AppX.A_spec_mx3600_sys_10.11.pdf - 第15页
MX - 3600 / CXI3600M X / Specification confidential 15 / 39 spec_mx3600_sys_10.11.doc Key-Features of the MX -36 00 load/unload and han dling system: Load/unload board buffering in input and out put conveyor No -shut…
MX-3600 / CXI3600MX / Specification
confidential 14/39 spec_mx3600_sys_10.11.doc
2.3. Motion System
2.3.1. Load/Unload Handling
The load/unload section is designed for high speed throughput. For faster load
and unload cycles a board buffering in the input and output conveyor is used.
During the inspection and load/unload cycle the X-Ray power is permanently
one, which is saving x-ray ramp-up and down cycles. Via timer the X-Ray
switches in stand-by mode, if no sample board is loaded.
Status definitions in the MX-3600 load/unload system:
IC Status/Input - Conveyor
XY-T Input Conveyor to Table
OC Status/Output-Conveyor
Table 3: Summary of all process-steps for load/unload of inspection sample:
Load/Unload Step
IC
XY-T
OC
X-RAY
SMEM
A
Inspection
Unload Board from
XY-T to OC
loaded
Load to
free
free to
load
Beam-On
Ready
No
Move XY-T to IC
loaded
Free
loaded
Beam-On
Busy
No
Load Board from IC
to XY-T
load to
free
free to
load
load to
free
Beam-On
Busy
No
XY-T inspection
move
free to
load
loaded
free
Beam-On
Stop
Active
Auto Beam-Off
Cycle
IC
XY-T
OC
X-RAY
SMEM
A
Inspection
Unload Board from
XY-T to OC
free
Load to
Free
Free to
load
Beam-On
Stop
No
Move XY-T to IC
Free
Free
loaded
Beam-On
Stop
No
Load Board from IC
to
XY-T
Free
to
free
Free to
free
Load to
free
Beam-Off
Ready
No
Optional:
Dual Board Load:
two boards are loaded on-to the x/y table to run inspection mode
together !
dual load board size: 2 x (200mm x 305mm) or (8’’ x 12’’)
time saving effect: approx. 3-4s per board!
(close to half loading cycle / 1 loading cycle = 8s)
MX-3600 / CXI3600MX / Specification
confidential 15/39 spec_mx3600_sys_10.11.doc
Key-Features of the MX-3600 load/unload and handling system:
Load/unload board buffering in input and output conveyor
No-shutter times because of long external conveyor
Beam-On/Off cycle generates zero ramping time loss
Table 4: Load/Unload Handling Parameter
Parameter
Input-Section
Output-Section
Total
Load-Unload Time
<4s
<4s
< 8s
Top Clearance (incl.
Board thickness)
Optional:
up to 12,5 mm
15 mm
up to 12,5mm
15mm
up to 12,5mm
15mm
Bottom Clearance
up to 37,5mm
up to 37,5mm
up to 37,5mm
MX-3600 / CXI3600MX / Specification
confidential 16/39 spec_mx3600_sys_10.11.doc
2.3.2. Sample Table
The sample x-y table is designed for high speed positioning to meet the
inspection goal of 3 images/s.
The new precise spindle servo drives together with the digital servo amplifiers
providing the capability for faster ramps and positioning during the FOV
positioning.
Fig.9: XMX-3600 / x-y table with new servo motor drives and digital amplifiers