allied-catalog-2013.pdf - 第59页

59 www .alliedhightech.com Milling Single-point measurement display X-Prep ® V ision ™ Substrate Measurement Instrument Features:   Multipoint scan or single-point thickness measurement   10 µm to 1 mm thick range of…

(800) 675-1118 (USA & Canada) (310) 635-2466 (Worldwide)

Milling

X-Prep

Applications

3D TSV – Stacked Die

● Flip-chip - GPU

● NAND/Flash memory

● SoC, PoP and SiC – mobile processors

● Hybrid Super SoC’s

● WL/CSP – Wafer and chip-scale package

● 2.5D Devices - FPGA

Lead Frame

● Thin small outline package (TSOP)

● Shrink small outline package (SSOP)

● Small outline IC (SOIC)

● Dual inline package (DIP)

Leadless Quad

● Plastic leaded chip carrier (PLCC)

● Quad flat no-lead (QFN)

● Quad flat package (QFP)

Silicon die thinned to near transparency through the backside

Pre-chemical decapsulation - Cu bond wire

MOSFET/Bipolar device FA

Small device deprocessing

MCMQFN

Ceramic package

Uniform copper (Cu) pillar

deprocessing - molded

package, stacked die

Uniform ultrathin

bare die silicon

thinning

www.alliedhightech.com

Milling

Single-point measurement display

X-Prep

Vision

™

Substrate Measurement Instrument

Features:



Multipoint scan or single-point thickness

measurement

10 µm to 1 mm thick range of measurement

(15 nm to 1 mm thick when configured with

#15-51000 Spectrometer)

Motorized, automatic X/Y/Z with autofocus and

< 1s acquisition time

"Drive to Coordinate" software navigation

Viewing of either 2D plot/map or 3D graph

Software automation extendable through .NET

Stage fitted with X-Prep

fixture adapter

100 mm x 100 mm stage travel

Data export using standard Windows methods

Dims: 14" W x 17" D x 19" H (355 x 431 x483 mm)

Weight: 34 lbs (15 kg)

One (1) year warranty

X-Prep

Vision

™

is a metrology tool that enables

measurement of silicon and semitransparent substrates.

It is necessary for applications that require uniform

thinning to a specific target with a tolerance of ± 5 µm or

better.

The X-Prep

fixture adapter is also secured to the

motorized stage on the X-Prep

Vision™, ensuring the

measurement/tool control coordinates remain aligned

when transferred between systems.

A library with data on over 130 materials (e.g., GaAs,

InGaAs, SiC, Sapphire/Al

, InP, SiGe, GaN, photo-resist)

is included with every system.

Accessories

Measurement & Observation - How It Works

IR light is focused onto a sample, and a unique signal

based on the refractive index of the material is created.

The return signal is analyzed by the software to produce

a thickness value.

Measuring Below 10 µm Thickness

For applications requiring thinning to less than 10 µm,

precise measurement is possible only by adding the

visible light spectrometer accessory.

Item Description

15-50100 X-Prep

Vision

™

100

Substrate Measurement Instrument, 100-240 V

15-51000 Visible Light Spectrometer and CCD Camera

15-50020 CCD Camera

(800) 675-1118 (USA & Canada) (310) 635-2466 (Worldwide)

Milling

X-Prep

Accessories

A variety of fixtures are available to accommodate many sample sizes. Tabs on each fixture secure a borosilicate glass

carrier onto which samples are mounted using wax. The fixtures feature a serrated interface that reduces surface

contact to minimize sample registration errors. Borosilicate resists warping and maintains its shape through thermal

cycling. It is easily machined using diamond tools for sample registration, or to produce clearance pockets for

accommodating leads on device packages, capacitors or flip-chip die.

The fixture depth allows the sample to be submerged in lubricant during operation, maintaining lower sample and tool

temperature, increasing tool life and eliminating airborne particulates.

Fixtures

Ruby Tipped Probe Dust Extraction Vacuum, HEPA Filtration

Item Description

This quiet vacuum provides maximum health protection from

exposure to airborne contaminants generated from dry cutting

and/or grinding processes.

It features a triple filtration system with carbon and micro-

particle filter that are easy to change. Its automatic control

operates the unit only when suction is required.

Noise: ~ 15-20 dB over ambient.

Dims: 13" W x 13" H x 15" D (330 x 330 x 381 mm)

The ruby tipped probe is an accessory used for

leveling and profiling samples on the X-Prep

The probe stylus can be replaced should it

become damaged or chipped.

15-9180 Vacuum System, 115 V

15-9185 Vacuum System, 230 V

28-85175A14 Replacement Stylus, 1 mm Ø

28-2060.5 Replacement Stylus, .5 mm Ø

15-92RTP Ruby Tipped Probe, with

1 mm Ø Stylus

Item Description

15-9126 Borosilicate Glass Carriers, 2" x 2" (Pk/20)

15-9141 Borosilicate Glass Carriers, 4" x 4" (Pk/10)

15-9135 3" x 3" with 10 Borosilicate Carriers

15-9148 Borosilicate Glass Carriers, 4" x 6" (Pk/10)

15-9136 Borosilicate Glass Carriers, 3" x 3" (Pk/10)

15-9125 2" x 2" with 20 Borosilicate Carriers

15-9140 4" x 4" with 10 Borosilicate Carriers

15-9147 4" x 6" with 10 Borosilicate Carriers