5OM-1626-001_w.pdf - 第96页
5OM-1610 2-21 Sensor and Load Layout Multi Function Nozzle Stocker Section Layout 091 1-001 B0618 B0918 B0620 B0920 Y0636 Y0936 Y0635 Y0935 B0622 B0922 Upper Stage : Left V iew Lower Srage : Right V iew Symbol Name Symbo…
5OM-1610
2-20
Sensor and Load Layout
0911-001
Multi Function Head Section Layout
Symbol Name Symbol Name
M141 Nozzle Z-Axis Motor B01 L-Axis 1 + Limit
M142 Nozzle L-Axis Motor B02 L-Axis 1 - Limit
Y1719 Vacuum Valve B04 L-Axis 1 Pass Line
Y1718 Vacuum Breaker B05 Excessive Pushing Detection
B07 Vacuum Sensor
Y1719
M142(1L,2L,3L)
M141(1Z,2Z,3Z)
B02
B04
B01
B05
NOZZLE1 NOZZLE2 NOZZLE3
B07
Y1718
5OM-1610
2-21
Sensor and Load Layout
Multi Function Nozzle Stocker Section Layout
0911-001
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Upper Stage : Left View
Lower Srage : Right View
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 Multi Function Nozzle Stocker 2 Ascending 1 Y09
36 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2 B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1 Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2 B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1 Shutter Close Check 1
B0622
Multi Function Nozzle Stocker 2 Clamp Check 1 B0922 Multi Function Nozzle Stocker 1 Clamp Check 1
5OM-1610
2-22
Sensor and Load Layout
0911-001