N7202A029B40_SPG_Parts List_零件部品一覽表.pdf - 第272页
6 マスク吸着用空圧回路部:SPG Air Curcuit For Mask Vacuum:SPG パーツレイアウト Kit No. キット 品番 Kit Name キット名称 N610140116AA セクションNo. PARTS LAYOUT Section No. - - O17 ( KN610140116AA-07 )
Ref
No.
Remarks R
1
Q'ty
5
爪付きマスク吸着Mサイズ枠対応分割クランパ:SPG
Mask Vacuum M-size Capable Separate Clamper With Foil:S
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140119AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
CLAMPER
1
1 N210173899AD
PLATE
1
2 N210173900AC
PLATE
1
3 N210173901AC
PIN
8
4 N210162965AA
CLAMPER
1
5 N210173902AD
PLATE
1
6 N210173903AC
PLATE
1
7 N210173904AC
PLATE
1
8 N210143297AA
PLATE
1
9 N210114704AA
PLATE
1
10 N210173905AA
PLATE
2
11 N210114705AB
AIR-SLIDE
2
12 N510019323AA MXPJ6-5-X23A
JOINT
4
13 N510064400AA M-3AU-4-X83
JOINT
8
14 MTNP000834AA M-5HL-4-X83
BOLT
12
15 N510017333AA
Hexagon socket head cap screw M3X5-10.9 A2J (Trivalent)
BOLT
4
16 N510017341AA
Hexagon socket head cap screw M3X8-10.9 A2J (Trivalent)
BOLT
8
17 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J (Trivalent)
BOLT
4
18 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
BOLT
8
19 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
BOLT
4
20 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
4
21 N510017511AA
SSS 003 Hexagon socket button head screw M3X5-10.9 A2J (Trivalent)
O16
--
( KN610140119AA-04 )
6
マスク吸着用空圧回路部:SPG
Air Curcuit For Mask Vacuum:SPG
パーツレイアウト
Kit No.
キット品番
Kit Name
キット名称
N610140116AA
セクションNo.
PARTS LAYOUT
Section No.
--
O17
( KN610140116AA-07 )
Ref
No.
Remarks R
1
Q'ty
6
マスク吸着用空圧回路部:SPG
Air Curcuit For Mask Vacuum:SPG
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140116AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
COVER
1
1 N210143758AB
Valve
1
2 N610026797AB Valve:-F4003
JOINT
1
3 N510066656AA KQ2L12-02AS
SILENCER
1
4 N510064385AA AN15-02
JOINT
1
5 N510066670AA KQ2VT06-02AS
JOINT
1
6 N510066671AA KQ2R04-06A
FILTER
2
7 N510067058AA ZFC75-B
JOINT
4
8 N510066658AA KQ2R06-08A
SENSOR
1
9 MTNS000063AA DP-102-13
BOLT
2
10 N510017513AA
SSS 003 Hexagon socket button head screw M3X6-10.9 A2J (Trivalent)
JOINT
2
11 N510066636AA KQ2UD04-06A
TUBE
1
12 N510058734AA TFU0425W-4-10-X4
TUBE
1
13 KXF0DXNQA00 TU1208W-20
TUBE
1
14 KXF0E113A00 TU0604W-20
TUBE
1
15 KXF07WCAA00 TU0425W-20
BOLT
4
16 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
WASHER
2
17 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
BOLT
2
18 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
WASHER
2
19 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
WASHER
4
20 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
4
21 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
JOINT
1
22 KXF029JAA00 KJL04-M5
O18
--
( KN610140116AA-07 )