mi17050592.pdf - 第30页

Micromachines 2026 , 17 , 592 30 of 34 5.6. Statistical V alidity: Data Profiles V ersus Averages Data profile analysis (Figur es 9 and 10 ) confirms the above mentioned findings [ 18 ]. For instance, while V ar-Grad exhibit…

100%1 / 34
Micromachines 2026, 17, 592
29 of 34
Finally, the data exposes a critical divergence between sample efficiency and true
temporal efficiency. Although Global BO consistently requires the fewest physical mea-
surements (24 steps), its substantial computational overhead for Gaussian Process updates
results in a longer total execution time (2.24 a.u.) than Fix-Grad (1.44 a.u. across 34 steps).
Consequently, sample efficiency alone is a misleading metric for evaluating high-volume
production throughput.
5.4. Impact of Operating Speed
High-speed operation is essential for achieving production-viable throughput, as it
drastically reduces per-die optical alignment time. Using the Fix-Grad algorithm as a
benchmark, execution time decreases from 72.47 a.u. in the worst-case low-speed hysteretic
regime (LS-H) to 20.95 a.u. in the low-speed non-hysteretic regime (LS-NH), 3.32 a.u. in
the high-speed hysteretic regime (HS-H), and ultimately 1.44 a.u. in the ideal high-speed
non-hysteretic regime (HS-NH). Transitioning from low-speed to high-speed operation
therefore yields a 14.6-fold acceleration in the absence of hysteresis and an even larger
21.9-fold speedup when hysteresis is present.
The practical significance of this acceleration becomes clear at the wafer scale. For a
standard 300 mm wafer containing 200 PIC dies, the total optical alignment burden rises to
approximately 14,500 a.u. in the LS-H regime, which is clearly impractical for manufactur-
ing. Under realistic high-speed operation with hysteresis (HS-H), this total is reduced to
approximately 664 a.u., already representing a major improvement in throughput. In the
ideal HS-NH regime, the total falls further to approximately 288 a.u. per wafer.
To relate these normalized values to real production conditions, we note that the ideal
Fix-Grad alignment time of 1.44 a.u. is consistent with the sub-second per-die optical cou-
pling times reported in state-of-the-art automated photonic test systems [
10
,
11
]. Under this
interpretation, the HS-NH regime corresponds to full-wafer optical alignment in a matter
of minutes, whereas the LS-H regime would translate into a multi-hour process devoted
only to optical alignment. This difference clearly shows that high-speed actuation is not
merely beneficial, but fundamentally necessary for meeting the throughput requirements
of high-volume PIC and co-packaged optics manufacturing [1,3].
Overall, these results validate the importance of integrating high-speed piezoelectric
drive electronics directly into the probe-card architecture. They also show that, when
combined with an efficient search strategy such as Fix-Grad, the Eclipse Dynamic platform
can achieve alignment times consistent with the fastest per-die coupling results reported in
the recent literature [10,11].
5.5. Impact of Hysteresis
Hysteresis imposes a severe temporal penalty due to mandatory reset-to-zero motions,
inflating high-speed execution times by 130% for the Fix-Grad algorithm (from 1.44 to
3.32 a.u.) and by 92% for the Global BO method (from 2.24 to 4.29 a.u.). Despite this
near-halving of throughput, robust algorithms maintain highly stable alignment quality:
Fix-Grad retains a constant 99.4% accuracy and 95.8% reliability regardless of hysteresis.
Conversely, the Global BO approach experiences a reliability degradation from 90.3% to
88.9%, indicating that uncompensated hysteresis distorts the coupling landscape sufficiently
to trap pure probabilistic exploration in local maxima. Ultimately, the business case for
implementing feedforward hysteresis compensation, such as inverse P-I models [
14
,
16
], is
highly compelling. Mitigating these nonlinearities effectively doubles system throughput
and tester capacity, thoroughly justifying the initial software development investment.
https://doi.org/10.3390/mi17050592
Micromachines 2026, 17, 592
30 of 34
5.6. Statistical Validity: Data Profiles Versus Averages
Data profile analysis (Figures 9 and 10) confirms the above mentioned findings [
18
].
For instance, while Var-Grad exhibits a misleadingly low average step count (26.1), its
data profile reveals a premature plateau at a 90.3% success rate, indicating fundamental
algorithmic limitations rather than mere parameter mistuning. Conversely, the steep profile
slopes of the Fix-Grad and Local BO algorithms demonstrate rapid, highly consistent
convergence. From a practical manufacturing perspective, these profiles explicitly quantify
worst-case performance and failure rates, directly informing throughput modeling by
accounting for severe manual intervention overhead.
5.7. Comparison to State-of-the-Art
Contextualized against recent automated alignment benchmarks that report multi-
second per-die execution times [
10
,
11
], the evaluated methods demonstrate highly com-
petitive, sub-second performance. Operating entirely in an open-loop configuration, the
Fix-Grad algorithm achieves a rapid 1.44 a.u. alignment time alongside 95.8% reliability
and 99.4% accuracy. Furthermore, experimental validation of the Local BO method yields
a 100% success rate and a 3–4
×
speedup (99.87 a.u.) over exhaustive reference scans.
Crucially, these capabilities are realized without closed-loop position feedback, relying
instead on computationally efficient algorithmic optimization, where even GP fitting runs
in real-time on embedded systems and robust feedforward hysteresis compensation [
14
,
33
].
