allied-catalog-2013.pdf - 第60页
60 (800) 675-1 1 18 (USA & Canada) (310) 635-2466 (Worldwide) Milling X-Prep ® Accessories A variety of fixtures are available to accommodate many sample sizes. T abs on each fixture secure a borosilicate glass carri…
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Milling
Single-point measurement display
X-Prep
®
Vision
™
Substrate Measurement Instrument
Features:
Multipoint scan or single-point thickness
measurement
10 µm to 1 mm thick range of measurement
(15 nm to 1 mm thick when configured with
#15-51000 Spectrometer)
Motorized, automatic X/Y/Z with autofocus and
< 1s acquisition time
"Drive to Coordinate" software navigation
Viewing of either 2D plot/map or 3D graph
Software automation extendable through .NET
Stage fitted with X-Prep
®
fixture adapter
100 mm x 100 mm stage travel
Data export using standard Windows methods
Dims: 14" W x 17" D x 19" H (355 x 431 x483 mm)
Weight: 34 lbs (15 kg)
One (1) year warranty
X-Prep
®
Vision
™
is a metrology tool that enables
measurement of silicon and semitransparent substrates.
It is necessary for applications that require uniform
thinning to a specific target with a tolerance of ± 5 µm or
better.
The X-Prep
®
fixture adapter is also secured to the
motorized stage on the X-Prep
®
Vision™, ensuring the
measurement/tool control coordinates remain aligned
when transferred between systems.
A library with data on over 130 materials (e.g., GaAs,
InGaAs, SiC, Sapphire/Al
2
O
3
, InP, SiGe, GaN, photo-resist)
is included with every system.
Accessories
Measurement & Observation - How It Works
IR light is focused onto a sample, and a unique signal
based on the refractive index of the material is created.
The return signal is analyzed by the software to produce
a thickness value.
Measuring Below 10 µm Thickness
For applications requiring thinning to less than 10 µm,
precise measurement is possible only by adding the
visible light spectrometer accessory.
Item Description
15-50100 X-Prep
®
Vision
™
100
Substrate Measurement Instrument, 100-240 V
15-51000 Visible Light Spectrometer and CCD Camera
15-50020 CCD Camera
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(800) 675-1118 (USA & Canada) (310) 635-2466 (Worldwide)
Milling
X-Prep
®
Accessories
A variety of fixtures are available to accommodate many sample sizes. Tabs on each fixture secure a borosilicate glass
carrier onto which samples are mounted using wax. The fixtures feature a serrated interface that reduces surface
contact to minimize sample registration errors. Borosilicate resists warping and maintains its shape through thermal
cycling. It is easily machined using diamond tools for sample registration, or to produce clearance pockets for
accommodating leads on device packages, capacitors or flip-chip die.
The fixture depth allows the sample to be submerged in lubricant during operation, maintaining lower sample and tool
temperature, increasing tool life and eliminating airborne particulates.
Fixtures
Ruby Tipped Probe Dust Extraction Vacuum, HEPA Filtration
Item Description
Item Description
This quiet vacuum provides maximum health protection from
exposure to airborne contaminants generated from dry cutting
and/or grinding processes.
It features a triple filtration system with carbon and micro-
particle filter that are easy to change. Its automatic control
operates the unit only when suction is required.
Noise: ~ 15-20 dB over ambient.
Dims: 13" W x 13" H x 15" D (330 x 330 x 381 mm)
The ruby tipped probe is an accessory used for
leveling and profiling samples on the X-Prep
®
.
The probe stylus can be replaced should it
become damaged or chipped.
15-9180 Vacuum System, 115 V
15-9185 Vacuum System, 230 V
28-85175A14 Replacement Stylus, 1 mm Ø
28-2060.5 Replacement Stylus, .5 mm Ø
15-92RTP Ruby Tipped Probe, with
1 mm Ø Stylus
Item Description
15-9126 Borosilicate Glass Carriers, 2" x 2" (Pk/20)
15-9141 Borosilicate Glass Carriers, 4" x 4" (Pk/10)
15-9135 3" x 3" with 10 Borosilicate Carriers
15-9148 Borosilicate Glass Carriers, 4" x 6" (Pk/10)
15-9136 Borosilicate Glass Carriers, 3" x 3" (Pk/10)
15-9125 2" x 2" with 20 Borosilicate Carriers
15-9140 4" x 4" with 10 Borosilicate Carriers
15-9147 4" x 6" with 10 Borosilicate Carriers
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www.alliedhightech.com
Milling
X-Prep
®
Consumables
Made of solid carbide for maximum performance and
durability, these end mills are used to cut a wide variety of
materials, including soft metals (Al & Cu), circuit board (PCB)
substrates, ferrous metals (Fe) and other nonmetals.
2-Flute end mills have deeper, longer gullets for greater
chip-carrying capacity, and are center cutting.
4-Flute end mills produce finer finishes and last longer than
2-flute end mills, because wear is distributed over a greater
area. They also remove material more quickly and can be
moved across the sample at a higher rate.
Long Reach end mills feature cutting flutes that
extend up from the tip approximately 3x the tip
diameter to allow cutting into deeper cavities.
4-Flute 2-Flute
2-Flute
4-Flute
Carbide End Mills (Pk/4)
PCB tools
are specially
coated for
cutting through
glass-fiber
reinforced
circuit board
material.
Open small areas
(as little as 100
x 100 µm).
Easily machine through copper to
expose silicon.
Tip Ø x L PCB Al & Cu Fe
0.05 mm x 38 mm
- 15-922F0.05 -
0.25 mm
x 38 mm
15-922FP0.25 15-922F0.25 15-922FS0.25
0.5 mm
x 38 mm
15-922FP0.5 15-922F0.5 15-922FS0.5
0.7 mm
x 38 mm
15-922FP0.7 15-922F0.7 15-922FS0.7
1 mm
x 38 mm
15-922FP1.0 15-922F1.0 15-922FS1.0
1.5 mm
x 38 mm
15-922FP1.5 15-922F1.5 15-922FS1.5
2 mm
x 38 mm
15-922FP2.0 15-922F2.0 15-922FS2.0
3 mm
x 38 mm
15-922FP3.0 15-922F3.0 15-922FS3.0
Tip Ø x L PCB Al & Cu Fe
0.7 mm x 38 mm 15-924FP0.7 15-924F0.7 15-924FS0.7
1 mm x 38 mm 15-924FP1.0 15-924F1.0 15-924FS1.0
1.5 mm x 38 mm 15-924FP1.5 15-924F1.5 15-924FS1.5
2 mm x 38 mm 15-924FP2.0 15-924F2.0 15-924FS2.0
3 mm x 38 mm 15-924FP3.0 15-924F3.0 15-924FS3.0
4-Flute, Long Reach
Tip Ø x L Al & Cu Fe
0.7 mm x 38 mm 15-924F0.7-3 15-924FS0.7-3
1 mm x 38 mm 15-924F1.0-3 15-924FS1.0-3
1.5 mm x 38 mm 15-924F1.5-3 15-924FS1.5-3
Standard end mills (left) have tapered tips that may restrict the
depth of the cavity they can produce when compared to long
reach end mills (right).