5OM-1064-001.pdf - 第147页

Section 6 Location of Sensors and Loads Layout of Sensors and Loads in Dual-Beam X/Y (Y Axis) 0005-002-(M741Y-CB-1 101) 6-5 Tg0250-PM-MD

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads in Dual-Beam X/Y (X Axis)

0005-002-(M741Y-CB-1102) 6-4 Tg0250-PM-MD

View from Machine B Side (Front) to X-Axis of Machine A Side (Rear)

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads in Dual-Beam X/Y (Y Axis)

0005-002-(M741Y-CB-1101) 6-5 Tg0250-PM-MD

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads in Nozzle Stocker

0005-002-(M741Y-F--1101) 6-6 Tg0250-PM-MD