mi17050592.pdf - 第29页
Micromachines 2026 , 17 , 592 29 of 34 Finally , the data exposes a critical divergence between sample efficiency and true temporal efficiency . Although Global BO consistently requires the fewest physical mea- surements (…

Micromachines 2026, 17, 592
28 of 34
5.2.2. Scenario 2: LS-NH (Low-Speed, No Hysteresis)
Algorithmic hysteresis compensation effectively eliminates the reset-to-zero over-
head, although hardware actuation speeds remain inherently slow. This configuration
successfully isolates the specific operational benefits of software-based compensation. With
hysteresis effectively mitigated in software, alignment times improve across all methods
(Table 3). Nevertheless, Fix-Grad maintains its operational dominance. Var-Grad provides
a marginal speed advantage of roughly 2 a.u., but its lower reliability presents an unfa-
vorable speed-versus-yield trade-off. Although the removal of physical reset maneuvers
improves the relative viability of Bayesian methods compared to the LS-H scenario, their
computational overhead keeps them slower than gradient-based alternatives, solidifying
Fix-Grad as the definitively recommended strategy.
5.2.3. Scenario 3: HS-H (High-Speed with Hysteresis)
Representing typical production conditions, this scenario pairs rapid hardware kine-
matics with uncompensated hysteresis. Evaluating algorithmic efficacy under these con-
straints is vital for industrial systems where implementing feedforward compensation
remains impractical. In this realistic high-volume configuration, Fix-Grad is strongly rec-
ommended when alignment reliability is paramount, maintaining peak success rates while
remaining highly competitive in execution speed. Var-Grad should be restricted to prelimi-
nary screening applications where occasional failures are an acceptable trade-off for rapid
alignment. Notably, this scenario highlights a critical limitation of the Global BO approach:
without cross-scan initialization, pure probabilistic exploration struggles to resolve the
hysteresis-distorted landscape efficiently, resulting in both the lowest reliability and longest
execution time among the optimization methods.
5.2.4. Scenario 4: HS-NH (High-Speed No Hysteresis)
This ideal regime couples rapid hardware kinematics with effective feedforward hys-
teresis compensation [
14
,
16
]. Representing the gold standard for production deployment,
this configuration highlights the ultimate capabilities of the algorithms. Fix-Grad is defini-
tively recommended, delivering an optimal balance of high reliability and rapid alignment
to effectively mitigate throughput bottlenecks [
3
]. While Var-Grad achieves the absolute
fastest alignment time (approaching 1 a.u.), its persistent 9.7% failure rate remains a lim-
iting factor for strict production environments. Conversely, despite requiring the fewest
physical measurement steps, the substantial computational overhead of GP fitting severely
inflates the temporal cost of the Global BO method, rendering it unsuitable for high-volume
environments demanding both absolute reliability and sub-second speed.
5.3. Cross-Scenario Performance Analysis
A cross-scenario comparison reveals several critical insights. First, the Fix-Grad
algorithm demonstrates exceptional robustness, consistently achieving 95.8% reliability
across all speeds and hysteresis conditions. Conversely, Global BO is most sensitive to
uncompensated hysteresis: in the LS regime, reliability drops from 93.1% to 88.9% (
−
4.2%),
and in the HS regime, from 90.3% to 88.9% (
−
1.4%), while its alignment time inflates by
92%, rendering it problematic without active feedforward compensation.
Hardware kinematics and hysteresis mitigation drastically impact throughput. Transition-
ing from low-speed to high-speed regimes accelerates Fix-Grad alignment by 14.6
×
(from 20.95
to 1.44 a.u. without hysteresis) and 21.9
×
(from 72.47 to 3.32 a.u. with hysteresis). Managing
hysteresis via the mandatory reset-to-zero strategy roughly doubles execution time across
all algorithms (detailed in Table 3). Importantly, despite this severe temporal penalty, final
positioning accuracy consistently exceeds 98%, validating the open-loop control architecture.
https://doi.org/10.3390/mi17050592

