5OM-1603-005_w.pdf - 第91页
5OM-1603 2-10 Sensor and Load Layout 1 102-003 Head Section Layout (Nozzle Selection Section) M32 B3101 Symbol Name Symbol Name M32 Nozzle Selection (NS) Motor B3101 Nozzle Selection Position Detection
5OM-1603
2-9
Sensor and Load Layout
1102-003
Head Section Layout (Head Rotation Section)
U37
Y0401-Y0415
B0413R
M31
B0413T
Symbol Name Symbol Name
U37 Slip Ring
M31 Head Rotation (DD) Motor
B0413T Linear Measure Sensor (Light Emission)
B0413R Linear Measure Sensor (Light Reception)
Y0401-Y0415 Vacuum Changeover Valve 1 to 15
5OM-1603
2-10
Sensor and Load Layout
1102-003
Head Section Layout (Nozzle Selection Section)
M32
B3101
Symbol Name Symbol Name
M32 Nozzle Selection (NS) Motor
B3101 Nozzle Selection Position Detection
5OM-1603
2-11
Sensor and Load Layout
1102-003
Head Section Layout (Nozzle U/D Section)
B3105
B3104
Symbol Name Symbol Name
M33 Nozzle U/D (NL) Motor
B3104 Nozzle U/D (+) Limit
B3105 Nozzle U/D (-) Limit