141-400-57-probestationaccessoriescatalog.pdf_-_141-400-probestationaccessoriescatalog_1.pdf.pdf - 第24页

PN 141-400 www.formfactor.com Cryogenic and Vacuum • 8 Revision 57, February, 2023 Probe Station A ccessories PM C2 00 W af er Ca rr i e r s 128 02 7 — W af er Car ri er , 200 mm, PMC2 00 Feat ur es • For mounting, fixin…

100%1 / 169
PN 141-400 www.formfactor.com Cryogenic and Vacuum • 7
Revision 57, February, 2023 Probe Station Accessories
Cryogenic a nd Vacuum
Miscellaneous Cryogenic and Vacuum System Accessories
49827 — LN
2
Transport Dewar, 120l
Features
• Tank h ead with safety valve, fill level
gauge, central ball valve with 12 mm
(0.5 in) quick lock fitting
• Fill le vel gauge
• Internal pressure build-up system
Specifications
• Transfer tube DN10/1.5m
• Maximum positive operating pressure:
1.5 bar
Compatibility
• Cryogenic systems only
49906 — HF Precision Cable, PC-2.4 50GHz/0.8m with
Right Angle Plug Male/Male
Features
• Flexible
• Male-right angle male
• Cable le ngth: 0.8 m (32 in)
Compatibility
• PMC200, PMV200, PLV50
51113 — LHe Transport Dewar 120l
Features
• Specified for transportation of liquid
helium (LHe) on public roads
• Made of stainless steel
• Connection flange DN 50 KF
• With casters, safety v alve, vibration
damper and pressure gauge
• Head with safety ne ck tube, central ball
cock and 12 mm (0.5 in) quick lock fitting
• Two side-gated ball valves for p ressure
relief and bypass valve
Specifications
• Maximum overpressure 1.2 bar gauge
pressure
Compatibility
• Cryogenic systems only
PN 141-400 www.formfactor.com Cryogenic and Vacuum • 8
Revision 57, February, 2023 Probe Station Accessories
PMC200 Wafer Carriers
128027 — Wafer Carrier, 200 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tand ard 200 mm (8 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spr ing (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
130474 — Wafer Carrier, 150 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tand ard 150 mm (6 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spr ing (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
130476 — Wafer Carrier, 100 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tandard 100 mm (4 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring s haped leaf spring (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for be st
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
133758 — Substrate Holder, 4K, PMC200
Features
• For mounting, fixing and handling of
small substrates, maximum size 25 x 25
mm (1 x 1 in), with F ormFactor
cryogenic probe stations. Size and
shape of the substrate needs to be
specified with the order.
• Includes additional cold shield for achieving lowest sample
temperature
• Mounting outside vacuum chamber recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a clamping mask (top-side substrate contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for be st
heat contact between wafer and chuck
Compatibility
• PMC200
PN 141-400 www.formfactor.com Cryogenic and Vacuum • 9
Revision 57, February, 2023 Probe Station Accessories
136397 — Universal Carrier, PMC200
Features
• For mounting, fixing and handling of
substrates of different shapes or
wafers up to 75 mm (3 in) wi th
FormFactor cryogenic probe stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical substrate/wafer clamping: mechanical
clamping from top by a universal cla mping mask (top-side
substrate/wafer contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
Specifications
• Maximum substrate dimensions:
– 76.2 mm (3 in) (full wafer)
– 150 mm (6 in) (quartered wafer)
– 76.2 x 76.2 mm (3 x 3 in) or 50 x 110 mm (2 x 4.3 in)
Compatibility
• PMC200