5OM-1626-001_w.pdf - 第85页
5OM-1610 2-10 Sensor and Load Layout 091 1-001 High Speed Head Section Layout (Nozzle Selection Section) M32 B3101 Symbol Name Symbol Name M32 Nozzle Selection (NS) Motor B3101 Nozzle Selection Position Detection
5OM-1610
2-9
Sensor and Load Layout
0911-001
High Speed Head Section Layout (Head Rotation Section)
U37
Y0401-Y0415
B0413R
M31
B0413T
Symbol Name Symbol Name
U37 Slip Ring
M31 Head Rotation (DD) Motor
B0413T Linear Measure (Light Emission)
B0413R Linear Measure (Light Reception)
Y0
401-Y0415 Vacuum Changeover Valve 1 to 15
5OM-1610
2-10
Sensor and Load Layout
0911-001
High Speed Head Section Layout (Nozzle Selection Section)
M32
B3101
Symbol Name Symbol Name
M32 Nozzle Selection (NS) Motor
B3101 Nozzle Selection Position Detection
5OM-1610
2-11
Sensor and Load Layout
0911-001
High Speed Head Section Layout (Nozzle U/D Section)
B3105
B3102
B3104
M33
Symbol Name Symbol Name
M33 Nozzle U/D (NL) Motor
B3102 Nozzle U/D Interlock
B3104 Nozzle U/D (+) Limit
B3105
Nozzle U/D (-) Limit