5M-1751-004w_G5S.pdf - 第99页
2-20 Sensor and Load Layout 5OM-1751 1305-002 B_DWN1 B_SH1 Y_UP1 Y_SH B_CMP1 B161 1 Symbol Name Symbol Name Y_SH Nozzle Stocker 2 Shutter Open/Close 1 Y_UP1 Multi Function Nozzle Stocker 2 Ascending 1 B_DWN1 Multi Functi…
2-19
Sensor and Load Layout
5OM-1751
Y146
M142(1L,2L)
M141(1Z,2Z)
B144
NOZZLE1 NOZZLE2
Y145
B143
1305-002
Multi-Functional Head Section Layout
Symbol Name Symbol Name
M141 Nozzle Z-Axis Motor B143 Height Detection Sensor
M142 Nozzle L-Axis Motor B144 L-Axis - Limit
Y145 Vacuum Valve
Y146 Vacuum Break Valve
2-20
Sensor and Load Layout
5OM-1751
1305-002
B_DWN1
B_SH1
Y_UP1
Y_SH
B_CMP1
B1611
Symbol Name Symbol Name
Y_SH Nozzle Stocker 2 Shutter Open/Close 1
Y_UP1 Multi Function Nozzle Stocker 2 Ascending 1
B_DWN1 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B_SH1 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B_CMP1
Multi Function Nozzle Stocker 2 Clamp Check 1
B_1611
Multi Function Nozzle Stocker 2
Setup Error Detection
Nozzle Stocker for Multi-Functional Nozzle Section Layout
5OM-1751
1304-001 3-A
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully be
referred to.