5OM-1064-001.pdf - 第152页

Section 6 Location of Sensors and Loads Layout of Sensors and Loads for Conveyor (based on “Rear Reference”) 0005-002-(M741Y-N--1 102) 6-10 Tg0250-PM-MD

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads for Conveyor (based on “Front Reference”)

0005-002-(M741Y-N--1101) 6-9 Tg0250-PM-MD

Note: Refer to “Layout of Sensors and Loads

in Nozzle Stocker” for “-YSV12A, B”.

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads for Conveyor (based on “Rear Reference”)

0005-002-(M741Y-N--1102) 6-10 Tg0250-PM-MD

Section 6 Location of Sensors and Loads

Layout of Sensors and Loads in Backup Base

0005-002-(M741Y-P--1102) 6-11 Tg0250-PM-MD