Nozzle _ F Offset X,Y.
3. Enter the value of MQ3ACOAX [PM1] Center offset A_X to MQ3ACOEX
[PM1] Center Offset E_X.
4. Enter the value of MQ3ACOAY [PM1] Center offset A_Y to MQ3ACOEY
[PM1] Center Offset E_Y.
5. Enter the value of MQ3ACODX [PM1] Center offset D_X to MQ3ACOEX
[PM1] Center Offset F_X.
6. Enter the value of MQ3ACODY [PM1] Center offset D_Y to MQ3ACOEY
[PM1] Center Offset F_Y.
7. Use program PAM_EF. PGO.
8. Repeat procedures 3 ~ 7 and 12 ~ 34 of Nozzle A, B, C and D.
Note: It is not necessary to measure the T-Mark.
9. Copy the sequence on the measured data to the QP132_1Cpk.xls for the
offset calculation.
10. Repeat the procedure 36 ~ 40 of Nozzle A, B, C and D.
Chapter 11 11.1 PAM
Edition 1.1 11-5 QP-132 Level 3 Tutorial
Notes:
Chapter 11 11.1 PAM
Edition 1.1 11-6 QP-132 Level 3 Tutorial