This performance underscores a critical innovation: deploying sophisticated algo-
rithms to effectively compensate for simplified hardware mechanics. By eliminating the
necessity for bulky external positioning equipment, this approach enables the cost-effective
integration of optical alignment capabilities directly into the probe card. For high-volume
PIC manufacturing [
3
,
20
], this integrated architecture provides a profound advantage. It
inherently facilitates simultaneous multi-channel parallel testing, delivering multiplica-
tive throughput enhancements that scale significantly beyond standard per-die speed
improvements [5,12].
5.8. Limitations and Future Work
Several avenues warrant further investigation to advance automated wafer-level
photonic testing. Future research will explore data-driven control architectures to further
enhance system throughput. Specifically, replacing analytical hysteresis models with
Long Short-Term Memory (LSTM) networks is expected to yield higher accuracy by better
capturing deep, history-dependent piezoelectric behaviors. Concurrently, Reinforcement
Learning (RL) agents offer the potential to adaptively counteract complex mechanical wear
and drift over the lifespan of the probe card, outperforming static algorithms for dynamic
fine-stage optimization.
Additionally, expanding these methods to multi-fiber array alignments will require
strategies to balance peak loopback transmission with channel uniformity and crosstalk
limits across the array. Because the FAU moves as a rigid block, optimizing a single
channel can induce misalignment on peripheral channels due to planar tilt. Utilizing
the differential Y1/Y2 piezoelectric actuators for precise rotational tilt compensation will
be essential in navigating these multi-channel compromises. Finally, standardizing chip
layouts, such as fixing input/output port offsets and reference waveguide lengths across
different PIC designs, would significantly narrow the spatial bounding required for search
algorithms, accelerating the cross-scan initialization phase for both Bayesian and Gradient
methodologies. To mitigate the initialization challenges observed in Bayesian methods,
historical wafer data can also be leveraged to generate predictive spatial probability maps,
drastically reducing initial search areas. Furthermore, online learning and advanced sensor
https://doi.org/10.3390/mi17050592
Micromachines 2026, 17, 592
31 of 34
data imputation techniques [
44
] must be developed to maintain alignment robustness
against real-time probe drift and intermittent signal degradation.
Transitioning these methodologies to high-volume manufacturing demands broader
experimental validation across diverse foundries, device architectures, and multi-fiber
arrays. In such high-dimensional optimization landscapes, the algorithmic hierarchy may
shift favorably toward Bayesian surrogate models [
5
,
11
]. Crucially, these sub-second
alignment strategies must be seamlessly integrated into double-sided test cells to meet
the aggressive throughput demands of CPO production flows [
1
,
3
]. Finally, coupling
operational alignment metrics with digital twin frameworks and transformer-based sensor
placement [
45
,
46
] will enable robust structural health monitoring, facilitating predictive
maintenance and extending probe card lifespans in demanding industrial environments.
6. Conclusions
This paper presented a comprehensive evaluation of alignment optimization tech-
niques for wafer-level photonic integrated circuit testing, utilizing the Technoprobe Eclipse
Dynamic probe card system. Through robust experimental validation and extensive simu-
lations spanning diverse operating regimes, incorporating varying actuation speeds and
hysteresis conditions, this study systematically benchmarked seven alignment algorithms.
The results unequivocally establish the Fix-Grad algorithm as the optimal solution for
high-volume manufacturing. Across all evaluated conditions, this approach demonstrated
exceptional robustness, consistently delivering a 95.8% reliability rate and 99.4% align-
ment accuracy.
Transitioning to high-speed actuator drive electronics is essential for production via-
bility, providing a 14.6–21.9
×
throughput improvement over low-speed operation (Table 3).
In the ideal high-speed, hysteresis-compensated regime, the Fix-Grad algorithm achieved a
rapid alignment time of 1.44 a.u. per die. While uncompensated hysteresis approximately
doubles this execution time, algorithmic mitigation strategies successfully preserve final
measurement quality without requiring complex closed-loop positioning feedback. Alter-
native methods presented specific trade-offs—the Var-Grad technique offered the fastest
alignment (1.18 a.u.) but suffered a higher failure rate of 9.7%, rendering it suitable only for
non-critical screening. Furthermore, despite high sample efficiency, BO approaches exhib-
ited excessive computational overhead and heightened sensitivity to hysteresis, limiting
their viability for strict production environments.
From a production perspective, data profile analysis confirms that the high reliability
of the Fix-Grad method limits manual operator intervention to just 4.2% of tested dies. For a
standard 300 mm wafer containing 200 dies, this integrated architecture facilitates complete
optical characterization in approximately 288 to 664 a.u., depending on the extent of active
hysteresis compensation. By achieving highly reliable optical alignments entirely through
open-loop control, this system matches or exceeds the performance metrics reported in
recent literature [
10
,
11
]. Crucially, embedding this capability directly into the probe card
eliminates the need for bulky external positioning stages, significantly reducing overall
equipment footprint and enabling the parallel multi-channel testing required for emerging
CPO architectures [1,3].
Future research will focus on advancing data-driven control strategies to further
enhance system throughput and absolute accuracy. Key initiatives include implementing
Long Short-Term Memory networks to replace analytical models for history-dependent
hysteresis compensation, alongside deploying Reinforcement Learning agents to adaptively
counteract complex mechanical irregularities. Additionally, leveraging historical wafer
data to generate predictive spatial heatmaps will heavily optimize search initialization
parameters. Expanding these methodologies to accommodate simultaneous multi-fiber
https://doi.org/10.3390/mi17050592