5M-1751-004w_G5S.pdf - 第92页
2-13 Sensor and Load Layout 5OM-1751 1305-002 Head Section Layout (Head U/D Section) M33 B071 1 Symbol Name Symbol Name M33 Head U/D (HL) Motor B071 1 Head U/D (-) Limit
2-12
Sensor and Load Layout
5OM-1751
1305-002
Head Section Layout (Nozzle U/D Section)
B0503
M34
Symbol Name Symbol Name
M34 Nozzle U/D (NL) Motor
B0503 Interlock Sensor
2-13
Sensor and Load Layout
5OM-1751
1305-002
Head Section Layout (Head U/D Section)
M33
B0711
Symbol Name Symbol Name
M33 Head U/D (HL) Motor
B0711 Head U/D (-) Limit
2-14
Sensor and Load Layout
5OM-1751
1305-002
Nozzle Stocker Section Layout
B_CMP1
B_DWN1
B_SH1
Y_OP1
Y_SH
Symbol Name Symbol Name
Y_SH Nozzle Stocker 2 Shutter Open/Close 1
Y_UP1 High-speed Nozzle Stocker 2 Ascending 1
B_DWN1
High-speed Nozzle Stocker 2 Unit Lower Limit Detection 1
B_SH1
High-speed Nozzle Stocker 2 Shutter Close Check 1
B_CMP1 High-speed Nozzle Stocker 2 Clamp Check 1