4M-1751-005w_G5S.pdf - 第118页

4OM-1751 1-68 5.7 Nozzle Filter Insertion Procedure 1903-005    Acrylic bloc…

4OM-1751

1-671903-005

5.7 Nozzle Filter Insertion Procedure

 

support jig.

High-speed

nozzle stocker

Filter remove support jig

F4A73A

 

nozzle.

Air filter

Filter remove pin

F4A74

Note



 

positioning holes in the jig.

Tweezers

Filter positioning hole

Air filter

Filter replacement jig

F4A75A

Note



M380Y-000) or similar tool.

4OM-1751

1-68

5.7 Nozzle Filter Insertion Procedure

1903-005

 



Acrylic block

High-speed

nozzle stocker

F4A76A

Note





If nozzles are set in the opposite direction;



replacement jig. Attach the block mount surface of nozzle stocker to the opposite

side.

Nozzle stocker

(opposite direction)

Bottom of jig

Block mount surface

5 bolts

Pin hole

(opposite direction)

F4A78

 

nozzles.

Metal pusher

F4A77A

 

4OM-1751

1-69

6. Use Procedure of Diusion Plate Setup Jig

Procedure

  

Outer Diffusion Plate

Inner Diffusion Plate

F4A65

(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the



Take care not to damage the linear measure sensor.

Jig 1 Jig 2

F4A66

 

F4A67

1304-001

6. Use Procedure of Diusion Plate Setup Jig