N7201A707C.pdf - 第295页
NPM-W X / W XS EJM9DC-MB-04T-00 4-1 -2 设备部 G111 M502 R4200 R4202 B1110 M508 R4704 R4706 R4705 R4205 M504 M506 R4032 R4132 R301 G211 G112 G111 M501 G113 B113 R4204 R4206 B1010 R4700 R4702 R4701 R4201 M503
NPM-WX / WXS EJM9DC-MB-04T-00
负荷配置图 1
故障排除
4-1
4-1-1
全体安全盖
料架工作台盖
G103S311
B1046
G104
B1047
S312
B0235
B0116
Front:
B1231T,B1232T,B1233T,B1234T
Rear:
B1237T,B1240T,B1241T,B1242T
Front:
B1231,B1232,B1233,B1234
Rear：
B1237,B1240,B1241,B1242
Front:S315
Rear:S316
Front:B1732
Rear:B1740
Front:B1734
Rear:B1742
Front:B1732T
Rear:B1740T
NPM-WX / WXS EJM9DC-MB-04T-00
4-1-2
设备部
G111
M502
R4200
R4202
B1110
M508
R4704
R4706
R4705
R4205
M504
M506
R4032
R4132
R301
G211
G112
G111
M501
G113 B113
R4204
R4206
B1010
R4700
R4702
R4701
R4201
M503
NPM-WX / WXS EJM9DC-MB-04T-00
负荷配置图 2
故障排除
4-1
4-1-3
基板传送带(单式)
基板支架(单式)
B1224
B1225
B1020
B1021
B1022
B1023
B1030
B1031
B1124
B1125
B1132
B1133
M611
M613
M610
M612
M619
M614
M616
M617M615B121RB123
R4212
R4712
R4710
R4711
R4210
R4211
B1724
B1725