5OM-1603-005_w.pdf - 第100页
5OM-1603 2-19 Sensor and Load Layout 1 102-001 Upper Stage : Left V iew Lower Stage : Right V iew B0618 B0918 B0620 B0920 Y0636 Y0936 Y0635 Y0935 B0622 B0922 Symbol Name Symbol Name Y0635 Nozzle Stocker 2 Shutter Open/Cl…
5OM-1603
2-18
Sensor and Load Layout
Y1719
M142(1L,2L,3L)
M141(1Z,2Z,3Z)
B02
B04
B01
B05
NOZZLE1 NOZZLE2 NOZZLE3
B07
Y1718
1102-001
Multi-Functional Head Section Layout
Symbol Name Symbol Name
M141 Nozzle Z-Axis Motor B01 L-Axis + Limit
M142 Nozzle L-Axis Motor B02 L-Axis - Limit
Y1719 Vacuum Valve B04 L-Axis Pass Line
Y1718 Vacuum Break Valve B05 Excesive Pushing Detection
B07 Vacuum Sensor
5OM-1603
2-19
Sensor and Load Layout
1102-001
Upper Stage : Left View
Lower Stage : Right View
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 Multi Function Nozzle Stocker 2 Ascending 1 Y0936 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1
B0622
Multi Function Nozzle Stocker 2 Clamp Check 1
B0922
Multi Function Nozzle Stocker 1 Clamp Check 1
Nozzle Stocker for Multi-Functional Nozzle Section Layout
5OM-1603
2-20
Sensor and Load Layout
1102-001