5OM-1626-001_w.pdf - 第88页
5OM-1610 2-13 Sensor and Load Layout 091 1-001 High Speed Nozzle Stocker Section Layout B0622 B0922 B0618 B0918 B0620 B0920 Y0636 Y0936 Y0635 Y0935 Upper Stage: Front V iew Lower Stage: Rear V iew Symbol Name Symbol Name…
5OM-1610
2-12
Sensor and Load Layout
0911-001
High Speed Head Section Layout (Head U/D Section)
M34
B3106
B3103
Symbol Name Symbol Name
M34 Head U/D (HL) Motor
B3103 Head U/D (+) Limit
B3106 Head U/D (-) Limit
5OM-1610
2-13
Sensor and Load Layout
0911-001
High Speed Nozzle Stocker Section Layout
B0622
B0922
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
Upper Stage: Front View
Lower Stage: Rear View
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 High-speed Nozzle Stocker 2 Ascending 1 Y093
6 High-speed Nozzle Stocker 1 Ascending 1
B0618 High-speed Nozzle Stocker 2 B0918 High-speed Nozzle Stocker 1
Unit Lower Limit Detection 1 Unit Lower Limit Detection 1
B0620 High-speed Nozzle Stocker 2 B0920 High-speed Nozzle Stocker 1
Shutter Close Check 1 Shutter Close Check 1
B0622
High-speed Nozzle Stocker 2 Clamp Check 1 B0922 High-speed Nozzle Stocker 1 Clamp Check 1
5OM-1610
2-14
Sensor and Load Layout
0911-001
Conveyor Section Layout (Outside : A-Lane)
Symbol Name Symbol Name
M41 NL-LA1 B4101 Lane A Deceleration Sensor (L Flow),
M42 NL-LA2 STOP
Sensor (R Flow)
M43 NA-LA1 B4102 Lane A Stop Sensor A Mounting Section 1
M44 NA-LA2 B4301 Lane A Stop Sensor A Mounting Section 1
M49 NR-LA1 B4401 Lane A Stop Sensor A Mounting Section 2
M50 NR-LA2 B4901 Lane A Stop Sensor (L Flow),
M162 NA Chute Width Changeable (1) Deceleration Sensor (R Flow)
M163 NA Chute Width Changeable (2) B1
4
10
PCB Stopper
AL
Upper Sensor
B1
4
1
1
PCB Stopper AL Origin Sensor
B1412 PCB Stopper AR Upper Sensor
B1413 PCB Stopper AR Origin Sensor
B0818
Movable Chute Backup Pin Sensor 1 (Light Reception)
B0818T
Movable Chute Backup Pin Sensor 1 (Light Emission)
B0819
Movable Chute Backup Pin Sensor 2 (Light Reception)
B0819T
Movable Chute Backup Pin Sensor 2 (Light Emission)
VIEW“A”
A
VIEW“B”
B4101
B4102
B4301
B4401
B1410,1411
B1412,1413
M41
M50
M49
M4901
B0819
B0819T
M42
A
B B
B0818
B0818T
M43
M162
M44
M161