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PN 141-400 www.formfactor.com Probe Card Holders • 99 Revision 57, February, 2023 Probe Station A ccessories – St andard HTS PCH rail assembly (PN 162-002) – O ptional HTS PCH de e p rail assembly (PN 162-003) • Theta ro…

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PN 141-400 www.formfactor.com Probe Card Holders • 98
Revision 57, February, 2023 Probe Station Accessories
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each
planarization point (3)
• Max probe card force: 20 kg (44 lb)
Kit Contents
• Probe card holder
• MicroChamber cover (supports TopHat microscope objective seal)
• Edg e connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
• Cable access/exit kit (2)
• Quick access covers (4)
• Standard PCH rail assembly (PN 162-000)
Compatibility
• Elite 300/AP, Elite 300/M, SUMMIT200-AP, SUMMIT200-M,
TESLA200-AP, TESLA200-M (<= 3kV)
Ordering Information
• For HTS compatible probe card holder, order 177-620
177-620/X2-PIPCHMH — MicroChamber Probe Card
Holder, HTS, 40 mm, Universal
Features
• Universal probe card holder
for 114 mm (4.5 in)
rectangular probe cards
• Maintains da rk, dry, EMI-
RFI shielded e nvironment
(Elite with MicroChamber)
• PCH can be oriented E/W/
S/N for short cables run to
test equipment
• Low profile de sign allows simultaneous probe card and internal
node needle probes
• Quick changeover from positioners to probe card
• Supports multiple probing configurations with removable access
covers
• Supports multiple probe card needle drafts with height adjustment
• Easy 3 -point probe card planarization
• Constructed with high-stability thermal materials
Specifications
• Temperature range supported: -60°C to 300°C (-76°F to 572°F)
• Probe card su pport:
– 114 mm (4.5 in) wide rectangular cards
– Max. probe card length with edge co nnector: 11.375
– Nee dles for 216 mm (8.5 in) long cards can be up to 64 mm (2.5
in) off center
• Probe card draft (distance between bottom of probe card and
probe tip):
Shown with all quick
access covers, exit
panels and TopHat cover
removed
Shown with all quick access
covers in place
Shown with TopHat cover
removed
• Front view of this
section is shown in
Standard HTS PCH rail
assembly (PN 162-002)
and Optional HTS PCH
deep rail assembly (PN
162-003) images below
• All units are in mm
PN 141-400 www.formfactor.com Probe Card Holders • 99
Revision 57, February, 2023 Probe Station Accessories
– Standard HTS PCH rail assembly (PN 162-002)
– Optional HTS PCH de ep rail assembly (PN 162-003)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each
planarization point (3)
• Max probe card force: 20 kg (44 lb)
Kit Contents
• Probe card holder
• MicroChamber cover (supports TopHat microscope objective seal)
• Edge connector kit with 48 a nd 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 h eight settings)
• Cable access/exit kit (2)
• Quick access covers (4)
• Standard HTS PCH rai l assembly (PN 162-002)
Compatibility
• Elite 300/AP, Elite 300/M, Summit with HTS platen, SUMMIT200-
AP, SUMMIT200-M, TESLA200-AP, TESLA200-M (<= 3kV)
Overall probe card draft = 4.55 mm – 11.07 mm
Overall probe card draft = 2.65 mm – 8.79 mm
Shown with all quick
access covers, exit
panels and TopHat cover
removed
Shown with all quick access
covers in place
Shown with TopHat cover
removed
PN 141-400 www.formfactor.com Probe Card Holders • 100
Revision 57, February, 2023 Probe Station Accessories
SUMMIT/S300
110-367 — Probe Card Holder for 6 in Round Cards
Features
• Probe card holder for 152 mm (6
in) round cards
• Mounts on Summit 12000 and
S300
Specifications
• 152 mm (6 in) round probe card holder (for Pyramid probe cards)
• Theta adjustment
• No Z (height) adjustment (probe station Z is required)
Compatibility
• Summit, S300
114-338 — High Force Probe Card Holder
Features
• Easy to use probe card
clamp
• Screw removal is not
required to change
similar types of probe
cards
• No tools requir ed to
clamp the probe card in place
• Back pivoting edge connector for easy mating of edge card
connector
• Sup port for 114 mm (4.5 in) rectangular probe cards up to 289 mm
(11.375 in) long
• Stable 3-point planarization adjustment
• Easy probe card height setting (three incremental settings)
• Probe card height adjustment accommodates FormFactor low
leakage probe ca rds and other probe cards
• Theta micrometer control located in front of the HF-PCH
• Includes 48 pin and 70 pin edge connectors
Specifications
• Maximum probe needle force: 20 kg (44 lb) (2,000 needles)
• Temperature range:
– System with MicroChamber -55ºC to 300ºC (-67ºF to 572ºF)
– System without Micr oChamber ambient t o 300ºC (572ºF)
• Theta ran ge: ±3º
• Maximum planarization height compensation: 1.27 mm (0.050 in)
• Probe card maximums:
– W = 11.4 cm ±3 mm (4.5 in ±.012 in)
– L = 15.25 cm 28.9 cm (6 in 11.375 in)
– Thickness = 0.15 cm 0.32 cm (0.060 in 0.125 in)
Compatibility
• Summit, S300
115-418 — High Force Pro be Card Holder for
MicroChamber
Features
• Easy to use
probe card
clamp
• Screw
removal is not
required to
change
similar types
of probe
cards
• No tools required to clamp the probe card in place
• Back p ivoting edge connector for easy mating of edge ca rd
connector
• Support for 114 mm (4.5 in) rectangular probe cards up to 289 mm
(11.375 in) long
• Maintains a dark and dry EMI-RFI shielded environment
(MicroChamber version o nly)
• Stable 3-point planarization adjustment
• Easy p robe card height setting (three incremental settings)
• Probe card height adjustment accommodates FormFactor low
leakage probe cards and ot her probe cards
• Theta micrometer control located in front of the HF-PCH
• Includes 48 pin and 70 pin ed ge connectors
Specifications
• Maximum probe needle force: 20 kg (44 lb) (2,000 needles)
• Temperature range:
– System with MicroChamber -55ºC to 300ºC (-67ºF t o 572ºF)
– System without MicroChamber ambient to 300ºC (572ºF)
• Theta range: ±3º
• Maximum planarization height compensation: 1.27 mm (0.050 in)
• Probe card maximums:
– W = 11.4 cm ±3 mm (4.5 in ±.012 in)
– L = 15.25 cm 28.9 cm (6 in 11.375 in)
– Thickness = 0.15 cm 0.32 cm (0.060 in 0.125 in)
Compatibility
• Summit