5OM-1603-005_w.pdf - 第186页

5OM-1603 5-3 1 102-004A(13AAF) Beam Relay Panel Connection Diagram_Robot Cable 2 -X2200 -X12102 -X12410 -X12201 -X22501 -X22507 -X1E39 -X13601 -M22 -X12501 -X3601 -B2101 -B2102 -B2202 -E39 -U21 -U22

5OM-1603

5-2

1102-004A(13AAE)

Beam Relay Panel Connection Diagram_Robot Cable 1

-X2100

-X2300

-X231P1

-X12301

-X1311A

φ6 Air Tube

φ8 Air Tube

-X1311B

-M21

-M23

-X131P1

-X311A

φ6 Air Tube

φ8 Air Tube

-X311B

-U23

5OM-1603

5-3

1102-004A(13AAF)

Beam Relay Panel Connection Diagram_Robot Cable 2

-X2200

-X12102

-X12410

-X12201

-X22501

-X22507

-X1E39

-X13601

-M22

-X12501

-X3601

-B2101

-B2102

-B2202

-E39

-U21

-U22

5OM-1603

5-4

1102-004J(01300-6)

Side Panel L

X10520-10

X10520-9

A21,A22,A23(R) #L11

A21,A22,A23(F) #L11

A21,A22,A23(R) #L21

A21,A22,A23(F) #L21

NOISE FILTER:Z02

Q206-1,3

Q201-1,3,5

K10-1,3,5

K28-1,3

K28-2,4

External Unit Bundled Connector (R)

External Unit Bundled Connector (F)

OP: Coplanarity Detection Power Supply

CPU 1,CPU 3 Power Supply

CPU 2 Power Supply

Black

Green/Yellow

Black

Note 4

Note 3

Note 1

Note 2

Note 1

Note 2

Note 1

Note 3

Note 4

Note 3

Note 1

Note 3

Note 1

Note 3

Note 1

Black

Blue

Brown

Grounding Green/Yellow

White

Grounding Green/Yellow

Red

Black

White

Grounding Green/Yellow

Red

Black

White

Grounding

Red

Black

Light Blue

Brown

Grounding Green/Yellow

Light Blue