Micromachines 2026, 17, 592
29 of 34
Finally, the data exposes a critical divergence between sample efficiency and true
temporal efficiency. Although Global BO consistently requires the fewest physical mea-
surements (24 steps), its substantial computational overhead for Gaussian Process updates
results in a longer total execution time (2.24 a.u.) than Fix-Grad (1.44 a.u. across 34 steps).
Consequently, sample efficiency alone is a misleading metric for evaluating high-volume
production throughput.
5.4. Impact of Operating Speed
High-speed operation is essential for achieving production-viable throughput, as it
drastically reduces per-die optical alignment time. Using the Fix-Grad algorithm as a
benchmark, execution time decreases from 72.47 a.u. in the worst-case low-speed hysteretic
regime (LS-H) to 20.95 a.u. in the low-speed non-hysteretic regime (LS-NH), 3.32 a.u. in
the high-speed hysteretic regime (HS-H), and ultimately 1.44 a.u. in the ideal high-speed
non-hysteretic regime (HS-NH). Transitioning from low-speed to high-speed operation
therefore yields a 14.6-fold acceleration in the absence of hysteresis and an even larger
21.9-fold speedup when hysteresis is present.
The practical significance of this acceleration becomes clear at the wafer scale. For a
standard 300 mm wafer containing 200 PIC dies, the total optical alignment burden rises to
approximately 14,500 a.u. in the LS-H regime, which is clearly impractical for manufactur-
ing. Under realistic high-speed operation with hysteresis (HS-H), this total is reduced to
approximately 664 a.u., already representing a major improvement in throughput. In the
ideal HS-NH regime, the total falls further to approximately 288 a.u. per wafer.
To relate these normalized values to real production conditions, we note that the ideal
Fix-Grad alignment time of 1.44 a.u. is consistent with the sub-second per-die optical cou-
pling times reported in state-of-the-art automated photonic test systems [
10
,
11
]. Under this
interpretation, the HS-NH regime corresponds to full-wafer optical alignment in a matter
of minutes, whereas the LS-H regime would translate into a multi-hour process devoted
only to optical alignment. This difference clearly shows that high-speed actuation is not
merely beneficial, but fundamentally necessary for meeting the throughput requirements
of high-volume PIC and co-packaged optics manufacturing [1,3].
Overall, these results validate the importance of integrating high-speed piezoelectric
drive electronics directly into the probe-card architecture. They also show that, when
combined with an efficient search strategy such as Fix-Grad, the Eclipse Dynamic platform
can achieve alignment times consistent with the fastest per-die coupling results reported in
the recent literature [10,11].
5.5. Impact of Hysteresis
Hysteresis imposes a severe temporal penalty due to mandatory reset-to-zero motions,
inflating high-speed execution times by 130% for the Fix-Grad algorithm (from 1.44 to
3.32 a.u.) and by 92% for the Global BO method (from 2.24 to 4.29 a.u.). Despite this
near-halving of throughput, robust algorithms maintain highly stable alignment quality:
Fix-Grad retains a constant 99.4% accuracy and 95.8% reliability regardless of hysteresis.
Conversely, the Global BO approach experiences a reliability degradation from 90.3% to
88.9%, indicating that uncompensated hysteresis distorts the coupling landscape sufficiently
to trap pure probabilistic exploration in local maxima. Ultimately, the business case for
implementing feedforward hysteresis compensation, such as inverse P-I models [
14
,
16
], is
highly compelling. Mitigating these nonlinearities effectively doubles system throughput
and tester capacity, thoroughly justifying the initial software development investment.
https://doi.org/10.3390/mi17050592

Micromachines 2026, 17, 592
30 of 34
5.6. Statistical Validity: Data Profiles Versus Averages
Data profile analysis (Figures 9 and 10) confirms the above mentioned findings [
18
].
For instance, while Var-Grad exhibits a misleadingly low average step count (26.1), its
data profile reveals a premature plateau at a 90.3% success rate, indicating fundamental
algorithmic limitations rather than mere parameter mistuning. Conversely, the steep profile
slopes of the Fix-Grad and Local BO algorithms demonstrate rapid, highly consistent
convergence. From a practical manufacturing perspective, these profiles explicitly quantify
worst-case performance and failure rates, directly informing throughput modeling by
accounting for severe manual intervention overhead.
5.7. Comparison to State-of-the-Art
Contextualized against recent automated alignment benchmarks that report multi-
second per-die execution times [
10
,
11
], the evaluated methods demonstrate highly com-
petitive, sub-second performance. Operating entirely in an open-loop configuration, the
Fix-Grad algorithm achieves a rapid 1.44 a.u. alignment time alongside 95.8% reliability
and 99.4% accuracy. Furthermore, experimental validation of the Local BO method yields
a 100% success rate and a 3–4
×
speedup (99.87 a.u.) over exhaustive reference scans.
Crucially, these capabilities are realized without closed-loop position feedback, relying
instead on computationally efficient algorithmic optimization, where even GP fitting runs
in real-time on embedded systems and robust feedforward hysteresis compensation [
14
,
33
].
This performance underscores a critical innovation: deploying sophisticated algo-
rithms to effectively compensate for simplified hardware mechanics. By eliminating the
necessity for bulky external positioning equipment, this approach enables the cost-effective
integration of optical alignment capabilities directly into the probe card. For high-volume
PIC manufacturing [
3
,
20
], this integrated architecture provides a profound advantage. It
inherently facilitates simultaneous multi-channel parallel testing, delivering multiplica-
tive throughput enhancements that scale significantly beyond standard per-die speed
improvements [5,12].
5.8. Limitations and Future Work
Several avenues warrant further investigation to advance automated wafer-level
photonic testing. Future research will explore data-driven control architectures to further
enhance system throughput. Specifically, replacing analytical hysteresis models with
Long Short-Term Memory (LSTM) networks is expected to yield higher accuracy by better
capturing deep, history-dependent piezoelectric behaviors. Concurrently, Reinforcement
Learning (RL) agents offer the potential to adaptively counteract complex mechanical wear
and drift over the lifespan of the probe card, outperforming static algorithms for dynamic
fine-stage optimization.
Additionally, expanding these methods to multi-fiber array alignments will require
strategies to balance peak loopback transmission with channel uniformity and crosstalk
limits across the array. Because the FAU moves as a rigid block, optimizing a single
channel can induce misalignment on peripheral channels due to planar tilt. Utilizing
the differential Y1/Y2 piezoelectric actuators for precise rotational tilt compensation will
be essential in navigating these multi-channel compromises. Finally, standardizing chip
layouts, such as fixing input/output port offsets and reference waveguide lengths across
different PIC designs, would significantly narrow the spatial bounding required for search
algorithms, accelerating the cross-scan initialization phase for both Bayesian and Gradient
methodologies. To mitigate the initialization challenges observed in Bayesian methods,
historical wafer data can also be leveraged to generate predictive spatial probability maps,
drastically reducing initial search areas. Furthermore, online learning and advanced sensor
https://doi.org/10.3390/mi17050592